Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

Rotary Actuator/Vane Type

[mm] Size A B C D E (g7) F (h9) G1 G2 J K L M N P Q R S T V1 V2 W X Y Q1 Q2 Q3 10 29 15 8 14 40.004 0.016 9 0 0.036 3 1 5 9 0.5 9.5 9.5 24 M3 x 0.5 depth 6 6 M3 x 0.5 14 3.6 30 37 19.8 8.5 14.5 15 34 20 9 18 50.004 0.016 12 0 0.043 4 1.5 6 10 0.5 14 10 29 M3 x 0.5 depth 10 6 M3 x 0.5 depth 5 M3 x 0.5 19 7.6 39.5 47 21 11 17 20 42 29 10 20 60.004 0.016 14 0 0.043 4.5 1.5 7 10 0.5 20 13

Solid State Auto Switches

Weight (g) D-A72H D-A73H D-A76H D-A80H Auto switch model 0.5 m (Nil) 3 m (L) 5 m (Z) 10 47 10 47 11 52 10 47 77 Lead wire length Dimensions (mm) D-A7H, D-A80H 8 3.2 7 4 15 SMC Indicator light D-A80H without indicator light 22 2 DD3.4 6.2 3.3 10.2 Most sensitive position 8.5 1637 Reed Auto Switch Rail Mounting Style D-A73C/D-A80C Refer to SMC website for the details of the products conforming

MY1

For detailed selection procedures, refer to pages 8-11-92 and 8-11-93. 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 8-11-90 8-11-91 87 Series MY1HT Model Selection Following are the steps for selecting the most suitable Series MY1 to your application. Calculation of Guide Load Factor 1.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Note MXP6-5 MXP-AD6-5 MXP6-10 MXP10-10 MXP-AD10-10 With magnet and MXP10-20 MXP-AD10-20 mounting screw MXP12-15 MXP-AD12-15 MXP12-25 MXP-AD12-25 MXP16-20 MXP-AD10-20 MXP16-30 MXP-AD12-25 Note) MXP16-20 and MXP10-20 are common. MXP16-30 and MXP12-25 are common. 8-8-11 11 Series MXP Construction MXP6 @1 @0 @2 !2 !1 t e y !9 !8 !7 r !4 !6 u !5 !0 !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

12.5 8 10 13.5 11 7.5 Auto Switch Mounting Bracket Part No.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

Compact Type

How to Order 11 CXSJ M Bore size Stroke Auto switch Bore size/Stroke 6 10 10, 20, 30, 40, 50 10, 20, 30, 40, 50 Bearing type M L Slide bearing Ball bushing bearing Only ball bushing bearing is available for clean room specification 12-.

Compact Type Dual-Rod Cylinder Series CXSJ

How to Order 11 CXSJ M Bore size Stroke Auto switch Bore size/Stroke 6 10 10, 20, 30, 40, 50 10, 20, 30, 40, 50 Bearing type M L Slide bearing Ball bushing bearing Only ball bushing bearing is available for clean room specification 12-.

10

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

CQS

11 0 3.5 5.5 2 [4.5] 21 24.5 26.5 0 3.5 5.5 19 22.5 24.5 6 10 11 CUJ 1.5 [1] 3.5 [1] 2.5 0.5 7.5 9.5 7.5 9.5 7 7 CU Long Stroke 12 7 17 1 19.5 11 5 9 11 9 7 5 [2.5] 5 CQS 16 6 19 0.5 21.5 10.5 5.5 9.5 10.5 9.5 6 4.5 [2] 5.5 Bore size (mm) 20 11.5 22.5 6 25 16 9 13 16 13 11.5 10 [7.5] 9 CQM 25 13.5 24.5 8 27 18 10 14 18 14 13.5 12 [9.5] 10 Anti-lateral Load Type CQ2 Courtesy of Steven Engineering

2–4

Symbol A B W A B W A B W HS 16.5 18.5 22 24 26.5 30 36 12 16 20 25 32 40 50 5.5 6 2.5 0.5 1 -1.5 -4.5 14.5 15 11.5 9.5 10 7.5 4.5 1.5 (4) 2 (4.5) -1.5 (1) -3.5 (-1) -3 (-0.5) -5.5 (-3) -8.5 (-6.5) 4.5 4 7.5 9.5 9 11.5 14.5 3.5 3 6.5 8.5 8 10.5 13.5 0 0 3.5 5.5 5 7.5 10.5 5.5 6 10 11 12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Bore size (mm) The dimension inside ( ) is for D-A93.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Series MXP/MXPJ6 11226, 10, 12, 16 Air Slide Table How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicone-free + Low particle generation Number of auto switches Nil S n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke (mm) Auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table below

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

1122Series MXP/MXPJ6 Air slide table 6, 10, 12, 16 How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicon-free + low particle generation Number of auto switches Nil s n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke mm Type of auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table

NCQ8

Nil (Example) M9N 118in (3 m) . L M9NL 197in (5 m) .

Air Slide Table

Metal stopper with bumper Rubber stopper Shock absorber L1 L1 L1 10 5.5 33.5 8 9 6 20 5.5 39.5 11 12 9 30 14 39.5 11 13 10 40 17 39.5 11 13 10 50 22 39.5 11 13 10 75 41 39.5 11 13 10 100 47 39.5 11 13 10 125 72 39.5 11 13 10 Stroke K MZ Low thrust with high rigidity type MXQB Single side-ported type MXQC Height interchangeable type MXQ Auto Switch Mounting Made to Order Model Selection Common

Integrated Controller

0 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 3000 mm/s2 3000 mm/s2 Work load: W [kg] Work load: W [kg] 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 50 100 150 200 250 Speed: V [mm/s] 10 Easy to Operate EQFSH Series Battery-less Absolute (Step Motor 24 VDC) SpeedWork Load Graph (Guide) EQFS25HH/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 2.5 16 14 12 10 8 6 4 2 00 200 400 600 800

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

39.5 74.5 77.5 33.5 31.5 43.5 33.5 48 38 28 28 42 42 56 84 75 22 9 60.5 32.5 46.5 88.5 88.5 42.5 46.5 52.5 32.5 Solid state auto switch: D-M9B, D-M9N Stroke B Stroke E Auto switch operating range Model A 40 50 150 75 100 10 20 30 125 75 100 150 20 30 125 10 40 50 13-/22-MXQ6(L) 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 1.5 10 13-/22-MXQ8(L) 2 2 6 10 25 26 36 12 12 16 20 35 1.5 11.5 13

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1.5 2 2.5 2.5 51 62.5 80.5 101 129 8.5 10 16 21 18 13 15 18 24 38 11 13 20 26 22 31 41 50 59.5 79 6 7.5 9.5 11.5 14 11 14 19 24 30 0.15 0.29 0.56 1.04 2.6 11 13.5 16 20 22 22 27 32 41 46 0.75 1 1.25 2 2.5 1300 3100 5000 7900 15300 6000 11000 18000 28000 54000 8-25-25 25 Series MGZ/MGZR Proper Auto Switch Mounting Position (Detection at stroke end) D-M9N/M9P/M9B D-F9NW/F9PW/F9BW A 28 28 26