CA2

80 100 Stroke range up to 500 up to 600 up to 600 up to 750 up to 750 B H1 C J D E F G H K S S KA L MM N P RR U A AL B1 CX Z 165 183 196 235 256 ZZ 175 195 212 255 281 Z 175 193 206 245 266 ZZ 185 205 222 265 291 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 M8 x 1.25 8 11 11 13 16 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58

Smooth Cylinder/Low Speed Cylinder

D-A73 D-A80 D-F7NT D-A9 D-A9V D-A79W D-P3DW D-P4DW A 6.5 10.5 8.5 11 14 18.5 A 8 12 10 12.5 15.5 20 B 5 7.5 10.5 13.5 18 23 A 12 16 14 16.5 19.5 24 B 9 11.5 14.5 17.5 22 27 A 9 13 11 13.5 16.5 21 B 6 8.5 11.5 14.5 19 24 A 9.5 13.5 11.5 14 17 21.5 B 6.5 9 12 15 19.5 24.5 A 14.5 18.5 16.5 19 22 26.5 B 11.5 14 17 20 24.5 29.5 B 3.5 6 9 12 16.5 21.5 A B A B Bore size 32 40 50 63 80 100 0 2 4.5

SYJ3000/5000/7000

8 173 161 9 192 180 10 211 199 11 230 218 12 249 237 13 268 256 14 287 275 66 Series SYJ7000 Type 21: Top Ported/SS5YJ7-21Stations (-00) [ ]: AC Grommet (G) Approx. 300 (Lead wire length) L1 4-4.5 (For mounting) 10 L2 15.3 (DIN 16.6) 1.5 (DIN 2.8) 16.5 3 11.5 122 [126.4] 107.4 [111.8] 61.5 (DIN 62.8) 62.3 (DIN 63.6) R P R A B A B A B A B A B 30 R P R 21 21 83.7 [85.9] 84.5 [86.7] 17 21 60

Table of Contents

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

Table of Contents

to Z kgm2 IB m1 m2 r1 r2 Axis on the center gravity of B part of attachment and parallel to Z Z2 Weight of A part of attachment kg MHF kgm2 Weight of B part of attachment kg Total moment of inertia for attachment I Distance between Z and Z1 axis mm Inertia moment around the Z1 axis of A part of attachment kgm2 IZ1 MHL Distance between Z and Z2 axis mm Inertia moment around the Z2 axis of

Table of Contents

Wn Z Y-axis Yn Z-axis Zn X-axis Xn Wa 5 mm 0 mm 0.88 kg 65 mm 65 Wb Y 42.5 mm 0 mm 4.35 kg 150 mm Wc 42.5 mm 111 mm 0.795 kg 150 mm Wd 42.5 mm 210 mm 0.5 kg 150 mm X n = a, b, c, d 3.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

9 13 11 13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5

Table of Contents

(For replacement) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) How to Order Unit for Replacement (1) Valve unit (2) Adsorption confirmation switch unit 15 C 0X B ZSP1 D K1 B V ZX1 5 Z B D S L Applicable nozzle diameter Vacuum pump for system Single (PD port is equipped with plug.)

Table of Contents

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Clean series 10 11 Relief type Vacuum suction type 10 C D B M 2 B 20 100 H N M9BW C 21 C D B M 2 B 20 100 H N M9BW C Nil Built-in magnet Number of auto switches Cylinder stroke (mm) No Nil S n 2 pcs. 1 pc. "n" pcs.

CQ2

12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5 22.5 31 33.5 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 9 12 12 12 13.5 17.5 15.5 18 22 25.5 B 14.5 15 17.5 17.5 18 23.5 26 25

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

port) Applicable tubing O.D.: 10, 3/8" 1/4 (A, B port) 7 9.4 28.9 9.4 28.9 B B B B A A A A + + + + + + P = 20.5 (Pitch) L2 L1 6 Manual override M5 x 0.8 (External pilot port) 23.5 + 19.1 37 + + (5.5) 80.2 9.8 3.2 106.8 21 31.5 154.2 [158.6] 141.2 [145.6] 21 21 26.6 42 73 B B B B B EA P EB PE X 112.3 [114.5] 26 A A A A A 16 4 x 4.5 (For mounting) 1/4 (P, EA, EB port) + + + + + Triangle mark

CL

21 16 16 18.5 11 11 11 11 11 16 16 18.5 15 17 17 21 21 16 16 18.5 3.1-58 Series CL1 Front Flange/(F) A Lock-up at piston forward B Lock-up at piston backward 40 to 100 With rod boot 120 to 160 With rod boot (mm) Bore (mm) Stroke range (mm) Long stroke range (mm) FT BF FX AL EA A B1 BP BX BY C D FY FZ F B EB FD W/o rod boot to 500 to 600 to 600 to 750 to 750 to 1400 to 1400 to 1400 W/ rod

CV/MVGQ

2 10-15-13 14 Series CVJ3 Single Acting, Spring Return/Basic Style (B) M5 x 0.8 CVJ3B S Bore size Stroke M5 x 0.8 28 [34.5] 48 [49] Manual override Width across flats B1 Rod End Nut Bore size (mm) 10 16 H1 B1 7 3.2 16 [17] S + Stroke Z + Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S

CV/MVGQ

Y-J010B Applicable bore size Applicable bore size d C C B d H B H Part no. Part no. 10 16.2 8 21 M4 x 0.7 CE2 SNJ-010B NTJ-010A Y-J016B 16 10 16 10 16 16.6 11 21 M5 x 0.8 8.1 11 12.7 M8 x 1.0 4 7 M4 x 0.7 3.2 SNJ-016B NTJ-015A 9.2 14 16.2 M10 x 1.0 4 8 M5 x 0.8 4 NDd9 NDH10 R1 NX U1 Part no.

CJ2

Bore size (mm) 10 16 B GA LB NA WA WW S Z 15 7.5 16.5 21 14.5 4.5 66 122 18.3 7.5 23 21 14.5 5.5 67 123 6-3-20 21 21 Series CJ2W Air Cylinder: Standard Type Double Acting, Double Rod Flange Style (F) CJ2WF Bore size Stroke Mounting nut Piping port 2-M5 x 0.8 CJ1 CJP Rod end nut CJ2 S + Stroke Z + 2 x Stroke Rod end nut CM2 Cover surface Piping port 2-M5 x 0.8 CG1 Courtesy of Steven Engineering

Electric Actuator/Slider Type

3) Encoder cable (7) Motor cable (7) Z Body mounting Note 1) reference plane 60 132.5 44 5.5 5H9 ( ) depth 8 (Depth of counterbore 3) +0.030 0 42 70 (122) Stroke end of the motor side L A (Table traveling distance) (62) 10 62 55 (64) (66) Z-phase detecting position: 21 Note 2) Stroke 70 (4) (Z) 48 60 63 46.8 3 (63) 60 30 6.5 B 15 7.5 M4 x 0.7 thread depth 8 (F.G. terminal) 5H9 ( ) depth

LEC-OM02704CN

(ZP)[1][2][8][0]17bit 14 37 14 (5) ON/OFF((DO)) ON/OFF [9][0] (a) DO [8][B][0][0]0004DO 0 0 0 4 4 DO (b) ON/OFF [9][2] [A][0] b31 b 1 b 0 1 ON 0 OFF bit 16 bit CN6 bit CN6 bit CN6 bit CN6 0 14 8 16 24 1 15 9 17 25 2 16 10 18 26 3 11 19 27 4 12 20 28 5 13 21 29 6 14 22 30 7 15 23 31 (c) DO DO[8][B][0][0] [8][B] [0][0] 0 DO 14 38 14 (6) (a) [8][B][0][0]0003 0 0 0 3 3 (b) ([8][B]

Table of Contents

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.