Min. Dripping Flow Rate(l/min): 15, Oil Storage Capacity(cm³): 25, Case: [Metal] Metal case, Inlet Side Connection Type: G, Inlet Side Plumbing Thread Nominal: 1/8, Outlet Side Connection Type: G, Outlet Side Plumbing Thread Nominal: 1/8, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 20, Accessory: Without optional mounting

Min. Dripping Flow Rate(l/min): 15, Oil Storage Capacity(cm³): 25, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: G, Inlet Side Plumbing Thread Nominal: 1/8, Outlet Side Connection Type: G, Outlet Side Plumbing Thread Nominal: 1/8, Drain Exhaust: [Manual] With Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 20, Accessory: Without optional mounting

Body Size: 20, Thread: F (G), Port Size: 01 (1/8), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 20, Thread: G, Port Size: 1/8, Mounting: None, Semi-Standard, Body Size 10: Drain Cock, Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 20, Thread: F (G), Port Size: 01 (1/8), Mounting: None, Semi-Standard, Body Size 10: 2 (Metal Bowl), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 20, Thread: F (G), Port Size: 01 (1/8), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: C (Bowl Guard), Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Vacuum

Connection Rc 1/4 02 a a connection Bc 3/8 03 a Connection Rc 1/2 04 a Brackel B C C C t . : . !

Vacuum

Connection Rc 1/4 02 a a connection Bc 3/8 03 a Connection Rc 1/2 04 a Brackel B C C C t . : . !

Vacuum System Peripherals:

When attaching the pressure gauge, make sure to place a wrench directly on the squared off portion. If a force is applied to some other area to screw in the gauge, it could cause the gauge to leak or to become damaged. C Note) X3 (wetted parts) is not stainless steel specifications. Clear cover has no protrusion (Clear cover is irremovable.)

Cylinder

Circuit Diagram : D-90Type Bore Dimension A j Dimension B Dimension C ;t)-k.

EXxx-OMW0014CN

OFF 8 V 4 PNP (C/Q) 0.25 A ( US1 ) 57 No.EX-OMW0014CN-A 9.3.

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

25

Diaphragm Assembled in a clean room.

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

IR1000/2000/3000

The air pressure that flows in acts on diaphragm C and while opposing the force generated by diaphragm B it also acts on diaphragm A opposing the compression force of the setting spring and becomes the set pressure.

Size: 1/8, Thread: G, Port Size: 1/8, Accessory: -, Option 1: -, Option 2: -

Tamper Proof and Flat Head Screw

(mm) 1in=25.4mm L4 D3 H (width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions A Model T2 H D1 T1 D2 D3 L3 L1 L4 L2 AS12 0-M5-T M5 x 0.8 8 9 M5 x 0.8 9 4.5 10 31 10.3 0.7 28.4 AS12 0-U10/32-T 10-32UNF 10-32UNF AS22 0-01-ST Rc 1/8 12 14.3 R 1/8 AS22 0-F01-ST PF 1/8 14.6 7 18 35.6 14.1 1.5 32 AS22 0-N01-ST NPT 1/8 12.7 NPT 1/8 AS22 0-02-ST Rc 1/4 17 18 R 1/4 AS22 0-F02-ST PF 1/4 19.5 7 27.2

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: F01 (Screw-in G1/8), VAC: F01 (Screw-in G1/8), EXH: F01 (Screw-in G1/8)

Body Size: 20, Thread: G, Port Size: 1/8, Mounting: w/o Mounting Option, Bowl: Polycarbonate Bowl, Lubricant Exhaust Port: w/o Drain Cock, Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Size: 1/8, Thread: G, Port Size: 1/8, Accessory: None, Option 1: Metal Bowl, Option 2: -