PF2A/PF2W

or less 5% F .S. or less Data Repeatability Note 3) 1% F .S. or less 3% F .S. or less Temperature characteristics 2% F .S. or less (0 to 50C, based on 25C), 1% F .S. or less (15 to 35C, based on 25C) Current consumption (No load) 60 mA or less 50 mA or less Weight 45 g Maximum load current: 80 mA Internal voltage drop: 1V or less (With load current of 80 mA) Maximum applied voltage: 30 V

C95

See the intersection of lateral axis 500 mm/s and 200 line, and extend the intersection to left. Thus the allowable load is 800 kg.

Table of Contents

DIN rail for 9 stations J kit (Flat ribbon cable connector) S kit (Serial) kit F kit (D-sub connector) P kit (Flat ribbon cable connector) When changing the manifold style into a DIN rail mount Order brackets for mounting a DIN rail. (Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53 62 84 138 20 47 238 44

MNB

15 11 9.5 11 14 11 9.5 11 14 11 7.5 10 13 10 8.5 9 13 9 ML1C D-A5/A6 9 D-A59W 13 9 DD-A3/A44 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 5.5 6.5 7.5 7 5.5 5.5 -X D-Y7BAL 5 4.5 4 3.5 3.5 3.5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 4.5 4.5 4.5 4 4 3.5 Data D-G39/K39 11 11 11 10 9 4 4 4.5 4 4.5 9 D-P5DWL Since this is a guideline including hysteresis, not meant to be guaranteed.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

How to Order Specifications and Allowable Load 11 MSQ 10 A90 B A S Grade 1 Note) Particle generation grade Suction flow rate (example) 1 l/min (ANR) 11-MSQA is identical to the high precision type and 11-MSQB is identical to the basic type. Number of auto switches Clean Series Vacuum type CRB2 Note) Please refer to Pneumatic Clean Series catalog for further details.

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Vacuum System Peripherals:

DeviceNet, OMRON Corp.: CompoBus/D Q OMRON Corp.: CompoBus/S (16 points output) R1 OMRON Corp.: CompoBus/S (8 points output) R2 S 02 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RS Double wiring specification Made to order 08 8 Can accommodate up to 16 solenoids

MLGP

0.1 10 50 100 200 0.7 10 50 100 200 RLQ Eccentric distance l1 (mm) Eccentric distance l1 (mm) MLU MLGPL32 to 100 ML1C (12) Over 50 Stroke V = 400 mm/s (11) 50 Stroke or Less V = 400 mm/s D100 50 100 -X 100 2080 80 Data 10 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 40 40 1 32 32 0.1 10 50 100 200 1 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) 9-11-11 11 Series

MXQ

+ 0.2 S 745 100 70 23 30 23 25 47 35 335 340 380 450 490 655 43 + 0.2 S 1250 1400 160 105 40 53 40 45 75 60 605 610 670 735 835 1000 55 + 0.2 S 2350 2650 2900 310 130 65 120 65 80 170 115 1100 1100 1100 1200 1400 1750 166 + 0.5 S 3450 4300 4700 560 200 110 140 110 130 220 180 1750 1750 1750 1950 2400 2750 240 + 0.5 S Option Specifications Stroke Adjustment Range of Adjuster Option (Identical

VFS

12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

Auto Switch Guide

RS Q G RS H A RZQ Weight MI W S Auto Switch Internal Circuit D-F7NV (g) CEP1 D-F7NV D-F7PV D-F7BV Auto switch model DC (+) Brown CE1 11 13 13 0.5 Lead wire length (m) 50 57 57 3 Main circuit of switch CE2 OUT Black 81 92 92 5 ML2B DC () Blue Dimensions C J G5-S 3.5 mounting hole D-F7PV CV Indicator light DC (+) Brown MVGQ Main circuit of switch Main circuit of switch CC OUT Black RB DC ()

CRQ2

(without keys on the long shaft) J Double round shaft K Shaft end form 11-8-12 to 11-8-24 Pattern Rotation range -X6 Shaft, parallel key stainless spec. 11-8-1 2 Compact Rotary Actuator Rack & Pinion Style Series CRQ2 Size: 10, 15, 20, 30, 40 How to Order Without auto switch With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 F9BW S Shaft type Built-in magnet Courtesy of Steven Engineering, Inc

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Free mount type MSU Without auto switch 20 90 S M SUA CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 20 90 S D SUA L T79 M With auto switch CRQ2 Number of auto switches S Nil 1 pc. MSQ With auto switch unit 2 pcs.

C76

) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-C73C D-C80C D-H7C Auto Switch Mounting Position (mm) D-C7 D-C80 D-C73C D-C80C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore B A B A 32 6 7 7 8 40 11 13 12 14 Aim at this number.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Stroke range Bore size (mm) MM XA Y ZZ MA MB MC NA NB P S M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 6 6 12 12 16 16 20 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 11 11 16 16 16 16 20 10 10 12 12 15 15 23 19 26 21 34 86 107 120 138 150 171 198 4 4 4 4 5 5 6 20 25 32 40 50 63 80 M5 x 0.8

REA/REB

speed of 600mm/s.

CNG

7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l ZZ H e f h ZZ 20 25 32 40 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 11 11 M5 x 0.8 3 12 35 178 (186) 30 16 55 198 (206) 0.25 x Stroke M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 (159) 11 11 M6 x 0.75 3 12 40 193 (201)

CXS

mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 8-28-7 7 Series CXS Horizontal Mounting Graph (6) Up to 30 mm stroke Graph (5) Up to 10 mm stroke V = Up to 400 mm/s V = Up to 800 mm/s V = Up to 400 mm/s V = Up to 800 mm/s 0.2 0.2 0.1 0.1 Weight m (kg) Weight

ARM10/11

AXT100-DR-9 AXT100-DR-11 AXT100-DR-13 AXT100-DR-16 AXT100-DR-18 AXT100-DR-20 AXT100-DR-22 AXT100-DR-25 AXT100-DR-27 AXT100-DR-29 123 148 173 210.5 235.5 SMC SMC 260.5 K K P P C C U U O O S S L H L H 57 285.5 53 33.5 323 18 348 IN OUT IN OUT IN 373 14-4-28 11 Series ARM11A Compact Manifold Regulator Common Supply Type ARM11AC2-12-B Handle position: Bottom/3-way valve common supply block For