MLU

HS 9-13-16 16 Series MLU Plate Cylinder with Lock Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) Auto switch model (mm) D-A7H D-A80H D-F7 D-F7 V D-J79 D-F7W D-F7WV D-J79W D-F7BAL D-F7BAVL D-F79F D-A7H D-80H D-F7 D-J79 D-F7W D-79W D-F7NTL D-F79F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7LF D-P5DWL D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-F7NTL D-A7 D-A80 D-A73C

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

14 172.5 up to 500 10 13 195 11 171 184 23 14 182 up to 600 14 17 221 15 194 206 30 20 209 up to 600 14 17 221 15 194 206 30 20 209 U up to 750 22 26 287 23 246 264 42 30 269 CX L RR up to 750 22 26 287 23 246 264 42 30 269 Z + Stroke ZZ + Stroke Double clevis(D)/Locking at head end (Hl) Wl Hl/ Rl (mm) Port Cushion valve Stroke range Bore size (mm) +0.3 +0.1 CDH10 U Z RR CZ Z L CX ZZ ZZ

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22 22 23 23 30 30 42 42 U CX L Z + Stroke RR ZZ + Stroke Double clevis/(D) Port Cushion valve Double clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX +0.3 ZZ Z U RR L CD +0.1 CZ 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5 11 15 15 23 23 up to 500

HRS100/150

-phase 200 VAC 3-phase 400 VAC [mm] [mm] 93 Environmental friendly R410A as refrigerant Thermo-chiller Standard Type HRS100/150 Series Circulating Fluid Temperature Controller Fan Triple controller Air-cooled condenser fan control Cooling valve Heating valve Circuit diagram Ventilation Cooling valve control Fan Facility water outlet Dryer Air-cooled condenser D

53

Inverter pump Triple inverter HRZD HRW 0.6 kW 1.8 kW Water-cooled refrigeration Air-cooled refrigeration HECR 377 [mm] 970 HEC 2.4 kW HEB Triple inverter HRSH090 HED *1 Under the conditions shown on page 128 HEA Cooling capacity 9.5 kW IDH 1080 0.1C Temperature stability (when a load is stable) Set temperature range 5C to 40C W 377 x H 1080 x D 970 mm Compact, Space-saving Low-noise design

rep-modular-e

Tightening torque AL20: 0.3 0.05 Nm AL30: 0.4 0.05 Nm AL40 to 60: 0.55 0.05 Nm Flat blade screw driver (Torque driver) Actuators Modular F.R.L.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Tightening torque AL20: 0.3 0.05 Nm AL30: 0.4 0.05 Nm AL40 to 60: 0.55 0.05 Nm Flat blade screw driver (Torque driver) Actuators Modular F.R.L.

Lightweight and Compact

Writing Readout Run/Stop Circulating fluid temperature setting (SV) Circulating fluid present temperature Circulating fluid discharge pressure Status information Alarm occurrence information Item Specifications Connector type D-sub 9-pin, Female connector Protocol Modicon Modbus compliant/Simple communication protocol Standards EIA standard RS-485 EIA standard RS-232C To the thermo-chiller

70pvpump

D (for PA3000 automatically operated type) Discharge rate 5 0.040 125 (cycles/min) = = Cycles per minute Discharge per cycle Reference life cycles 1 1 = x x Service life Cycles per minute 8 (Daily operating time) 60 1 1 100,000,000 = x x 60 8 125 1666 days = 17-5-145 6 Series PA/PAX/PB Precautions 5 Be sure to read before handling.

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

ITV

side. 50 56 D side U side 1 2 stations 50 9 3 (8) Dimensions in inch are noted in parentheses. 6.5 6.5 1 1 82 89.5 SUP, VACzport 3 3 (6, 1/4") 40 40 EXH, ATMcport 25 25 (6, 1/4") 5 5 2 2 2 OUTxport (4, 5/32") Note) 3.7 Breathing hole (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page 14-8-8.

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-lb2 09i\ ' -5f -16'~ .. , AS . ~43b'F~N02-07S 114' '" " " ,. , , 18,5 15 18 jl~' 11/1~ 1 _ , 10.2 # 23 19.8 20.3 2 3.1 18.5 ASP530F-NOJ...09S 5/ 16" NPT3/8 NPT1/8 5 1.3 28.2 41.9 56.2 50 3 l B.7 107 I 46.9 14.4 54 .1 32.6 20.8 11 6 19 I 112 (}I .-2 ; :)2.6 . " . " ... t AS P6:1oF.,..ci4:'M' .. .. -31&" ; ~~T; 12 . .. . I AS~'Nl>?f3S ~ ~ fit ' ..

Precision Regulator

specifications IR3000 series Set pressure Max. 0.8 MPa 2 AP100 Connection Rc 1/8 01 Connection Rc 1/4 02 Connection Rc 3/8 03 Connection Rc 1/2 04 Bracket B Accessory Pressure gauge G Bracket, name plate reverse mounted R Connection NPT 1/8 IR2000 series N01 Connection NPT 1/4 N02 Connection NPT 3/8 N03 Connection NPT 1/2 N04 Connection G 1/8 F01 Connection G 1/4 F02 Connection G 3/8 F03

Blow Gun Series VMG

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.

IR1000/2000/3000

Note) X465 AMR Note) Except symbol G ITV IC Switch specifications Output specifications NPN output PNP output 1 to 5 V output 4 to 20 mA output Symbol A B C D VBA VE VY1 With digital pressure switch G PPA Note 1) Please contact SMC separately for details about the external dimensions, etc.

energy saving effect

equipped as standard.) sPage 177 sPage 180 With fluid fill port 156 A Thermo-chiller Inverter Type HRSH Series Circulating Fluid Temperature Controller Circuit diagram HRSHl-W-l (Water-cooled refrigeration) HRSHl-A-l (Air-cooled refrigeration) HRS Ventilation DC inverter fan HRS 090 Water regulating valve Air release valve for facility water discharge HRS 100/150 WPR Facility water outlet D

Body Size: 40, Thread: G, Port Size: 3/8, Mounting: w/o Mounting Option, Bowl: Polycarbonate Bowl, Lubricant Exhaust Port: w/o Drain Cock, Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Body Size: 40, Thread: F (G), Port Size: 03 (3/8), Mounting: w/o Mounting Option, Bowl: Polycarbonate Bowl, Lubricant Exhaust Port: w/o Drain Cock, Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Series AL modular style lubricator provides accurate lubrication of downstream equipment. The oil drop rate is adjustable depending on equipment requirements. The AL modular design allows connection with other SMC air preparation equipment. Atomizes lubricant into fine particles at uniform rate, Drip rate easily monitored with sight dome, Can be refilled under pressure, High-response

Body Size: 40, Thread: Rc, Port Size: 04 (1/2), Mounting: w/o Mounting Option, Bowl: 2 (Metal Bowl), Lubricant Exhaust Port: 3 (w/Drain Cock), Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C