High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Possible to transfer a workpiece at low-speed.

Description Qty. 4 4 4 4 1 1 1 1 Seal Seal Seal Seal 10 10 10 10 1 1 1 1 Gasket Gasket Gasket Gasket Parts included in seal kit 11 11 11 11 1 1 1 1 Gasket Gasket Gasket Gasket 15 Wear ring 15 Wear ring 15 Wear ring 15 Wear ring 4 4 4 4 16 Piston seal 16 Piston seal 16 Piston seal 16 Piston seal 4 4 4 4 25 Seal washer 25 Seal washer 25 Seal washer 25 Seal washer 2 2 2 2 A set includes all

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 24 or more 31 0 0.4 4 x R2 or less Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 23 2 Outputs + Analog Output (Voltage/Current) 3-Screen Display High-Precision Digital Pressure Switch for General Fluids

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

14.5 17 285.5 275 254.5 15.5 18 298 287.5 265 16.5 19 310.5 300 275.5 17.5 20 310.5 300 286 12.5 L1 L2 L3 L4 External Pilot Manifold L Dimension n: Stations L n 2 135.5 125 107.5 14 16 285.5 275 254.5 15.5 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15 10 223 212.5 191.5 16 11 235.5 225 202 17 12

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

VQ4000

light 50 11 (12.5) 11 (12.5) 2 4 4(A) port 2(B) port 24.6 38 48 4 2 B A 24.6 A B 38 48 14 12 5 3 1 B A 30 45 14 3 5 1 12 2-5.6 Mounting hole Manual override 2-5.6 Mounting hole 45 30 Manual override 14.5 27 30.5 32 41.5 91.5 129 79 PE X PE X 32 41.5 30.5 27 R1 R2 P R2 R1 14.5 P 19.5 19.5 (21) (21) Rc 1/8 External pilot port Rc 1/8 PE port Rc 1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc 1/4

Series VQ Metal Seal/Rubber Seal Body Ported

Dimensions (mm) Equation L1=10.5n+14.5, L2=10.5n+25 n: Station (Max.16) n L 1 2 46 56.5 225 235.5 6 88 98.5 262.5 273 3 56.5 67 237.5 248 7 98.5 109 275 285.5 4 67 77.5 250 260.5 8 109 119.5 287.5 298 5 77.5 88 250 260.5 9 119.5 130 300 310.5 10 130 140.5 312.5 323 14 172 182.5 350 360.5 11 140.5 151 312.5 323 15 182.5 193 362.5 373 12 151 161.5 325 335.5 16 13 161.5 172 337.5 348 L1 L2 L3

Refrigerated Air Dryer

Large size IDFAF Series Outlet air pressure dew point Page Model Rated inlet condition Air flow capacity (m3/h [ANR]) Port size IDFA100F-38 960 R2 40C IDFA125F-38 10C 1210 R2 1/2 0.7 MPa IDFA150F-38 1500 DIN flange 80 P. 98 to 100 IDFA100F-40 860 R2 35C IDFA125F-40 3C 1100 R2 1/2 0.7 MPa IDFA150F-40 1340 DIN flange 80 3.

VQ5000

Note 3) When two or more symbols are specified, indicate them alphabetically. 3 m 2-6-11 Base Mounted 12 Series VQ5000 Kit (D-sub Connector kit) F Applicable connector: D sub connector (25P) (Conforming to MIL-C-24308) 83 29.5 29.5 2-Rc 1/8 (Pilot EXH port) 12 21 47.5 36 5 R1 PE 3 R2 1 P SMC 6-Rc 3/4 (P), 5(R1), 3(R2) port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

VS 8-2/VS 8-4

49 12.5 (F) (T) (F) (T) VV802-R-01 (Size 18 mm) 18 9 1/8" VV801-R-03 (Size 26 mm) By mounting individual EXH spacers on a manifold block, it is possible to provide individual EXH ports for each valve. (3(R2), 5(R1) common EXH type) 22.5 11 Size 18 mm 1(P) 129.5 4(A) 61 2(B) 3(R') 19 26 13 3/8" 5(R1) 3(R2) Circuit diagram 28.6 14.3 Size 26 mm 23 Series VS 8-2/VS 8-4 S R S R Conforms to ISO

VQ4000

) (12.5) 11(B port) (12.5) Indicator light Indicator light 167 181 59 73 50 90 108 2 4 24.6 38 48 11 (A port) 11 (B port) B A (12.5) (12.5) 14 12 1 5 3 4 2 Manual override 30 45 24.6 A B 25.6 Mounting hole 38 48 B A 14 5 3 1 12 30 45 25.6 Mounting hole Manual override 14.5 27 30.5 32 41.5 91.5 129 G1/2 Electrical entry 79 PE X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5 R1 R2 P 15.5 Rc1/8 External

Digital Flow Switch

Input time 30 ms or longer Reference condition*11 Select from Standard condition or Normal condition.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

-6 = 9.0 x 10-6 (kgm2) Moment of inertia around Z axis IA = IZ1 + m1r12 X 10-6 z r2 Z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis IZ2 = {m2 (d2 + e2)/12} x 10-6 IZ2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) IB = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) I =

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

-6 = 9.0 x 10-6 (kgm2) Moment of inertia around Z axis IA = IZ1 + m1r12 X 10-6 z r2 Z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis IZ2 = {m2 (d2 + e2)/12} x 10-6 IZ2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) IB = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) I =

CATALOG

11 M5x0.8 20 106 35 25 ~300 19.5 22 16.5 10 14 2 12 12 31 M5x0.8 Depth 7.5 5 8 M10x1.25 29 18 69 11 11 M6x0.75 25 111 40 32 ~300 19.5 22 20 12 18 2 12 11 38 M5x0.8 Depth 8 5.5 10 M10x1.25 36 18 71 11 10 M8x1.0 40 32 113 40 ~300 27 30 26 16 25 2 13 12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13

A

11 M5x0.8 20 106 35 25 ~300 19.5 22 16.5 10 14 2 12 12 31 M5x0.8 Depth 7.5 5 8 M10x1.25 29 18 69 11 11 M6x0.75 25 111 40 32 ~300 19.5 22 20 12 18 2 12 11 38 M5x0.8 Depth 8 5.5 10 M10x1.25 36 18 71 11 10 M8x1.0 40 32 113 40 ~300 27 30 26 16 25 2 13 12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13

CM2

20 33.5 5.5 M10 X 1.25 1 to 300 19.5 17 6 M26 X 1.5 137 146 30 15 30 9 14 22 30 62 9 10 10 13 25 8 45 26 34.5 37.5 5.5 M10 X 1.25 1 to 300 19.5 17 6 M26 X 1.5 139 148 30 15 9 14 22 30 64 9 10 12 13 32 8 45 26 21 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1 to 300 22 8 177 188 39 11 18 24 38 88 10 15 14 16 40 11 50 32 With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 51 to 100 1 to 50 51 to 100

OMR0032

switch setting Turn ON No. 2 and No. 5, and (a) 24 VDC +/10% R2 = 1.5 k turn OFF the others.

Battery-less

750 20 to 550 10 to 300 Actuator specifications 451 to 500 10 to 600 5 to 300 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 800 16 to 620 8 to 310 30 to 750 20 to 550 10 to 300 Parallel Stroke range