3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Size: 1/8, Thread: G, Port Size: 1/4, Accessory: None, Option 1: 6 [Nylon Bowl (Including Sight Dome)], Option 2: -

Table of Contents

0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

VM

4 Rubber y POM Piston A !5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !

VM

4 Rubber y POM Piston A !5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !

Micro Mechanical Valve Series VM1000

OFF 45 Max. 6 ON 44 Symbol 3 port 24.5 38 (A) 2 (A) 2 12 12 1 (P) (78.5) 50.5 14.5 3 1.5 1.5 28 5 port (A) 2 (A) 2 12 12 3 (R) 3 (R) 1 (P) 14.5 47.8 37.2 17 R port (5 port only) 3 x 1/8 44 * 0.5 MPa supply F .O.F .* 20 N T.T. 45 6 A Series VM100 Series VM100/Side Ported With bracket VM120-01-A-B VM130-01-A-B VM121-01-A-B VM131-01-A-B With bottom mounting thread VM120U-01-A VM130U-01-A VM121U

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-A9, A9V D-F9BAL Bore size (mm) A 27 27 25 A 24 24 22 B 7 7 8 B 6 6 7 B 3 3 4 0 to 1 A B 20 25 32 D-Z7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL A 23 23 32 37 Bore size (mm) B 0 0 0 4 40 50 63 80 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Minimum Stroke for

IR1000/2000/3000

When a system hazard can be expected due to a drop in vacuum pressure caused by power loss or vacuum pump trouble, install a safety circuit and configure the system so that it can avoid the danger. 2. When a system hazard can be expected with a malfunction of the vacuum regulator, install a safety circuit and configure the system so that it can avoid the danger. 1.

Booster Regulator/Air Tank

ARJ AR425 to 935 Air-operated type Pilot pressure VBA11A VBA10A, 20A, 40A, 43A ARX Drive chamber A Governor Drive chamber A Governor Drive chamber B Booster chamber A AMR IN (Inlet) IN (Inlet) Drive chamber B ARM VBA22A, 42A Piston rod Piston rod ARP Booster chamber A IR-A Piston Piston IR Check valve Booster chamber B Booster chamber B Check valve IRV Switching valve Switching valve E OUT

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

(Refer to pages 15-6-3 and 15-6-5 for details.)

Body Size: 20, Thread: F (G), Port Size: 02 (1/4), Mounting: w/o Mounting Option, Bowl: 6 (Nylon Bowl), Lubricant Exhaust Port: w/o Drain Cock, Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Min. Dripping Flow Rate(l/min): 15, Oil Storage Capacity(cm³): 25, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: G, Inlet Side Plumbing Thread Nominal: 1/4, Outlet Side Connection Type: G, Outlet Side Plumbing Thread Nominal: 1/4, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 20, Accessory: Without optional

Body Size: 20, Thread: F (G), Port Size: 02 (1/4), Mounting: None, Semi-Standard, Body Size 10: Standard, Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

CATALOG

48.5 63.6 25 89.5 79.5 10 15 ZPR40D 40 43 29 42.5 53.3 71.1 25 97 87 17 15 A P P L I C A B L E T U B E A P P L I C A B L E T U B E Applicable Tube OD P Q R S Applicable Tube OD P Q R S 4 4 23.3 15.8 10.4 6 6 24.3 16.8 12.8 H O W T O O R D E R Z P R P A D H O R I Z O N T A L T Y P E W I T H O U T B U F F E R 6 6 24.3 16.8 12.8 8 8 26.2 18.7 15.2 8 8 26.2 18.7 15.2 ZPR P A D D I A M E T E

V

(Except for 110VAC) C O I L V O LTA G E With indicator light and surge voltage suppressor. } 3 110VAC 5 24VDC 6 12VDC VVQ0-P-4-C4 I N D I V I D U A L SUP S P A C E R VVQ0-57A-4 DIN R A I L M O U N T E D B R A C K E T [-D] VVQ0-R-4-C4 I N D I V I D U A L EXH S P A C E R ACCESSORIES MANIFOLD OPTIONS 23 04 06 08 01 03 B U I LT I N S I L E N C E R, D I R E C T E X H A U S T [-S] 1 N A M E P L

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Secondary Batteries

Standard Type 1(P): One-touch fitting 2(A): One-touch fitting Applicable tubing O.D. (mm) Bracket assembly no. 1(P) 2(A) 4 90-VHK-B1A 4 4 6 90-VHK-B1A 6 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 6 8 90-VHK-B1A 8 2(A) Applicable tubing O.D. (mm) 2(A) Applicable tubing O.D.

ITV

Avoid unnecessary disassembly or removal of parts, as this can lead to a malfunction. 6. The optional cable connector is a 4-wire type. When the monitor output (analog output) is not being used, keep the monitor output wire (black) from touching the other wires as this can cause a malfunction. 7.

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

MLU

HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.