VM

8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

33

6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] Option (-T): High Pressure Pump Mounted HRSE -A-10-T 012 018 012 018 024 Option (-T): High Pressure Pump Mounted HRSE -A-20/23-T 0.3 0.3 Circulating fluid pressure

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(same side) 70 Bore size (mm) D-F9BAL Auto switch model 1 or 2 pcs. (different sides) 25 40 50 63 80 D-Z7/Z80 10 10 11 13 40 32 50 Bore size (mm) 63 80 Auto switch type No. of auto switches Model D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 6 5 6 8 2 pcs. (same side) 70 60 D-Z7/Z80 Reed switch D-Y7BAL 5.5 5.5 6 7 1 or 2 pcs.

VM

8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

Booster Regulator/Air Tank

The length of G thread type is about 6 mm longer due to plug type differences.

PSxx-OMV0003CN

02 N02 F02 Rc1/4 NPT1/4 G1/4 C3604()HNBR 153 g 152 g 150 g M12 139 g -83No.PS-OMV0003CN-G 2Xm4 5 -84No.PS-OMV0003CN-G A B -85No.PS-OMV0003CN-G M12 ZS-31-B ZS-31-C AWG23 0.72 mm 1.14 mm 4 5 m -86No.PS-OMV0003CN-G Revision history A [2017 9 ] B [2018 1 ] C [2018 2 ] D [2018 3 ] E [2018 6 ] F [2020 3 ] G [2022 1 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249

PSxx-OMV0008CN

02 N02 F02 Rc1/4 NPT1/4 G1/4 Al2O3(96) ISE70GC3604()FKM+ ISE75G/ISE76G/ISE77G/ISE78GC3604()FKM ISE70G 179 g 178 g 175 g ISE75G/ISE76G/ISE77G 184 g 183 g 181 g M12 139 g -87No.PS-OMV0008CN-E 2M4 5 -88No.PS-OMV0008CN-E A B -89No.PS-OMV0008CN-E M12 AWG23 0.72 mm 1.14 mm 4 5 m -90No.PS-OMV0008CN-E Revision history A [2018 2 ] B [2018 6 ] C [2020 3 ] D [2021 8 ] E [2022 4 ] 4-14-1,

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

(Refer to pages 15-6-3 and 15-6-5 for details.)

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

: G1/4 (ISO 1179-1) 6 24 24 22 2 x M4 thread depth 5 15 12 5.5 6.5 1.6 32 25 42 Lead wire with M12 connector (Part no.: ZS-31-B) 5000 (38.6) Brown 45 2: White 1: Brown 30 White 15 Blue 4: Black 3: Blue Black M12 (Part no.: ZS-31-C) (31) 5000 Brown 45 23.5 When used as a switch output device 30 White No.

IR1000/2000/3000

IRV1000 IRV2000 IRV3000 P538010-6 P538020-3 P538030-5 q w e r t y u i o !0 !1 !2 !3 !4 !5 HNBR, etc.

CATALOG

(Color) NBR (Black) Hardness 50 D I M E N S I O N S PA D D I A M E T E R S 2, 4, 6, 8 D I M E N S I O N S PA D D I A M E T E R S 10, 13, 16 F L AT T Y P E F: M5X0.8 F: M6X1 Model A B C Y D E D E ZPR02U 2 2.6 1.2 0.8 ZPR04U 4 4.8 1.6 0.8 20 65.5 25 70.5 ZPR06U 6 7 2.5 0.8 ZPR08U 8 9 2.5 1 A P P L I C A B L E T U B E Applicable Tube OD G H I J 4 4 20.6 15.6 10.4 6 6 21.6 16.68 12.88 F L AT

V

PT 00T NPTF ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT201-15-1A Blanking Plate Kit Stations (n) 2 3 4 5 6 7 8 9 10 L1 59 78 97 116 135 154 173 192 211 L2 49 68 87 106 125 144 163 182 201 H O W T O O R D E R M A N I F O L D T Y P E 41 S I D E P O R T E D D I M E N S I O N S M A N I F O L D T Y P E 41 S I D E P O R T E D G R O M M E T T Y P E (N)VV3Z5 41 01T 1 N U M B E R

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

Secondary Batteries

-900, D-M9BWSDPC-900 and D-A90L-900.

MLU

HS 9-13-16 16 Series MLU Plate Cylinder with Lock Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) Auto switch model (mm) D-A7H D-A80H D-F7 D-F7 V D-J79 D-F7W D-F7WV D-J79W D-F7BAL D-F7BAVL D-F79F D-A7H D-80H D-F7 D-J79 D-F7W D-79W D-F7NTL D-F79F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7LF D-P5DWL D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-F7NTL D-A7 D-A80 D-A73C

Plate Cylinder with Lock Series MLU

HS 9 Plate Cylinder with Lock Series MLU Proper auto switch mounting position Auto switch mounting height (mm) Auto switch model (mm) D-A7H D-A80H D-F7 D-F7 V D-J79 D-F7W D-F7WV D-J79W D-F7BAL D-F7BAVL D-F79F D-A7H D-80H D-F7 D-J79 D-F7W D-79W D-F7NTL D-F7F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7LF D-P5DWL D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-F7NTL D-A7 D-A80 D-A73C D-A80C D-P5DWL

ITV

side. 50 56 D side U side 1 2 stations 50 9 3 (8) Dimensions in inch are noted in parentheses. 6.5 6.5 1 1 82 89.5 SUP, VACzport 3 3 (6, 1/4") 40 40 EXH, ATMcport 25 25 (6, 1/4") 5 5 2 2 2 OUTxport (4, 5/32") Note) 3.7 Breathing hole (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page 14-8-8.

q"s

0.1 o -1 2 4 6 a 1 0 0.0 0 25 50 75 lnputsignal (%F.S.) 1 . 0 1 0 25 50 75 Inputsignal (%F.S.) 500 1000 1500 Flow rale (l/min (ANR)) :':i ::l Relief flow characterjslics supp y pressure: 0.7 Mpa Flow characteristics suppty pressure: 0.7 Moa Pressufe chafaCtgristics set oressue: 0 2 MHa 0.8 0-7 t'. I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

PSxx-OMH0002CN

()FSC SET 5R.D. 1 digit UP 1 UP 1 DOWN 1 DOWN 1 UP DOWN 1 SET 4 LoCUnL UP DOWN SET LoC SET 4 UnL -23No.PS-OMH0002CN-D 0 7F.S.0 (01 digit) UP DOWN 1 -24No.PS-OMH0002CN-D (2030) -25No.PS-OMH0002CN-D ISE70/ISE75(H) ISE70/ISE75(H) ISE70/ISE75(H) ISE70/ISE75(H) () 1 ON ON OFF Yes No 2 OFF ON 1 OFF 3 4 5 -26No.PS-OMH0002CN-D 6 Yes No 7 7 8 9 10 11 12 13 14 15 -27No.PS-OMH0002CN-D

0.01

(Nil) IN side connection symbol OUT side connection symbol IN side connection symbol Connection size OUT side connection symbol Connection size C04 C06 C08 C10 C12 02 N02 F02 C04 C06 C08 C10 C12 02 N02 F02 4 6 8 10 12 4 6 8 10 12 Clean One-touch fittings (KP series) Clean One-touch fittings (KP series) Specifications The specifications are the same as the standard models.