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L6 L3 L4 AS H H ASP (Width across flats) (Width across flats) ASN D3 D3 AQ A1 A1 ASV L5 L5 A2 A2 AK ASS T T ASR ASF Model T H D1 D2 D3 L1 L2 L6 A2 M L5 A1 Weight (g) Note 5) MAX.

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Specifications. 5 5 12 13 13 13 15 15 16 22 22 23 24 26 42 43 43 44 44 45 48 49 49 50 50 51 53 53 54 55 57 57 58 59 60 64 64 65 66 69 70 70 71 72 75 76 76 77 78 79 82 84 85 86 86 86 88 89 95 95 96 96 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com How to Order.

Battery-less

L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 2 4 6 8 10 12 14 0 10 20 30 40 50 0 10 20 30 40 50 60 0 5 10 15 20 25 30 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 17 Model Selection LEF Series Battery-less Absolute (Step Motor 24 VDC) * These graphs show the amount of allowable overhang (guide unit) when the center of gravity

AS

Dimensions L6 D4 Universal type H D1 Applicable tubing O.D. d (Hexagon width across flats) M1 L3 A L5 L4 D3 L1 L2 D2 T Metric Size Inch Size A Model Mass (g) Mass (g) A d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 Model M1 AS131F-M5-23T AS131F-U10/32-01T 3.2 1/8" 8.4 8.4 19.8 19.8 28.7 12.7 17.5 17.5 12.7 28.7 10 AS131F-M5-04T 8 0.7 AS131F-U10/32-03T M5 x 0.8

2

EXH Specifications Model Port size Specifications Model Standard specifications P1 P2 A B C D E F G H I VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 37.5 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 VHS50 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 IN, OUT EXH IN OUT OUT EXH

VM

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

Air Fittings & Tubing

KQ2ZD08-03S 28.5 55.5 58 59 62 47.5 52 53 54 21 KQ2ZD08-04S 26.5 KQ2ZD10-02S 111 10 21 27.5 KQ2ZD10-03S 21 18.5 20.6 29 19.2 18.5 30.5 KQ2ZD10-04S 128 178 167 179 64.5 58.5 59 60 28.5 KQ2ZD12-02S 12 65.5 29.5 KQ2ZD12-03S 26 22 20.9 25.2 32 21.6 20.9 68.5 32.5 KQ2ZD12-04S Reference dimensions after R(PT) thread installation.

Electric Slide Tables

[mm] L6 [mm] L6 [mm] 150 300 100 200 50 100 Mep m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 L6 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 200 400 L7 [mm] L7 [mm] L7 [mm] 150 300 100 200 50 100 m 0 0 Mey 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 L7 Work load m [kg] Work load m [kg] Work load m [kg] 4 Electric Slide

Environment

L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 56 Model Selection LEFB Series AC Servo Motor Calculation of Guide Load Factor Mounting orientation 1.

Dual Speed Controller with One-touch Fitting Series ASD

2 15-9-102 Tamper Proof Dual Speed Controller with One-touch Fitting Dimensions Metric size M1 L3 L2 Applicable tubing O.D. d D1 L6 D2 L1 D4 L4 H (Hexagon width across flats) (Hexagon width across flats) D4 D3 A1 L5 A2 L6 T Metric Size Model H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 A1 A2 M1 T d 4 6 6 8 6 8 10 6 8 10 12 6 8 10 12 10 12 ASD230F-M5-04T ASD230F-M5-06T ASD330F-01-06ST ASD330F-01-08ST

Integrated Controller

L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 14 Easy to Operate EQFSH Series Battery-less Absolute (Step Motor 24 VDC) These graphs show the amount of allowable overhang (guide unit) when the center of

F

Applicable Applicable Model D1 L1 L2 P Q A M Minimum Tube OD Fitting Size Hole Applicable Applicable Model D1 L1 L2 P Q A M Effective Tube OD mm Fitting Size Orifice (mm2) Inch d Diameter d Nylon/Urethane 1/8 3.2(1/8) KQU01-99 9.6 52 17.5 9.6 9 36.5 15.5 2 3.2 3.2 KQU23-99 9.6 52 17.5 9.6 9 36.5 15.5 3.4/2.9 5/32 4(5/32) KQU03-99 10.4 53 18 10.4 9.7 37 16 2.5 4 4 KQU04-99 10.4 53 18 10.4

Vacuum Unit

When selecting the number, refer to L6 in dimension table on pages 39 to 41. VVQZ2000 CP ZK2 MP1C6 A L Dimensions No. 1 2 3 4 5 6 7 8 9 10 L Dimension 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 One-touch fitting assembly (Purchasing order is available in units of 10 pieces.)

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Load (kg) m1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com m4 m2 m3 Moment (Nm) F3 M3=F3 x L3 L3 F1 M1=F1 x L1 F2 M2=F2 x L2 L1 L2 1.

90

) A (54.8) (5.5) 32 6 10.5 Manual override (Release valve) Fully open 10 Manual override (Supply valve) U side D side Number of stations n 2 3 1 Common supply (PV) port Metric size: 2 x 8 Vacuum break flow adjustment needle Inch size: 2 x 5/16" 1 PS and PD port dimensions 1,4 2 x Common supply (PD) port 75 (Ejector system) 80 (Vacuum pump system) D Individual exhaust port 7 62 53 37.4 38

AC

F2: The force that is created by the port A pressure (PA) that passes through the feedback passage and acts on the spool surface, and the spring force. OFF state { F1< F2 condition: See figure 1. AR1 (Exhaust air) PB (Supply air) ON state PA (Supply air) BR2 (Exhaust air) { Immediately after turning on F1> F2: See figure 3. Thereafter F1 = F2: See figure 2.

Electric Actuator/Slider Type

L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z Me 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 48 Series LEJ This graph shows the amount of allowable overhang when the center of gravity of the workpiece overhangs in one direction.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 20 25 0 1 2 3 4 5 0 5 10 15 Work load [kg] Work load [kg] Work load [kg] 684 A Model Selection LEFB Series AC Servo Motor Calculation of Guide Load Factor Mounting orientation 1.

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

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Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide With coupling LC1-1B2H(Refer to page 185 for details.)