Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

) kit, without cable U side F kit D side 1 to 12 stations 24 D side D-sub connector kit P kit Note 1) 1 to 12 stations 24 D side Flat ribbon cable connector kit 26P 20P ( ) 1 to 9 stations 18 J kit Flat ribbon cable (20P) PC wiring system compatible D side JD0 1 to 8 stations 16 Flat ribbon cable (20P) (PC wiring system compatible) D side U side D side U side D side U side LD0 (N) LU0

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

( ) Flat ribbon cable connector kit 18 Flat ribbon cable (20P) kit, without cable 18 stations 1 to 9 stations J kit Flat ribbon cable (20P) PC Wiring System compatible JD0 D side 16 stations 1 to 8 stations 16 Flat ribbon cable (20P) (PC Wiring System compatible) LD0 LU0 LD1 LU1 LD2 LU2 SDF SDH SDJ1 SDJ2 SDQ SDR1 SDR2 SDV D side L kit Lead wire kit with 0.6 m cable U side D side Lead wire

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Type 20P (5 port/Body ported) SS5YJ5 20P 05 10 A, B port Applicable blanking plate assembly Refer to page 329. Clean series P port 1/8 P, R port thread type Number of stations Nil 00F 00N 00T Rc G NPT NPTF CE-compliant 03 3 stations Applicable connector assembly Refer to page 323.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

SUP spacer assembly, an individual EXH spacer assembly, or an adapter plate assembly on type 20P .

5 Port Solenoid Valve, Series VQC

We use flat ribbon cables whose connectors (26P and 20P) conform to MIL standards, and are therefore widely compatible with many standard commercial models.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Electrical entry VQ2000 N3: 5/32" N7: 1/4" N9: 5/16" NM: Mixed Top entry Side entry Stations Note1) Kit Flat cable kit (20P) without cable JU0 JS0 2 to 8 (16) J kit G0 (VQ1000) GU0 (VQ2000) Flat cable kit (20P) with terminal block without cable G kit 2 to 8 (16) Note 1) Numbers inside ( ) indicate the maximum number of solenoids for mixed single/double wiring.

VQC

We use flat ribbon cables whose connectors (26P and 20P) conform to MIL standards, and are therefore widely compatible with many standard commercial models.

0.4

Polarity <26P> <20P> (15.6) L SOL.A SOL.A () (+) () (+) 1 1 Station 1 Station 1 SOL.B SOL.B () (+) () (+) 2 2 SOL.A SOL.A () (+) () (+) 3 3 Station 2 Station 2 Flat ribbon cable connector assembly SOL.B SOL.B () (+) () (+) 4 4 SOL.A SOL.A Cable length (L) Assembly part no. () (+) () (+) 5 5 Station 3 Station 3 SOL.B SOL.B 20P AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 26P AXT100-FC26-1 AXT100

Plug-in Unit

IP40 compliant Note) For a 20P flat ribbon cable, the cable assembly must be ordered separately.

0.4

Stations J kit (Flat ribbon cable) G kit (Flat ribbon cable with terminal block) P kit (Flat ribbon cable) F kit (D-sub connector) Cylinder port Kit U S A U S P 26P 20P J U S U S F 15P U S P 16P U S B P 20P U S C P A 10P F 25P G Type Negative common specifications Max. points 24 14 24 18 14 8 16 16 Electrical entry Cable length M kit (Circular connector) T kit (Terminal block box) S kit (

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type 20P (5 port / body ported) 10 SS5YJ5 20P-05 A, B port Applicable blanking plate assembly SYJ5000-21-3A Clean series P port 1/8 P, R port thread type Nil 00F 00N 00T Number of stations Rc G NPT NPTF 03 3 stations Applicable connector assembly Refer to page 526. : : R port 1/8 12 12 stations Type 41P (5 port / base mounted) How to Order 10 SS5YJ5 41P 05 M5 A, B port M5 x 0.8 Clean series

VQC

stations) Flat ribbon cable kit (26P) with 3.0 m cable 1 to 12 stations (24 stations) Lead wire kit (25 core) 1.5 m lead wire Multiple connector kit (26P) with 1.5 m cable 1 to 12 stations (24 stations) Flat ribbon cable kit (26P) with 5.0 m cable Lead wire kit (25 core) 3.0 m lead wire Multiple connector kit (26P) with 3.0 m cable 1 to 9 stations (18 stations) PDC Flat ribbon cable kit (20P

5 Port Solenoid Valve Series SQ1000/2000

49.5 47 10.3 L1 M5: External pilot port Indicator light P = 11.5 19.2 47.8 25 20.5 1.5 1.5 Manual override (mounting hole dimension) 113 {double (double solenoid) dual 3 port valve} 108.5 {single, double (latching)} 34 10 4.6 122 (3 position) (108.5) A A A B A B A 2.PUSH 2.PUSH 94 1.TURN 1.TURN B 74.5 28 5.5 35 13 Approx. 10 2-M4 clamping screw Applicable connector: Flat cable connector (20P

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

How to Order Applicable solenoid valve Refer to the p.1.2-41. 20P Type (5 Port/Body ported) SS5YJ5--20P-05 A, B port Applicable blank plate assembly SYJ5000-21-3A P port Rc(PT) Stations 1 8 3 stations 03 SY : : Applicable connector assembly Refer to the p.1.2-41. 12 stations 12 R port Rc(PT) SYJ 1 8 41P Type (5 Port/Base mounted) How to Order SS5YJ5--41P-05 --M5 SX VK A, B port M5 X 0.8 Stations

SYJ3000/5000/7000

Round head combination screw M2.5 x 7, Matt nickel plated (with spring washer) Blanking plate SYJ5000-21-1 Blanking plate SYJ5000-21-1 Gasket DXT192-10-15 Gasket DXT192-10-15 Caution Mounting screw tightening torques Applicable manifold base Type SS5YJ5-20 Type SS5YJ5-40 Type SS5YJ5-41 Type SS5YJ5-42 Type SS5YJ5-43 Dust cap SY3000-42-1 M2.5: 0.45 Nm Applicable manifold base Type SS5YJ5-20P

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Round head combination screw M2.5 x 7, Matt nickel plated (with spring washer) Blanking plate SYJ5000-21-1 Blanking plate SYJ5000-21-1 Gasket DXT192-10-15 Gasket DXT192-10-15 Caution Mounting screw tightening torques Applicable manifold base Type SS5YJ5-20 Type SS5YJ5-40 Type SS5YJ5-41 Type SS5YJ5-42 Type SS5YJ5-43 Dust cap SY3000-42-1 M2.5: 0.45 Nm Applicable manifold base Type SS5YJ5-20P

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Made to Order

CQ2 series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 L B + Stroke S1 L B + Stroke S2 L L B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of bore sizes 12 to 25 with auto switch, port directions are different.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.