CY1

bore size determination F3 D1.6 x ___ P WB Inclined operation W+WBWV PPV W+WB>WV P>PV Allowable driving force table (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 F2 = (W + WB) x 9.8 x (cos + sin) F3 = (W + WB) x 9.8 x ( + 1) Horizontal Inclined Vertical (Refer to p. 14 for vertical operation.)

Basic type / Direct mount type Series CY3B/CY3R

Load (kg) m1 m4 m2 m3 Moment (Nm) F3 M3=F3 x L3 L3 F1 M1=F1 x L1 F2 M2=F2 x L2 L1 L2 1. Maximum allowable load (1), static moment (2), and dynamic moment (3) (at the time of impact with stopper) must be examined for the selection calculations. Maximum Allowable Load To evaluate, use a (average speed) for (1) and (2), and (impact speed = 1.4a) for (3).

42

73.2 (78.7) 59.5 53 59.5 4(A) port 17.5 13.5 2(B) port 4(A) port 17.5 13.5 2(B) port Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2 x 6.5 Mounting hole 35 2 x 6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 1/8" PE. port 1/8" External pilot port 1/8" PE. port

MY1

Load (kg) Note: 1 Nm = 0.7375 ftlb 1 kg = 2.2046 lb 1 in = 25.4 mm W1 W W m Moment (Nm) M = F x L M = F x L M = F x L F3 F2 F1 L2 L1 L3 1. Maximum allowable load (1), static moment (2), and dynamic moment (at the time of impact with stopper) (3) must be examined for the selection calculations.

•

3 . ~ ~C 46,5 ZPY40g 40 43 18.5 28.5 58.5 1011.5 1 26.5 6.5 3.3 ZPY20: 20 23 14 24 42 53 76 87 4 1.7 , ~~~; 25 , 29 14 24 '42 53 76 87 4 1 :8 Deep type (mm) ZPY32~ 32 35 14.5 '24.5 42.5 '53.5 '0.< 107< 4.5 2.3 I;~ I: I ~ 1;9 I ~ 1 5~ I ~ 1 '~9 1 ,~ I '1~ 1 Deep type [mm) H I Y L ~~ I~A~~ j C LD E F I G Applicable tube (mm) 93 10 ZPY25D 25 I 28 20 I 30 48 I 59 82 Applicable lube o,p P .0'

Mechanically Jointed Rodless Cylinders

18 20 24 30 88 102 112 128 5.5 6 6.5 6.5 56 69 86 130 156 186 65 78 93 32 40 50 162 192 226 9.5 9.5 10 Applicable cylinder Model Mounting directionw C2 D2 F2 K2 Q2 B2 A2 Applicable cylinder Model Mounting direction w B2 A2 C2 D2 F2 K2 Q2 MY340 MY350 MY363 MY316 MY320 MY325 MY332 MYAJ16 MYAJ20 MYAJ25 MYAJ32 MYAJ40 MYAJ50 MYAJ63 68 81 100 36 41 46 54 114 136 166 57 68 83 58 70 80 96 55 70

AC Servo Motor Driver (Pulse input type/Positioning type ）

PB45] 0 Notch depth Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55

4/5 Port Solenoid Valve

M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3-S46-M5 10-SS5YJ3-S46-C4 Note) Value at manifold base mounted, 2 position

AC Servo Motor Driver (Network card type ）

PC01 Error excessive alarm level] Setting range: 0 to 1000 0 [rev]/ [mm] 5 53 5. PARAMETERS Initial value Network No./ Setting digit Function symbol/name ECT EIP PNT [unit] 50.00 PC65 ZSP2L Zero speed 2 level Set a speed level for turning on the zero speed 2.

V100

PVT317-53-1A 1 pc.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3-S46-M5 10-SS5YJ3-S46-C4 Note) Value at manifold base mounted, 2 position

SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

10-SS5YJ3-32-C4 10-SYJ333 1/8 Type 10-SS5YJ3-S32-M5 Type 10-SS5YJ3-S32-C4 Type 10-SS5YJ3-41-M5 Base mounted for internal pilot Type 10-SS5YJ3-41-C4 10-SYJ343 1/8 Type 10-SS5YJ3-S41-M5 Type 10-SS5YJ3-S41-C4 Type 10-SS5YJ3-46-M5 Type 10-SS5YJ3-46-C4 1/8 M5 x 0.8 10-SYJ343 Type 10-SS5YJ3-S46-M5 Type 10-SS5YJ3-S46-C4 Note) The values are for individually operated 2 position type manifold bases

VQZ1000/2000/3000

VQZ2 20 1(R)-G-C4/C6/M5 3 4 5 300 (Lead wire length) 122 54.5 17.3 6 6 R2.5 3.4 B 4 11 15 SMC SMC 2 A Cover diameter 1.6 Cross section 0.34 mm2 24 22.7 mounting hole 66.5 2-C4, C6, M5 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M3 x 0.5 external pilot port (Only external pilot type (R)) M5: M5 thread 25 10 (For C4, C6) Courtesy of Steven Engineering, Inc.-230

SYJ3000/5000/7000

-32-C4 SYJ33 1/8 SS5YJ3-S32-M5 SS5YJ3-S32-C4 SS5YJ3-41-M5 Base mounted for internal pilot SS5YJ3-41-C4 SYJ34 1/8 SS5YJ3-S41-M5 SS5YJ3-S41-C4 SS5YJ3-46-M5 SS5YJ3-46-C4 1/8 M5 x 0.8 SYJ34 SS5YJ3-S46-M5 SS5YJ3-S46-C4 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct by specifying the valves and blanking plate assembly to be mounted on

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

PB45] 0 Notch depth Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55

LEC-OM07605CN

PB45] 0 [dB] [Hz] [Hz] [Hz] -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 0 1 2 3 4 5 6 7 8 9 A B C D E F 00 01 02 03 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B 3C 3D 3E 3F 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 17.6 16.5 15.6 14.8 14.1 13.4 12.8 12.2 11.7

SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Table of Contents

Indicator light U side (n) (2) (1) Stations D side 2-C4, C6 1 A B 9.5 27.3 (Port size: One-touch fitting type) Electrical entry n: Stations L Stations Formula 17n + 19 17n + 28 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8 155 164 9 172 181 10 189 198 11 206 215 12 223 232 13 240 249 14 257 266 15 274 283 L1 L2 3-7-17 18 Series VZS2000 Non plug-in type Manifold VV5ZS2-51Station