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(mm) Electrical entry P Port size A B C D E F H K L M N Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Model Q R Q R Q R S Q R S U 6.5 13.5 28 71.5 31 12.5 28 14 12.8 M4 4.5 22 45.5 44 43.5 58 41 46.5 99 43.5 66 83 1/8 VCW22 8.5 18 36 75 31 12.5 28 18 12.8 M4 6 22 46.5 44 44.5 58 42 46.5 99 44.5 66 86 1/4 VCW32 11 22 40 89.5 36.5 15 32 20 19 M5 8 24 57 46 55 60 52.5 48.5 101 55

Battery-less

Check the SpeedWork Load Graph on page 75.

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35

V100

(Crimping tool part no.: DXT170-75-1) VQZ Note) Ensure the locking type manual override is unlocked before using.

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Free Mount Cylinder

14 16 20 24 22 24 32 40 50 62 3 4 6 8 10 12 8 8 8 8 10 12 7 7 7 9 10 11 20.5 22 28 33 43.5 51.5 11 12 13 16 20 24 9 12 17 20 22 29 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 SA Y P Q QA R W T S 38 36 30 36 40 42 Z 75 79 79.5 93 105 121 S 38 36 40 46 50 52 Z 75 79 89.5 103

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

B1 Bore size (mm) 32 40 50 63 80 100 125 l2 E B2 B3 L1 TG1 T FL d1 d2 d3 CN R 45 14 34 3.3 11.5 32.5 3 5 5.5 22 10 30 10.5 6.6 10 11 17 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

256.5 281.5 ZZ 148.5 148.5 148.5 158.5 182.5 207.5 246.5 299.5 324.5 13-/22-MXQ25L10 13-/22-MXQ25L20 13-/22-MXQ25L30 13-/22-MXQ25L40 13-/22-MXQ25L50 13-/22-MXQ25L75 13-/22-MXQ25L-100 13-/22-MXQ25L-125 13-/22-MXQ25L-150 Note) Note) Note) Refer to the bottom view of MXQ25L-75. 1322823 MXQ 1322Air Slide Table Dimensions: MXQ25L / Symmetric Type 1322Axial piping (25): MXQ25L-P 132220 Air Preparation

CNA

D-K39C 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, Different sides Data n 100 + 100 (n 2) n = 2, 3, 4, 5 Same side 100 + 100 (n 2), n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8,

CNA

, n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, Different sides D-A44C n Same side 10 75 80 90 1 2 (Different

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

1/4 17 50 25 9 73 73 53 20 50 28 11 10 95 53 115 17 17 13 M10 x 1.5 20 22 22 M16 x 1.5 30 26 3/8 19 63 28 8 80 80 60 22.4 55 30 11 12 102 60 122 17 17 13 M10 x 1.5 22 20 25 M18 x 1.5 30 26 3/8 21 80 32 8 100 100 75 28 65 32 13 12 130 75 155 22 20 15 M12 x 1.75 26 26 29 M22 x 1.5 35 30 1/2 26 100 38 6.5 118 118 90 35.5 80 35 13 16 145 90 172 27 19 16 M12 x 1.75 27 26 34 M27 x 2 35 32 1/2

CNA

+50(n-2) n=2, 4, 6, 8, 90+50(n-2) n=2, 4, 6, 8, 100+50(n-2) n=2, 4, 6, 8, 110+50(n-2) n=2, 3, 4, 5, 100+100(n-2) 100+100(n-2), n=2, 4, 6, 8, Same 10 90 100 110 With 1 10 75 80 90 Different 20 75 90 90 100 100 110 110 With 1 With 2 With n Same Different 20 55 75 75 80 80 90 90 With 2 With n (n-4) 90+50 2 n=4, 8, 12, 16 (n-4) 100+50 2 n=4, 8, 12, 16 (n-4) 110+50 2 n=4, 8, 12, 16 (n-2)

MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

Table of Contents

Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

C85

{81} 30 70{76} 12.8 4.5 16 3.2 22 13 4.5 12.8 26 38 35 23.8 11 26 5 3.2 25 4 10 20 6 40 75(80) 30 70(75) 12.8 4.5 16 3.2 22 13 4.5 12.8 26 38 35 23.8 11 26 5 3.2 25 4 12 25 8 52 88(90) 40 80(82) 18 5.5 20 4 30 18 5.5 18 33 58 42 32 14 38 6 4 32 6 16 25 8 52 88(90) 40 80(82) 18 5.5 20 4 30 18 5.5 18 33 58 42 32 14 38 6 4 32 6 20 32 8 66 103 50 96 19 6.6 25 5 40 20 6.6 19 42 66 54 36 17 46

CLQ

Without auto switch With auto switch Bore size (mm) G L A A B 48 58 56.5 66.5 69 79 LS B LS 100.2 36 46 43.5 53.5 53 63 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 110.2 46 58 38 18 110.2 Special cap bolt LY LH 118 80 128 53.5 66.5 43 20 128 138 100 148 63 79 50 22 148 4-LD A + Stroke LS + Stroke X Y X Y LG LT LZ LX Bore size (mm) L1 LD LG LH LT LX LY LZ X Y 63 43.5 11 5 46 3.2

Compact Cylinder with Lock Series CLQ

Without auto switch With auto switch Bore size (mm) G L A A B 48 58 56.5 66.5 69 79 LS B LS 100.2 36 46 43.5 53.5 53 63 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 110.2 46 58 38 18 110.2 Special cap bolt LY LH 118 80 128 53.5 66.5 43 20 128 138 100 148 63 79 50 22 148 4-LD A + Stroke LS + Stroke X Y X Y LG LT LZ LX Bore size (mm) L1 LD LG LH LT LX LY LZ X Y 63 43.5 11 5 46 3.2

AC Servo Motor Driver (Pulse input type/Positioning type ）

MBR, DB, or ALM is assigned to the CN1-22 pin, CN1-23 pin, or CN124 pin. ACD2 (CN1-22) Variable gain selection CDPS CDPS turns on during gain switching. DO1 Absolute position undetermined ABSV ABSV turns on when the absolute position is undetermined. DO1 ABS transmission data bit 0 ABSB0 (CN1-22) This is used to output ABS transmission data bit 0.

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

7ND9071en

C -40 to +85 C ND9_E2/I02 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/I09 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E2/I32 -25 to +60 C -25 to +70 C -25 to +70 C ND9_E2/D33 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/D44 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/I45 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E2/K05 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/IK06 -40 to +60 C