42

) 96.2 71.7 96.2 71.7 58.2 VFR 1/8" External pilot port 44 106 9 9 91 44 106 49.7 58.2 Station number 1/8" External pilot port 49.7 9 9 U side entry (LU) VQ7 D side U side D side n n U side 8 8 Manual override 7 7 A B A B A B A B A B A A A B A B A B A B A B A A B B B A A A A A A A 6 6 5 5 215 P = 25 44 L1 L2 L1 L2 4 4 B B Indicator light 3 3 2 2 P = 25 1 1 27 38 50.5 27 38 50.5 44 Stations

Table of Contents

-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S(-F20) ASQ530F-02-10S(-F20) ASQ530F-02-12S(-F20) ASQ530F-03-06S(-F20) ASQ530F-03-08S(-F20) ASQ530F-03-10S(-F20) ASQ530F-03-12S(-F20) ASQ630F

AC

For AC2040 For AC3040 For AC4040 For AC4040-06 Model Description 02 03 04 06 E50-06 E3002 03 04 E2001 02 03 E40Piping adapter Attachment Accessory 4 4 4 06 4 VHS201 02 02 03 VHS3000VHS402 03 04 Y24-01 02 02 Y34-01 Y44-02 03 Y54-03 04 02 03 04 2 2 2 Y IS1000E02 03 04 3 3 3 Y IS1000EIS1000EY 01 02 03 Pressure switch with piping adapter Residual pressure exhaust 3 port valve Cross interface

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

A A A A 24 20 69.3 (DIN : 70.6) 107.2 [111.6] 68 23.6 20 (DIN: 7.4) (DIN: 5.2) 39 6.5 6.1 B B B B B (P , EA, EB port) 1/4 (4.9) (External pilot port) M5 x 0.8 P = 16 (Pitch) 18 5 L2 L1 (Station 1) (Station n) (Light/surge voltage suppressor) + + 66.6 [73.6] 51.2 A A 38 7.8 27.3 B B 9.5 15 P = 16 (Pitch) (A, B port) One-touch fitting Applicable tubing O.D.: 6, 1/4" 8, 5/16" L plug connector

V100

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

VQ4000

A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner

Smooth Cylinder/Low Speed Cylinder

Type A mounting bracket part no. YA-03 Joint YU-03 RS T2 V M W REA Joint REB Joint and Mounting Bracket (Type A, Type B) Part No. T1 Applicable mounting bracket Bore size (mm) E 2 x O counterbore 2 x D through REC Joint part no.

Table of Contents

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

V

(Except for 110VAC) C O I L V O LTA G E With indicator light and surge voltage suppressor. } 3 110VAC 5 24VDC 6 12VDC VVQ0-P-4-C4 I N D I V I D U A L SUP S P A C E R VVQ0-57A-4 DIN R A I L M O U N T E D B R A C K E T [-D] VVQ0-R-4-C4 I N D I V I D U A L EXH S P A C E R ACCESSORIES MANIFOLD OPTIONS 23 04 06 08 01 03 B U I LT I N S I L E N C E R, D I R E C T E X H A U S T [-S] 1 N A M E P L

5

Type A mounting bracket part no. YA-03 Joint YU-03 Type B Mounting Bracket RS Joint and Mounting Bracket (Type A, Type B) Part No. Bore size (mm) Joint part no.

KJ

-01 KDM20S-03 KDM20S-07 KDM20P-01 20 KDM20P-03 KDM20P-07 KDM20S-09 KDM20P-09 Clamp bolt Panel mounting Loosen (4) screws for bracket on the socket side using a Phillips screwdriver (JIS nominal No. 2) until the bracket touches the stop ring.

SX

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

CQ2

A type mounting bracket part No.YA-03 Joint YU-03 Joint Part No. Applicable mounting bracket Bore size (mm) Weight (g) Joint part No. B bracket A bracket YB-03 YU-03 YA-03 32, 40 25 YB-05 YU-05 YA-05 50, 63 40 Bore size (mm) YB-08 YU-08 YA-08 80 90 Part No.

CG5-S

Mineral oil A C A A A A 18 Sodium hypochlorite (2%, Room temperature) A C A D D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B A D A B 23 Unless noted otherwise, the solution concentration is in a saturated state.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-A7H/A80H D-A73C/A80C D-F/F7V/F79F D-F7W/F7WV D-J79/J79W D-J79C D-F7BAL/F7BAVL D-Z7/Z80 D-Y59/Y69 D-F7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-A7H, D-A80H D-F7, D-J79, D-F7W D-J79W, D-F7BAL D-F79F, D-F7NTL D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-Y7BAL D-A7 D-A80 D-A79W D-F7NTL D-A7 D-A80 D-A73C D-A80C Bore size (mm) A 32.5 32.5 36.5 A 33 33 37 A 30 30 34 A 38 38 42 A 29 29 33 38.5 42 U 80 88 98

Fluoropolymer Piping Equipment

A A A A A Note) For details of the applicable tubing sizes, refer to page 945.

VQ7-6/7-8

C10 02 03 C12 Enter only when using for a 2 position single or double.

KR

(mm) (1) Weight (g) D1 D2 L1 L2 A M Nylon Urethane KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 M5 x 0.8 7 9.5 16 13.5 15 13 3.5 3.5 2.7 10 19 4 1 8 1 4 22 26 23 25 10 14 7 11.5 10.4 10 18 16 4.2 4.2 M5 x 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 3.5 3.5 16 14.5 17 23 25.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Type A mounting bracket part no. YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.

Table of Contents

B A B A B A B A B A B A B 12 40.5 4 41 4.5 38 2 46 9.5 39.5 3 43.5 7 42.5 6 20 47 13 47.5 13.5 44.5 10.5 52.5 18.5 46 12 50 16 49 15 32 55 17 5.5 17.5 52.5 14.5 60.5 22.5 54 16 58 20 57 19 40 79 39 79.5 39.5 76.5 36.5 84.5 44.5 78 38 82 42 81 41 50 82 44 82.5 44.5 79.5 41.5 87.5 49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91 47 84.5 40.5 88.5 44.5 87.5 43.5 Operating Range Auto switch