SMC

22 22 22 20 26 32 40 30 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 NA 2 2 2 2 2 2 4 4 4 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA 162 218 258 13-/22-MXS25L-10 13-/22-MXS25L-20 13-/22-MXS25L-30 13-/22-MXS25L-40 13-/22-MXS25L-50 13-/22-MXS25L-75 13-/22-MXS25L-100 13-/22-MXS25L-125 13-/22-MXS25L-150 151 MXS Air slide table 1322Specific Product Precautions Made

SMC Pneumatic Clean Series

-: 50 to 400 mm/s +1.4 0 Bottom mounting style/Front mounting style Mounting style 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Grade 2, 21-: Grade 3 11-/22-: Grade 1 Grease Particle generation grade (Refer to front matter pages 13 to 22 for details.)

SMC Pneumatic Clean Series

25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150

1)MXQ16 (L)MXQ-AS16 (L)511361713.524.51/45M10 x 1M5 x 16211315M5 x 16

1)MXQ16 (L)MXQ-BS16 (L)2211361713.546.771/41.4M10 x 1M5 x 162313.51621M5 x 16

1)MXQ16 (L)MXQ-BS16 (L)2211361713.546.771/41.4M10 x 1M5 x 162313.51621M5 x 16

1)MXQ16 (L)MXQ-AS16 (L)-X111511361713.534.51/45M10 x 1M5 x 16211315M5 x 16

1)MXQ16 (L)MXQ-AS16 (L)-X122511361713.544.51/45M10 x 1M5 x 16211315M5 x 16

1)MXQ16 (L)MXQ-AS16 (L)-X111511361713.534.51/45M10 x 1M5 x 16211315M5 x 16

1)MXQ16 (L)MXQ-AS16 (L)-X122511361713.544.51/45M10 x 1M5 x 16211315M5 x 16

1)MXQ16 (L)MXQ-AS16 (L)511361713.524.51/45M10 x 1M5 x 16211315M5 x 16

1)MXQ16 (L)MXQ-BS16 (L)2211361713.546.771/41.4M10 x 1M5 x 162313.51621M5 x 16

1)MXQ16 (L)MXQ-BS16 (L)2211361713.546.771/41.4M10 x 1M5 x 162313.51621M5 x 16

2/3 Port Valve

system Direct operated Pilot operated diaphragm Pilot operated disk Pilot operated Series VX21/22/23 VXD21/22/23 Single unit Single unit VXP21/22/23 VXR21/22/23 Body Single unit N.C.

Dedicated Controller

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Motor capacity 200W 100W 200W 100W 5 to 40C 5 to 50C 5 to 40C 5 to 50C Operating temperature range Electric power 640VA 300VA 640VA 300VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return direction

AC

Model Port size Applicable model A B C E10-M5 AC100, AW1000 AF1000, AR1000, AL1000 E20-01 E20-02 E20-03 E30-02 E30-03 E30-04 E40-02 E40-03 E40-04 E40-06 E30-02 M5 X 0.8 16 14 17.5 1/8 1/4 3/8 AC200 AF2000, AR2000, AW2000 AL2000, AFM2000, AFD2000 23 22 22 1/4 AC250, AC300 AF3000, AR3000, AW3000 AL3000, AFM3000, AFD3000 Piping adapter 26 29 34.2 3/8 40 29 34.2 1/2 1/4 AC400 AF4000, AR4000,

A

18 ANA1-03 3/8 35 22 84 25 21 ANA1-04 1/2 60 36 98 30 24 ANA1-06 3/4 90 110 111 46 36 ANA1-10 1 160 180 132 50 41 ANA1-12 11/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4 450 612 230

Process Valve

32 22 32 28 40 28 40 33 50 33 50 1.4 1.5 1 2.5 2.6 1 4 1 5.7 5.8 32 Symbol Valve type Type 4.1 4.2 1 2 1 N.C.

Wireless System

For details, refer to technical data on page 22. Time Frequency of the radio wave interference Communication frequency interference (for example, Wi-Fi) Wireless communication status can be monitored. The wireless system connection can be monitored during operation according to the diagnostic data.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.