Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Table of Contents

(different sides) D-M9N/M9P/M9B 15 3 3 3.5 2 pcs. (same side) D-F9NW/F9PW/F9BW 55 5 5 4.5 D-M9N/M9P/M9B 1 or 2 pcs. (different sides) D-F9BAL 15 5 6 5 2 pcs. (same side) The operating range for the MGZP series is under examination. 55 Solid state switch D-F9NW/F9PW/F9BW 1 or 2 pcs. (different sides) 15 2 pcs. (same side) 70 Bore size (mm) D-F9BAL Auto switch model 1 or 2 pcs.

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

Specification: Clean Series, Vacuum Type, Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Type, Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Type, Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -

ISO Cylinder

5 4 4 3.5 3.5 10 6.5 (7) 6.5 (7) 2 (2.5) 2 (2.5) 3 (3.5) 3 (3.5) 10 5 (5.5) 5 (5.5) 4 (4.5) 4 (4.5) 3.5 (4) 3.5 (4) 12 7.5 (8.5) 7.5 (8.5) 3 (4) 3 (4) 4 (5) 4 (5) 12 6 (7) 6 (7) 5 (6) 5 (6) 4.5 (5.5) 4.5 (5.5) 13.5 (10.5) [7.5] 12 (9) [6] 9.5 (6.5) [3.5] 11 (8) [5] 10.5 (7.5) [4.5] 8 (5) [2] 9.5 (6.5) [3.5] 9 (6) [3] 10 (7) [4] 16 7.5 (8.5) 16 6 (7) 3.5 (4.5) 5 (6) 4.5 (5.5

Table of Contents

Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo

Free Mount Cylinder

5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 7 10 11 12 15.5 19.5 3.2 3.2 4.5 5.5 5.5 6.6 12.5 14 18 22 13 15 20 26 32 40 7 9 12 16 20 24 22 24 32 40 50 62 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 3 4 6 8 10 12 7 7 7 9 10 11 15 16.5 16.5 19 21.5 23 10 10 11.5 12.5 13 12.5 13 16 16 19 23 27 10 11 14 16 20 24 17 18

Smooth Cylinder/Low Speed Cylinder

D-X 1211 Series CG1Y Auto Switch Mounting 2 Operating Range (mm) Auto switch model Bore size 20 25 32 40 50 63 80 100 D-A9 (V) D-M9 (V) D-M9W (V) D-M9A (V) 7 6 8 8 8 9 4.5 5 4.5 5.5 5 5.5 D-C7/C80 D-C73C/C80C 9 10 10 11 10 8 D-B5/B64 D-B59W 9 10 10 11 11 11 10 8 18 14 14 14 17 16 13 13 D-H7/H7mW D-H7NF 4.5 5 6 6.5 4 4 D-H7C 9 10 9.5 10.5 8.5 7 D-G5/G5W/G59F D-G5BA/K59/K59W 7 4.5

Air Cylinder

(0) 1 () 0 () 7 (5) 6 (4) 4 (2) 3 (1) CA2 25 10.5 (8) 9.5 (7) 6.5 (4) 5.5 (3) 0.5 () 0 () 6 (4) 5 (3) 2.5 (0.5) 1.5 (0) 1 () 0 () 7 (5) 6 (4) 4 (2) 3 (1) CS1 32 11.5 (9) 10.5 (8) 7.5 (5) 6.5 (4) 1.5 (0) 0.5 (0) 7 (5) 6 (4) 3.5 (1.5) 2.5 (0.5) 2 (0) 1 (0) 8 (6) 7 (5) 5 (3) 4 (2) 40 17.5 15.5 13.5 11.5 6.5 5.5 12 11 8.5 7.5 7 6 13 12 10 9 CS2 * ( ): Setting position for the auto switch with

5

4.5 5.5 5 5.5 20 25 32 40 50 63 80 100 D-H7/H7mW D-H7NF 4 4 4.5 5 6 6.5 REA D-H7C 7 8.5 9 10 9.5 10.5 D-G5/G5W/G59F D-G5BA/K59/K59W 4 4 4.5 5 6 6.5 6.5 7 D-A9(V) 7 6 8 8 8 9 D-C7/C80 D-C73C/C80C 8 10 9 10 10 11 REB D-G5NT 4 4 4.5 5 6 6.5 6.5 7 D-G5NB 35 40 40 45 45 45 45 50 D-B5/B64 8 10 9 10 10 11 11 11 D-B59W 13 13 14 14 14 17 16 18 REC * Values which include hysteresis are for

Electric Actuator/Slider Type

CN7 150 CN1 Motor capacity Hole position Mounting dimensions Mounting hole A B C D V5 (100 W) qw 5 5 5 5 V7 (200 W) qw 5 5 5 V8 (400 W) we 5 5 5 5 CN8 CN2 The mounting hole position varies depending on the motor capacity. w 40 4 -# type LECYU2-V Connector name Description CN1 I/O signal connector CN2 Encoder connector CN3 Note) Digital operator connector CN6A MECHATROLINK-3communication

Made to Order

5 5 5 6 6 6 6 6 9 18.5 18.5 31.5 31.5 42.5 36 46 41 45.5 46 5 6 6 7 8.5 8.5 11 11 14 16 52 56 63 63.5 69.5 76 82 87 106.5 126 57 64 80 92 110 118 146 160 200 238 15 15 16 16 20 20 22 22 28 35 The standard stroke for 12 and 16 is 100 st.

Air Cylinder

10 40 67 4.5 66 86 5 17.5 22 11 75.5 63 Up to 1500 82.5 5 12 45 67 4.5 82 106 5 17.5 22 13 75.5 80 Up to 1500 101 6 11 55 74 4.5 100 125 5 20 28.5 14 95 100 Up to 1500 121 6 14 65 74 6 120 150 7 20 30 16 95 * Other dimensions are the same as basic type.

15

46 69.8 61.4 M3 x 12 M5 x 40 14 NY M4 x 0.7 8 70 50 5 46 69.8 61.4 M4 x 12 M5 x 40 11 NX M5 x 0.8 9 63 50 5 49.7 69.8 61.4 M4 x 12 M5 x 40 9 NW M5 x 0.8 9 70 50 5 47.5 69.8 61.4 M4 x 12 M5 x 40 9 NV M4 x 0.7 8 63 50 5 49.7 69.8 61.4 M4 x 12 M5 x 40 9 NU M5 x 0.8 9 70 50 5 47.5 69.8 61.4 M4 x 12 M5 x 40 11 NT M5 x 0.8 9 70 50 5 46 69.8 61.4 M3 x 12 M5 x 40 12 NM2 M4 x 0.7 8 50

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

-11-5.