Body Size: 50, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 06 (3/4), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 50, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 06 (3/4), Mounting: None, Semi-Standard, Body Size 10: Standard, Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: 8R (8 + R)

Body Size: 50, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 06 (3/4), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: 8 (Metal Bowl w/Level Gauge)

Body Size: 50, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 06 (3/4), Mounting: None, Semi-Standard, Body Size 10: 2 (Metal Bowl), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 50, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 06 (3/4), Mounting: None, Semi-Standard, Body Size 10: 2 (Metal Bowl), Semi-Standard, Body Size 20: 3 (Drain Cock), Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Case: -, Drain Exhaust: -, Case Guard: -, Specification: Applicable part number: AL50-A, Type: Damper holding assembly

Case: [Resin] Resin, Drain Exhaust: -, Case Guard: -, Specification: Applicable part number: AL50-A, Type: Damper (assembly)

ZP

Form w 1 Material e Vacuum inlet r Connection A thread Width across flats J 10 13 16 04 B5 4 20.6 10.4 3 Width across flats K D C B N S U F GN GS 06 6 21.6 12.8 4 20 25 32 40 50 ZP R F 06 B5 B8 6 24.3 12.8 4.5 E2 08 8 26.2 15.2 6 Applicable tubing O.D.

CATALOG

www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male

Table of Contents

Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Type Mail thread (with seal) Female thread Symbol 01 02 03 04 06 Symbol M F Plug Yes No No Yes Socket Yes Yes No No Availability Built-in check valve Note) A plug with check valve should be used in combination with a socket with check valve.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Table of Contents

6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !6 Needle Spacer Electroless nickel plated Brass POM (2) t !

AC

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal Regulator ARM2500-A-02 ARM2500-A-02 ARM3000-A-02 ARM3000-A-02 Regulator 1 o !0 !1 !2 Replacement Parts End plate R 1 Description Material Part No. End plate L 1 No.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

KJ

Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Type Mail thread (with seal) Female thread Symbol 01 02 03 04 06 Symbol M F Plug Yes No No Yes Socket Yes Yes No No Availability Built-in check valve Note) A plug with check valve should be used in combination with a socket with check valve.

Table of Contents

R ZZM 06 06 R Multi-ejecter Common SUP port location Port and silencer location Series ZM Manifold Nil Both sides Number of stations R Right side L Left side B Both sides Right side Left side R L 01 1 station Right or left to the VAC port Right or left to the VAC port 05 5 stations Common EXH port size 10 10 stations (Max.) 04 06 1 2 3 4 Thread type S Silencer for ZZM (ZZM-SA) Nil Rc NPTF

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Table of Contents

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

VM

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

Proposals for Energy Saving

-100 KN-06-150 KN-06-200 KN-08-150 KN-08-200 KN-10-250 KN-10-300 KN-10-350 KN-10-400 KN-10-600 KN-12-350 KN-12-400 KN-12-600 KN-16-400 KN-16-600 KN-20-400 KN-20-600 D H2 H1 L2 L1 Nozzle with male thread/KN (mm) Model Nozzle size D Connection size L1 A Width across flats H1 Connection thread 1 1.5 1 1.5 2 2.5 6 4 6 4 6 6 8 8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 R 1/4 R 3/8 R 3