VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

VQ

Blank plate with 2 screws and gasket L 12.5 (Pitch) 5.25 7.5 25 35 5.5 1.25 VVQ100-10A-2 Plug lead unit (VV3Q12) for manifold L Size Dimensions L=12.5n+10.5 10 135.5 9 123 8 110.5 7 98 6 85.5 5 73 4 60.5 3 48 2 35.5 1 23 No. L size 19 248 18 235.5 17 223 16 210.5 15 198 14 185.5 13 173 12 160.5 11 148 No.

IDX-OM-W023

T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W023 13 T 13-4 1 PE L N 3 2 L,N: PE: LN PE M3 (0.63Nm) 6.5mm 1.25mm 17 17 2 () () IDU Series 13-4 13 2 IDX-OM-W023 13 T 13-5 IDU8E-10-T IDU8E/11E-20-T GFCI GFCI R For Option R R For Option R R For Option R R For Option R TB N L 3 2 1 PE 3 2 1 PE L N TB ILS ILS MC TDR

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

13 7 stations 7 stations (+) () () (+) 14 14 J.S.T.

Fieldbus System

VQC1200N-51 5 sets Valve part number (Stations 3 to 7) VVQ1000-10A-1 1 set Blanking plate part number (Station 8) EX600-DXPD 1 set I/O Unit part number (Station 1) EX600-DYPB 1 set I/O Unit part number (Station 2) Enter in order starting from the first station on the D side.

IDX-OM-W011

.S 13 S 13-1 IDF1E15E1-10 IDF Series 13-1 13-1 IDX-OM-W011 13.S 13-2 IDF1EIDF3E L N PE M3 6.5mm 2 1.25mm IDF4E15E1 L N PE M3 6.5mm 2 1.25mm 13-3 1-1 IDF Series 13-2 13-2 I D XO M W 011 14 T 14 T I D F4E/6E/8E/11E/15E1 141 I EC 142 AC200V / 2A D C24V / 2A ( 20V / 5m A) 143 O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

270 292 312.5 323 6 130 152 175 185.5 7 150 172 200 210.5 8 170 192 212.5 223 9 190 212 237.5 248 10 210 232 262.5 273 3 70 92 112.5 123 4 90 112 137.5 148 5 110 132 162.5 173 L1 L2 L3 L4 1.12-50 VQZ1000/2000/3000 Base Mounted Manifold Option Blank plate assembly VVQZ1000-10A-5 VVQZ2000-10A-5 VVQZ3000-10A-5 This is used when removing the valve for maintenance, or reserving a valve mounting

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

258 270 300 310.5 6 125 137 162.5 173 7 144 156 187.5 198 8 163 175 200 210.5 9 182 194 225 235.5 10 201 213 237.5 248 3 68 80 100 110.5 4 87 99 125 135.5 5 106 118 137.5 148 L1 L2 L3 L4 2.10-16 VQZ100/200/300 Body Ported Manifold Options Blank plate VVQZ100-10A-2 VVQZ200-10A-2 VVQZ300-10A-2 This is used when removing the valve for maintenance, or reserving a valve mounting space on the

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

13 11 13 13 25 30 30 32 40 40 36 46 46 12 15 15 7 9 9 6.5 8.5 8.5 57 (65) 66 (74) 71 (79) 19.5 22.5 25 40 43 46 46 50 53 73.5 82 87 The figures in parentheses are the normally open type. 24 25 Series VX Safety Instructions The following safety instructions are intended to prevent a hazardous situation and/or equipment damage.

AC

SAC1000, #1 + #2 + #3 + #13 SAC2000, #1 + #2 + #3 + #13 SAC2503, #1 + #2 + #3 + #13 SAC4000, #1 + #2 + #3 + #13 SAC4006, #1 + #2 + #3 + #13 SAC5000, #1 + #2 + #3 + #13 SAC6000, #1 + #2 + #3 + #13 AC1000 AC2000 AC2500, 3000 AC4000 AC4000-06 AC5000 AC6000 1.1-8 Air Combination Filter Regulator + Lubricator AC1010 to 4010 JIS symbol AC3010 AC2010 AC1010 Filter regulator Lubricator Standard Specifications

Speed Controller with

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002Fm TMH-01J TMH-03J TMH-07J AS2002Fm AS2052Fm TMH-07 TMH-09 AS3002Fm TMH-10 AS4002Fm TMH-13 Tubing size Applicable model Dimensions Part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VK VZ Note) For VQZ100, refer to page 4-14-13.

LEC-OM02904

13.3 . 5 13.4 . 5 13.5 . 6 13 1 13. 13 13.1 13.11

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

-5 (For VQZ100) VVQZ200-10A-5 (For VQZ200) VVQZ300-10A-5 (For VQZ300) It is used by attaching on the manifold block for being prepared for removing a valve for maintenance reasons or planning to mount a spare valve, etc.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

268 286 312.5 323 14 288 306 337.5 348 7 148 166 187.5 198 8 168 186 212.5 223 9 188 206 237.5 248 3 68 86 112.5 123 4 88 106 137.5 148 5 108 126 150 160.5 6 128 146 175 185.5 L1 L2 L3 L4 2.10-36 VQZ100/200/300 Base Mounted Manifold Options Blank plate VVQZ100-10A-5 VVQZ200-10A-5 VVQZ300-10A-5 This is used when removing the valve for maintenance, or reserving a valve mounting space on the

C85

5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 20 M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 32 11 62 126 6 13 115 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 32 11 65 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the case of air cushion.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 10-SS5Q13-09FD2-D 1 set (F kit 9-station manifold base) 10-SQ1131-51-C6 4 sets (2 position single) 10-SQ1231D-51-C6 4 sets (2 position double) SSQ1000-10A-3 1 set (Blanking plate) The asterisk denotes the symbol for assembly.

VCA

0.16 1.2 7 1.0 3.0 0.35 0.78 5 PA 3/8 (10A) 1/2 (15A) 3/4 (20A) 0.3 5.4 0.27 1.4 0.50 7 4 1.0 0.15 7.7 0.23 1.9 10 PAX Note 1) Weight values are for the grommet type.

Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.