Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

AK Applicable tubing O.D. d L2 L3 M Inch size ASS ASR D2 L1 ASF T2 L4 H1 H1 (Hexagon width across flats) (Hexagon width across flats) H2 H2 (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) D3 A1 L5 D1 A2 T1 Inch Size L4 Weight (g) d T1 D1 A2 A1 D3 M L3 L2 L1 H1 H2 D2 Max. Min.

IR1000/2000/3000

Note) X465 AMR Note) Except symbol G ITV IC Switch specifications Output specifications NPN output PNP output 1 to 5 V output 4 to 20 mA output Symbol A B C D VBA VE VY1 With digital pressure switch G PPA Note 1) Please contact SMC separately for details about the external dimensions, etc.

rep-modular-e

Tightening torque AL20: 0.3 0.05 Nm AL30: 0.4 0.05 Nm AL40 to 60: 0.55 0.05 Nm Flat blade screw driver (Torque driver) Actuators Modular F.R.L.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Tightening torque AL20: 0.3 0.05 Nm AL30: 0.4 0.05 Nm AL40 to 60: 0.55 0.05 Nm Flat blade screw driver (Torque driver) Actuators Modular F.R.L.

energy saving effect

equipped as standard.) sPage 177 sPage 180 With fluid fill port 156 A Thermo-chiller Inverter Type HRSH Series Circulating Fluid Temperature Controller Circuit diagram HRSHl-W-l (Water-cooled refrigeration) HRSHl-A-l (Air-cooled refrigeration) HRS Ventilation DC inverter fan HRS 090 Water regulating valve Air release valve for facility water discharge HRS 100/150 WPR Facility water outlet D

HRS100/150

-phase 200 VAC 3-phase 400 VAC [mm] [mm] 93 Environmental friendly R410A as refrigerant Thermo-chiller Standard Type HRS100/150 Series Circulating Fluid Temperature Controller Fan Triple controller Air-cooled condenser fan control Cooling valve Heating valve Circuit diagram Ventilation Cooling valve control Fan Facility water outlet Dryer Air-cooled condenser D

53

Inverter pump Triple inverter HRZD HRW 0.6 kW 1.8 kW Water-cooled refrigeration Air-cooled refrigeration HECR 377 [mm] 970 HEC 2.4 kW HEB Triple inverter HRSH090 HED *1 Under the conditions shown on page 128 HEA Cooling capacity 9.5 kW IDH 1080 0.1C Temperature stability (when a load is stable) Set temperature range 5C to 40C W 377 x H 1080 x D 970 mm Compact, Space-saving Low-noise design

Thermo-chiller

Series HRS100/150 CAT.NAS40-62B R410A as refrigerant Thermo-chiller Standard Type Series HRS100/150 Circulating Fluid Temperature Controller Triple controller Fan Air-cooled condenser fan control Cooling valve Heating valve Circuit diagram Ventilation Cooling valve control Fan Facility water outlet Temperature sensor (Heat exchanger inlet) Water-cooled condenser Dryer Air-cooled condenser D

Lightweight and Compact

Writing Readout Run/Stop Circulating fluid temperature setting (SV) Circulating fluid present temperature Circulating fluid discharge pressure Status information Alarm occurrence information Item Specifications Connector type D-sub 9-pin, Female connector Protocol Modicon Modbus compliant/Simple communication protocol Standards EIA standard RS-485 EIA standard RS-232C To the thermo-chiller

33

(per unit) Applicable model A B C D HRSE012-AHRSE018-AHRSE024-A240 (335) 505 (540) HRW HRS-TK003 HECR HRSE012-A--T HRSE018-A--T HRSE024-A--T 240 (335) 555 (590) HEC HEB HED HEA IDH Anchor bolt (M8) D C (Prepared by user) Anti-quake bracket Material: Zinc steel plate Mounting view A B w Bypass Piping Set Note) To be mounted by user.

CATALOG

D-G5P D-K59 D-5NTL D-H7A1 D-H7A2 D-H7B D-H7C D-G59W D-G5PW D-K59W D-G59F D-G79 D-H7PW D-H7BAL D-H7LF D-H7NF D-G5BAL D-H7PW D-H7BW 24VDC 110VAC 220VAC 24VDC 24VDC 110VAC 220VAC 24VDC 110VAC Yes/2 Wire D-B54 Yes/2 Wire D-B53 No/2 Wire D-B64 D-B73 D-C73 D-C73C D-B76 D-C76 D-B80 D-C80 D-C80C Yes/2 Wire Yes/2 Wire 20mA 4~8VDC 50mA 40mA 20mA 24V 48V 110V No/2 Wire ACCESSORIES SWITCH BANDS FOR

5

Auto Switch Mounting Height (mm) D-B5m D-B64 D-B59W D-G5m D-K59 D-G5NT D-G5mW D-K59W D-G5BA D-G59F Auto switch model D-F5m D-J59 D-F5mW D-J59W D-F5BA D-F59F D-F5NT D-Z7m D-Z80 D-Y59m D-Y7P D-Y7BA D-Y7mW D-M9m D-M9mW D-M9mA D-A9m D-A3mC D-G39C D-K39C D-A44C D-A3m D-G39 D-K39 D-A44 D-A5m D-A6m D-A59W D-M9mV D-M9mWV D-M9mAV D-A9mV D-Y69m D-Y7PV D-Y7mWV D-P3DWA D-P4DW Bore size Hs Ht Hs Ht Hs

V

Y P E 41 S I D E P O R T E D M A N I F O L D.

Made to Order

D-M9(V)/M9W(V)/M9A(V) D-A9(V) D-B5/B6 D-G5/K5 Hs Hs B A B A D-B7/B8 D-G7/K7 D-C7/C8 D-H7 Hs Hs B A B A Proper Auto Switch Mounting Position (mm) Proper Auto Switch Mounting Height (mm) D-B7/B80 D-B73C D-B80C D-G79/K79 D-K79C D-H7C D-G5NT D-G5/K59 D-G5W D-K59W D-B5/B64 D-B59W D-G5BA D-G59F Auto switch model D-G59F/G5 D-K59 D-G5W D-K59W D-G5NT D-G5BA Auto switch model D-H7 D-H7C D-H7NF D-H7W

C95

0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5, D-J5 D-F5W, D-J59W D-F5BAL, D-F5NTL D-F59F D-A3, D-K39 D-G39 D-A44 D-Z7, D-Z80 D-Y59, Y7P D-Y7W D-A5 D-A6 D-A59W D-Y69, D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Bore size (mm) CP95 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht NCM

Air Cylinder Series MB

Auto Switch Mounting Height (mm) D-Z7, Z-80 D-Y59 D-Y7P D-Y7W D-F5, D-J5 D-F5F D-F5W, D-J59W D-F5BAL, D-F5NTL D-A5 D-A6 D-A59W D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV Bore size D-Y7BAL D-A44 D-P5DWL (mm) Ht Hs Ht Hs Hs Hs Hs Hs Hs Hs Ht Ht Ht Ht Ht Ht 32 24.5 35 25 32.5 25.5 77 38 67 26.5 30 23 27.5 31 27.5 23 23 40 27.5 38.5 27.5 36.5 29.5 81.5 42 71.5 30 34 26 27.5 33 27.5 26 26 50 34.5 43.5

MLU

HS 9-13-16 16 Series MLU Plate Cylinder with Lock Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) Auto switch model (mm) D-A7H D-A80H D-F7 D-F7 V D-J79 D-F7W D-F7WV D-J79W D-F7BAL D-F7BAVL D-F79F D-A7H D-80H D-F7 D-J79 D-F7W D-79W D-F7NTL D-F79F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7LF D-P5DWL D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-F7NTL D-A7 D-A80 D-A73C

Plate Cylinder with Lock Series MLU

HS 9 Plate Cylinder with Lock Series MLU Proper auto switch mounting position Auto switch mounting height (mm) Auto switch model (mm) D-A7H D-A80H D-F7 D-F7 V D-J79 D-F7W D-F7WV D-J79W D-F7BAL D-F7BAVL D-F79F D-A7H D-80H D-F7 D-J79 D-F7W D-79W D-F7NTL D-F7F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7LF D-P5DWL D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-F7NTL D-A7 D-A80 D-A73C D-A80C D-P5DWL

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

MNB

(different sides or same side) 15 25 1 pc. 10 Auto Switches / Proper Mounting Position and Height for Stroke End Detection Reed switch Solid state switch A B Hs A B Hs Ht Ht Auto switch mounting position Auto switch mounting height D-A5 D-A6 D-A59W D-F5, D-J5 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5, D-A6 D-A59W D-F5NTL D-F5W, D-J59W D-F5BAL, D-F5NTL Bore size (mm) Bore size (mm) Hs Ht Ht Hs B