LJ1H

Refer to page 100 for part numbers. 53 54 Non-standard Motor Series LJ1H20 High Rigidity Direct Acting Guide Rolled Ball Screw Motor Output 100W 15mm/10mm lead Horizontal Mount How to Order Stroke 2 LJ1H20 G NA 1 F W X10 Cable entry direction Top entry Cable entry direction Power supply voltage Motor specification Matsushita Electric Industrial Co., Ltd.

ZP

Product Precautions p. 165 26 Variations Basic Pad ZP Series Vacuum inlet direction Flat type Flat type with ribs Bellows type Thin flat type Thin flat type with ribs Deep type Vacuum inlet direction Single unit p. 32 p. 51 p. 68 p. 87 p. 96 p. 105 VAC Vertical Vertical Lateral Lateral ZPT VAC p. 33 p. 34 p. 51 p. 52 p. 69 p. 70 p. 87 p. 96 p. 105 p. 106 With adapter ZPR p. 35 p. 37 p. 53

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Nickel plated Chromium molybdenum steel Hexagon socket head cap screw @1 Aluminum alloy Switch mounting rail @2 Note) Brass for 6, 10 and 15 8-15-53 53 Series CY1S Dimensions Slider type/Slide bearing CY1S6/10 4-J x K (Depth) 14 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

REA/REB

Allowable driving force (Fn) (n = 1, 2, 3) W + WB WV P PV W + WB > WV P > PV Determination of allowable load weight & pressure High Precision Guide Type REAH F1 = x (W + WB) x 9.8 Horizontal Inclined Vertical F2 = (W + WB) x 9.8 x (cos + sin) (See page 63 for vertical operation.)

REA/REB

A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table

REA/REB

A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table

Single Axis Electric Actuator Series LJ1H

Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide With coupling LC1-1B2H(Refer to page 185 for details.)

CY1

bore size determination F3 D1.6 x ___ P WB Inclined operation W+WBWV PPV W+WB>WV P>PV Allowable driving force table (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 F2 = (W + WB) x 9.8 x (cos + sin) F3 = (W + WB) x 9.8 x ( + 1) Horizontal Inclined Vertical (Refer to p. 14 for vertical operation.)

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

P. 2-3-44 P. 2-3-46 P. 2-3-47 P. 2-3-48 C6 L6 P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.

Slider Type Ball Screw Drive/11-LEFS Series

L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 43 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification * This graph shows the amount of allowable overhang (guide unit) when the center

5 Port Solenoid Valve Series SQ1000/2000

L6 (for 6) C4 (for 4) C10 (for 10) L6 (for 6) Side SQ2000 C8 (for 8) 35 J kit: Flat cable 1 to 8 stations SQ230 SQ231 Option SS5Q23 580 Note 2) L4 (for 4) Built-in Silencer Direct exhaust C6 (for 6) Top C8 (for 8) Note 1) One-touch fittings for inch sizes are also available.

MY1

Load (kg) Note: 1 Nm = 0.7375 ftlb 1 kg = 2.2046 lb 1 in = 25.4 mm W1 W W m Moment (Nm) M = F x L M = F x L M = F x L F3 F2 F1 L2 L1 L3 1. Maximum allowable load (1), static moment (2), and dynamic moment (at the time of impact with stopper) (3) must be examined for the selection calculations.

•

3 . ~ ~C 46,5 ZPY40g 40 43 18.5 28.5 58.5 1011.5 1 26.5 6.5 3.3 ZPY20: 20 23 14 24 42 53 76 87 4 1.7 , ~~~; 25 , 29 14 24 '42 53 76 87 4 1 :8 Deep type (mm) ZPY32~ 32 35 14.5 '24.5 42.5 '53.5 '0.< 107< 4.5 2.3 I;~ I: I ~ 1;9 I ~ 1 5~ I ~ 1 '~9 1 ,~ I '1~ 1 Deep type [mm) H I Y L ~~ I~A~~ j C LD E F I G Applicable tube (mm) 93 10 ZPY25D 25 I 28 20 I 30 48 I 59 82 Applicable lube o,p P .0'

V100

PVT317-53-1A 1 pc.

Table of Contents

VFS C8, C10 2-Rc 1/8 (PE port) VS4 VQ7 EVS C8: Max. 6.5 C10: Max. 7 6-Rc 1/2 (P, EA, EB port) For wiring specifications, refer to page 3-5-8.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Series CG1Q Air Cylinder: Low Friction Type Double Acting, Single Rod With Mounting Bracket Without rod boot ZZ Axial Foot Style Axial foot style: CG1LQ Without rod boot Z Bore (mm) B LC LD LH LS LT LX LZ M W X Y 20 25 32 40 50 63 80 100 34 4 4 4 4 5 5 6 6 6 6 7 7 10 12 11 14 20 53 53 53 60 67 67 74 74 3 10 10 10 10 17.5 17.5 20 20 15 7 3 3 3 3 4.5 4.5 4.5 6 32 44 47 52 53 63.5 75.5 75.5

Table of Contents

BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

0.32 0.24 0.57 0.37 0.45 0.55 0.36 0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Body ported for internal pilot Base mounted for internal pilot 10-SS5YJ7-20 10-SYJ723 10-SS5YJ7-21 10-SS5YJ7-40 10-SS5YJ7-41 10-SS5YJ7-42-C6 10-SS5YJ7-42-C8

VQZ1000/2000/3000

C6: One-touch fitting assembly for 6 B B B 4 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 VQD 2 A C8: One-touch fitting assembly for 8 B 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 80 ( 9.5) 2-M4 mounting hole (For C6, C8) (For C6, C8) 4.5 2-M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5 58 37.5 39.5 Residual pressure

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type 10-SS5YJ7-20 Body ported Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 10-SYJ723