Table of Contents

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Micro Mechanical Valve Series VM1000

VM120-01-30 (R, B, G, Y) A-X207 VM130-01-30 (R, B, G, Y) A-X207 Panel mounting hole 40 30.5 T.T. 28.6 0.8 to 7.5 3 1.5 1.5 Symbol 2 port (A) 2 R port (3 port only) (97.3) 43.7 12 10 1 (P) (68.7) 3 port (A) 2 5.5 25 10 12 14.5 14.5 1 (P) 3 (R) * 0.5 MPa supply 25.4 2 x 1/8 44 17 2 x 4.6 mounting hole F .O.F .* 27 N T.T. 6.7 mm VM220-02-30 (R, B, G, Y) A-X207 VM230-02-30 (R, B, G, Y) A-X207

VM

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

VM

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material PBT ADC Material Note No. q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

IR1000/2000/3000

When a system hazard can be expected due to a drop in vacuum pressure caused by power loss or vacuum pump trouble, install a safety circuit and configure the system so that it can avoid the danger. 2. When a system hazard can be expected with a malfunction of the vacuum regulator, install a safety circuit and configure the system so that it can avoid the danger. 1.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

In the graph, find where the lines repres-enting a load weight of 10 kg and a stroke of 300 mm intersect. A 50 bore size is selected.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size Model Port size Pilot port 6 8 10 12 1/4" 5/16" 3/8" 1/2" ASP330F-01 ASP430F-02 ASP530F-03 ASP630F-04 ASP430F-F02 ASP530F-F03 ASP630F-F04 ASP330F-N01 ASP430F-N02 ASP530F-N03 ASP630F-N04 R 1/8 M5 x 0.8 R 1/4 Rc 1/8 R 3/8 Rc 1/8 R 1/2 Rc 1/4 R 1/4 G 1/8 R 3/8 G 1/8 R 1/2 G 1/4 NPT 1/8 10-32 UNF NPT 1/4 NPT 1/8 NPT 3/8 NPT 1/8 AS NPT 1/2 NPT 1/4 Note

CATALOG

, d e t e r i o r a t i o n o f a c c u r a c y, a n d breakage of parts.)

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Secondary Batteries

1 8 R 1 4 R 3 8 04F 06F 08F 01S 02S 03S Red R (Option) 2(A) port size 04F 06F 08F 4 6 8 *Specifications and dimensions for the 90-series are the same as standard products.

q"s

*sure dlsplay Accuracy J3% (lull span) Minimum unit [ i l P a : 0 . 0 1 . k a f / c m ' : 0 . 0 1 , b a r : 0 . 0 1 .

•

Millirrfeter size 1{1' Q I1'SiZeJ' , 0.6' r'~ '" 0Ur 0~ '2. , ~1/4' a!;'16" 03/4" 'ol/2~ AsP330F'!U R(PT)1/8 M5 X 0.8 J\SP. 4;JOF~02 R(PT)I /4 Rc(PD1 /8 IIS'P530F:03 R(PT)318 Rc(PT)lIS 'ASi"!)30l"'lJ4 " R(PT)1!2 Rc(PT)1I4 ASP;l3OF:,FO~ RIPT)114 G(PF)1I8 I\Sps:ioFf;03' R(PT)318 G(PF)118 ),I'SPsJOF;;04: R(PT)1 /2 G{PF)1/4 A~P33!1F" 'l Il1 NPT1 /8 10-32UNF ,~Sp430FNO,?

ITV

The pressure in the pilot chamber e increases and operates on the upper surface of the diaphragm r. As a result, the air supply valve t linked to the diaphragm r opens, and a portion of the supply pressure becomes output pressure. This output pressure feeds back to the control circuit i via the pressure sensor u.

Min. Dripping Flow Rate(l/min): 15, Oil Storage Capacity(cm³): 25, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: G, Inlet Side Plumbing Thread Nominal: 1/4, Outlet Side Connection Type: G, Outlet Side Plumbing Thread Nominal: 1/4, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 20, Accessory: Without optional

Body Size: 20, Thread: F (G), Port Size: 02 (1/4), Mounting: None, Semi-Standard, Body Size 10: Standard, Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

MLU

HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

Plate Cylinder with Lock Series MLU

HS D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NT D-F7BAL 40, 50 25, 32 Approx. 30.5 A A Approx. 22 A A Approx. HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.