VFR

Refer to page 3-13-4.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-20A P294030-20A P294030-20A @8 CRA180 Nickel plated Steel wire Needle valve P294040-23 P294040-20 P294040-20 P294040-20 @9 CRA1100 Nickel plated Steel wire Lock nut P294050-23A P294050-20A P294050-20A P294050-20A #0 Corresponding parts o, !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-20A P294030-20A P294030-20A @8 CRA180 Nickel plated Steel wire Needle valve P294040-23 P294040-20 P294040-20 P294040-20 @9 CRA1100 Nickel plated Steel wire Lock nut P294050-23A P294050-20A P294050-20A P294050-20A #0 Corresponding parts o, !

Proposals for Energy Saving

Specifications are the same as those on page 3.4-13.

42

Note) 13 13 () (+) Orange Red VFS Negative common specifications Positive common specifications Note) There is no polarity. It can also be used as a negative common. VFR Special Wiring Specifications 1 VQ7 14 2 15 2. Wiring specifications Double wiring (connected to SOL. A and SOL. B) is used for the internal wiring of each station regardless of valve and option types.

7

F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C. Q CAC408 35 32A Flange M Conduit terminal 24 VDC E N.O. With surge voltage suppressor N 100 VAC 8 40A N.C. R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C.

VFS

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.

HRS100/150

HECR Circulating fluid return port Rc3/4 HEC Barrel nipple 20A 144 HEB Y-strainer (40 mesh) 20A HED Flow direction HEA Y-strainer (20A) (Accessory) IDH Barrel nipple (20A) (Accessory) 107 HRS100/150 Series Standard Type Recommended External Piping Flow External piping circuit is recommended as shown below. 7 Thermo-chiller 2 Facility water outlet (Water-cooled refrigeration) Facility water

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

250 262.5 275 287.5 300 300 58.1 42.6 7.5 34.5 48.4 L3 91.5 81 102 112.5 123 133.5 144 154.5 70.5 181.5 192 202.5 213 223.5 234 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.

Fluoropolymer Piping Equipment

Applicable flange size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size Symbol Applicable flange size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 6 x 4 1/4" x 5/32" 2 2 3 1 2 3 2 3 4 B B C A B C B C D LVW 12 x 10 1/2" x 3/8" LQ1 19 x 16 3/4"

SX

SX3000 SY3000-26-9A SX5000 SY5000-26-20A SX7000 SY7000-26-22A Bolt and gasket part no. Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-39-1 A SX5000 SX5000-39-1 A SX7000 SX7000-39-20A Series Assembly part no.

Thermo-chiller

/Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

C76

Position (mm) D-C7 D-C80 D-C73C D-C80C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore A B A B 32 8 7 7 6 40 14 12 13 11 Aim at this number.

C76

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nominal symbol C76 Mounting bracket diagram 32 40 (MPa) Lateral load applied to the rod end fR (N) Foot: L Rod side flange: F Head side flange: G 0.3 58 54 10.0 L C7640 44 0.5 40 W W W F 36 0.7 33 C7632 24 0.3 23 G 17 0.5 16 1.0 13 0.7 13 Clevis: C, D

Table of Contents

unit (digit) T 16-13-4 Temperature characteristics The amount of leakage TSJ 16-13-5 E N Ejector 16-13-3 U Noise resistance Non reversed output mode Normal mode NPN output 16-13-4 F Unit conversion URJ 16-13-5 F.S.

VQ5000

A void A void A void A void A void A B A B A B A B A B A A A B A B A B A A A A 6 7 8 9 10 11 12 13 14 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 15 0 0 1 2 3 4 5 SC type OMRON SYSBUS wire system compatible SD type Sharp Satellite I/O link system compatible Terminal block (LED) nomenclature ADDRESS NO. STATION NO.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Connector structure ZSE/ISE40, 80 Series Available Mounting Options Series IP40 IP65 20 20A 20B(-L) 20C With waterproof cover (20B, 20C) Lead wire Mounting Available Mounting Options Series Bracket A Bracket B Bracket C Panel mount 20 20A 20B(-L) 20C The bracket configuration allows for mounting in four orientations.

VQ4000

A Unused A Unused A Unused A Unused A Unused A B A B A B A B A B A A A B A B A B A B A A VQC 10 11 13 12 15 14 11 10 12 13 14 15 SQ 9 8 7 6 5 4 3 2 1 0 3 2 1 0 4 5 9 8 7 6 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System VQ0 VQ4 Name of terminal block (LED) Note ADDRESS NO. STATION NO.

Booster Regulator/Air Tank

PVQ VY1 VBA VBAT VBA VBAT AP100 Booster Regulator/VBA Series Air Tank/VBAT Series 1007 Booster Regulator VBA Series Reduced by 13 dB (A) compared with the current model compared with the current model Reduced by 13 dB (A) Improved service life that of the current model Doubled that of the current model Doubled Reduced noise Floating piston structure Grease retaining groove Metal noise