REA/REB

Allowable driving force (Fn) (n = 1, 2, 3) W + WB WV P PV W + WB > WV P > PV Determination of allowable load weight & pressure High Precision Guide Type REAH F1 = x (W + WB) x 9.8 Horizontal Inclined Vertical F2 = (W + WB) x 9.8 x (cos + sin) (See page 63 for vertical operation.)

REA/REB

A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table

REA/REB

A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table

Single Axis Electric Actuator Series LJ1H

Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide With coupling LC1-1B2H(Refer to page 185 for details.)

CY1

bore size determination F3 D1.6 x ___ P WB Inclined operation W+WBWV PPV W+WB>WV P>PV Allowable driving force table (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 F2 = (W + WB) x 9.8 x (cos + sin) F3 = (W + WB) x 9.8 x ( + 1) Horizontal Inclined Vertical (Refer to p. 14 for vertical operation.)

A

Bore MM *NA P S W X Y LC LD LH LS LT LX LZ Without gaiter (mm) H ZZ 20 M8x1.25 24 1/8 77 10 15 7 4 5.5 20 53 3 32 44 35 147 25 M10x1.25 29 1/8 77 10 15 7 4 5.5 22 53 3 36 49 40 157 32 M10x1.25 36 1/8 79 10 16 8 4 6.6 25 53 3 44 58 40 159 40 M14x1.5 44 1/8 87 10 16.5 9 4 6.6 30 60 3 54 71 50 187 50 M18x1.5 55 1/4 102 17.5 22 11 5 9 40 67 4.5 66 86 58 218 63 M18x1.5 69 1/4 102 17.5 22 13 5

0.4

(Except double wiring) With name plate External pilot Direct EXH outlet with built-in silencer C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow with 3.2 One-touch fitting Top ported elbow with 4 One-touch fitting Top ported elbow with 6 One-touch fitting M5 thread

Slider Type Ball Screw Drive/11-LEFS Series

L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 43 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification * This graph shows the amount of allowable overhang (guide unit) when the center

42

73.2 (78.7) 59.5 53 59.5 4(A) port 17.5 13.5 2(B) port 4(A) port 17.5 13.5 2(B) port Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2 x 6.5 Mounting hole 35 2 x 6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 1/8" PE. port 1/8" External pilot port 1/8" PE. port

MY1

Load (kg) Note: 1 Nm = 0.7375 ftlb 1 kg = 2.2046 lb 1 in = 25.4 mm W1 W W m Moment (Nm) M = F x L M = F x L M = F x L F3 F2 F1 L2 L1 L3 1. Maximum allowable load (1), static moment (2), and dynamic moment (at the time of impact with stopper) (3) must be examined for the selection calculations.

•

3 . ~ ~C 46,5 ZPY40g 40 43 18.5 28.5 58.5 1011.5 1 26.5 6.5 3.3 ZPY20: 20 23 14 24 42 53 76 87 4 1.7 , ~~~; 25 , 29 14 24 '42 53 76 87 4 1 :8 Deep type (mm) ZPY32~ 32 35 14.5 '24.5 42.5 '53.5 '0.< 107< 4.5 2.3 I;~ I: I ~ 1;9 I ~ 1 5~ I ~ 1 '~9 1 ,~ I '1~ 1 Deep type [mm) H I Y L ~~ I~A~~ j C LD E F I G Applicable tube (mm) 93 10 ZPY25D 25 I 28 20 I 30 48 I 59 82 Applicable lube o,p P .0'

smcmaintenancepartslist

Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.

LEC-OM07605CN

PB45] 0 [dB] [Hz] [Hz] [Hz] -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 0 1 2 3 4 5 6 7 8 9 A B C D E F 00 01 02 03 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B 3C 3D 3E 3F 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 17.6 16.5 15.6 14.8 14.1 13.4 12.8 12.2 11.7

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Note 3) Make sure to indicate the type of solenoid valve when ordering. 3 5 F2 (When double solenoid is mounted) (mm) C2 C3 C1 Model (size) A1 A2 B1 B2 B3 D1 D2 E1 E2 F1 F2 G R CVRB1BW50 CVRB1BW63 CVRB1BW80 CVRB1BW100 120 (136.5) 60 (61) 82.5 78 67 18 36 2.8 12 24 11.5 30 52 (53) 104 (120.5) 25 1/8 102 (136.5) 60 (61) 82.5 98 82 18 36 2.8 16 24 11.5 30 52 (53) 104 (120.5) 27.5 1/8 140 (155

Table of Contents

Note 3) Make sure to indicate the type of solenoid valve when ordering. 3 5 F2 (When double solenoid is mounted) (mm) C2 C3 C1 Model (size) A1 A2 B1 B2 B3 D1 D2 E1 E2 F1 F2 G R CVRB1BW50 CVRB1BW63 CVRB1BW80 CVRB1BW100 120 (136.5) 60 (61) 82.5 78 67 18 36 2.8 12 24 11.5 30 52 (53) 104 (120.5) 25 1/8 102 (136.5) 60 (61) 82.5 98 82 18 36 2.8 16 24 11.5 30 52 (53) 104 (120.5) 27.5 1/8 140 (155

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Note 3) Make sure to indicate the type of solenoid valve when ordering. 3 5 F2 (When double solenoid is mounted) (mm) C2 C3 C1 Model (size) A1 A2 B1 B2 B3 D1 D2 E1 E2 F1 F2 G R CVRB1BW50 CVRB1BW63 CVRB1BW80 CVRB1BW100 120 (136.5) 60 (61) 82.5 78 67 18 36 2.8 12 24 11.5 30 52 (53) 104 (120.5) 25 1/8 102 (136.5) 60 (61) 82.5 98 82 18 36 2.8 16 24 11.5 30 52 (53) 104 (120.5) 27.5 1/8 140 (155

Serial Transmission System Series EX250 Series EX500

5 Applicable series Ports 2, 4 Symbol 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting 8 One-touch fitting 10 One-touch fitting 12 One-touch fitting Rc 1/4 Rc 3/8 G 1/4 G 3/8 Ports 2, 4 mixed 8 One-touch fitting N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T

7

D) DIN terminal U V E Cable 6 to 12 30 G1/2 (44) 31.5 T A B IN OUT M 2 x P Port size (D) L K I F J (mm) Electrical entry M Model Grommet Grommet (with surge C37, Port size P A B C E F I J K L D voltage suppressor) DIN terminal Aluminum body type Stainless steel body T U T T 1/4, 3/8 1/2 88 (93.5) 22.5 30 U U V 22 27 55.5 (61) 27 42 (47.5) 24 30 50 20 4.5 5 11 13 37.5 42.5 25 25 30 47.5 (53

Series VQ Metal Seal/Rubber Seal Body Ported

Example) L6: Elbow with One-touch fittings for 6 Note 2) See Options for One-touch fittings in inch sizes. 100V AC (50/60Hz) 2 position single (1) 200V AC (50/60Hz) SY 1 110V AC (50/60Hz) (1) 220V AC (50/60Hz) 24V DC SYJ 2 position double (latching) 12V DC Note 1) 200/220V AC models are applicabe to the C kit.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Load weight (kg) Dm1 -X 20m2 m3 Moment (Nm) Data M3=F3 x L3 F3 F2 M1=F1 x L1 F1 M2=F2 x L2 L2 L1 L3 1.