CA2

to 600 up to 750 up to 750 B H1 C J D E F G H K S S KA L MM N P RR U A AL B1 CX Z 165 183 196 235 256 ZZ 175 195 212 255 281 Z 175 193 206 245 266 ZZ 185 205 222 265 291 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 M8 x 1.25 8 11 11 13 16 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48

5

27 64 20 40 10 17 58 11 M10 x 1.25 7 18 M18 x 1.5 31 3/8 80 40 37 102 32 78 25 52 14 21 71 13 M12 x 1.75 10 22 M22 x 1.5 37 1/2 100 40 37 116 41 92 30 52 14 21 72 16 M12 x 1.75 10 26 M26 x 1.5 40 1/2 Bore size (mm) S TDe8 TT TX TY TZ Z ZZ 40 84 150.032 0.059 22 85 62 117 93 140 50 90 150.032 0.059 22 95 74 127 103 154 63 98 180.032 0.059 28 110 90 148 107 162 80 116 250.040 0.073 34 140

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

) Z: Positive common specifications only.

Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)

Table of Contents

to Z kgm2 IB m1 m2 r1 r2 Axis on the center gravity of B part of attachment and parallel to Z Z2 Weight of A part of attachment kg MHF kgm2 Weight of B part of attachment kg Total moment of inertia for attachment I Distance between Z and Z1 axis mm Inertia moment around the Z1 axis of A part of attachment kgm2 IZ1 MHL Distance between Z and Z2 axis mm Inertia moment around the Z2 axis of

SYJ3000/5000/7000

Power saving circuit is only available in the "Z" type.

Table of Contents

[31] 34 161.5 [165.5] 189.5 [187.5] VQ7 G 1/2 EVS Light/Surge voltage suppressor VFN (For FZ) 120.5 [129.5] 110 [119] 134 [143] (For FZ) 21 [25] 23 [25] 46 [55] 5 1 3 31 [39] 31 [39] 5-Rc 3/8, 1/2, 3/4 56 [60] (Piping port) [ ] = Rc 3/4 2 position double: VFR520 -F(Z) 3 position closed center: VFR530 -F(Z) 3 position exhaust center: VFR540 -F(Z) 3 position pressure center: VFR550 -F(Z) 0

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, PRECISION REGULATOR, REGULATOR

Table of Contents

m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

Table of Contents

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. 21 (Width across flats) Selection Lock nut F.R.L. Warning M12 x 1 1. This product cannot be used as a check regulator by installing it between solenoid valve and actuator. Doing so could lead to equipment damage. 2.

CL

21 16 16 18.5 15 17 17 21 21 16 16 18.5 15.0 18.0 25.0 31.5 35.5 32.0 36.0 40.0 MGG MGC 0 0.2 0 0.2 0 0.2 64 72 80 MGF W/o rod boot W/ rod boot Bore (mm) 40 50 63 80 100 125 140 160 KA K RR GC H1 J N L MM W U S P CY1 ZZ 244 273 296 347 381 443.5 465 509 e 36 45 45 60 60 75 75 75 ZZ 252 281 304 356 390 h 59 66 66 80 81 133 133 141 f 16.5 16.0 16.0 18.0 18.0 40 40 40 Z 242 269 288 336 365

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

E 2-P (Port size) K M E Q A + Stroke B + Stroke F B + Stroke L Q Q J W A + Stroke End Lock Mechanism Dimensions Bore size (mm) HN (Max.) 45 52.5 59 64 End lock mechanism (Manual release lock type) RF WL MO HR DM DL LL 32 40 50 63 11 11 11 11 21 21 24 24 24 24 33.5 38.5 45 50 22 26 24 25 15 19 19 19 25 29 29.5 28.5 15 21 21 21 MO 63, 80, 100 Cylinder tube form 80 100 45 48 45.5 49 62 71.5

Table of Contents

analog Nil 21 22 23 24 P kPa Applicable to plug connector.

Table of Contents

VX 2 3 21 1 1 G Normally Closed (N.C.)

CQ2

A A1 L1 MM RR1 U1 NZ L A1 MM U1 L1 E1 10 12 16 20 22 28 38 44 +0.048 0 5 6.4 8 10 18 22 28 32 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 +0.048 0 5 6.5 8 10 18 22 28 32 21.5 28 34 41 42 56 71 79 10 21.5 32 34 41 42 56 71 79 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 X 0.8 M6 X 1 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 6 11 8.5 16

CJ2

Bore size (mm) 10 16 B GA LB NA WA WW S Z 15 7.5 16.5 21 14.5 4.5 66 122 18.3 7.5 23 21 14.5 5.5 67 123 6-3-20 21 21 Series CJ2W Air Cylinder: Standard Type Double Acting, Double Rod Flange Style (F) CJ2WF Bore size Stroke Mounting nut Piping port 2-M5 x 0.8 CJ1 CJP Rod end nut CJ2 S + Stroke Z + 2 x Stroke Rod end nut CM2 Cover surface Piping port 2-M5 x 0.8 CG1 Courtesy of Steven Engineering

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Power saving circuit is only available for the Z type.

CV/MVGQ

2 10-15-13 14 Series CVJ3 Single Acting, Spring Return/Basic Style (B) M5 x 0.8 CVJ3B S Bore size Stroke M5 x 0.8 28 [34.5] 48 [49] Manual override Width across flats B1 Rod End Nut Bore size (mm) 10 16 H1 B1 7 3.2 16 [17] S + Stroke Z + Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S

CV/MVGQ

M10 x 1.25 15 34.5 M26 x 1.5 14 15 50 39 18 10 24 16 7 11 22 8 76 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Q QY Bore size (mm) 20 25 32 40 Symbol S ZZ Z S ZZ Z S ZZ Z S Z ZZ S Z ZZ 20 25 32 40 14 65.3 19.8 217 208 137 192 183 112 167 158 87 14 70.5 22 221 212 137

CL

21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 Without rod boot With rod boot Bore size (mm) P J K KA L MM N RR S U W H Z ZZ e f h Z ZZ l 36 45 45 60 60 75 75 75 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 40 50 63 80 100 125 140 160 10 12 16 20 25 29 32 36 84 90 98 116 126 98 98