CL

100 157.5 110 414.5 133 437.5 433 456 112 180.5 110 133 197 106 468 489 118 120 141 3.1-56 Lock-up Cylinder/Double Acting Single Rod Series CL1 Rear Flange/(G) A Lock-up at piston forward B Lock-up at piston backward CL MLGC CNA CB CV/MVG CXW CXS CXT MX MXU MXS MXQ MXF MXW MXP MG MGP (mm) MGQ Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 FT GA FX BF EA B1 BF BX BY C D FY FZ FV

Environment

Y PA Vent hole Note 5) H thread depth C Rod operating range Note 1) PB G OA FV EV J PC [2] 2 Origin Note 2) [Stroke end] Stroke end Note 3) [Origin] M D K Note 4) A + Stroke W B + Stroke Stroke L U 4 x O1 thread depth R FH EH M 6 x MO thread depth MR XA H9 depth XA MH Section XX details MA ML + Stroke MC MD Section XX XB XA H9 XA [mm] Size Stroke range [mm] A B C D EH EV FH FV G H J K L Without

A

84 8 50 ~ 1000 20 ~ 1000 32 35 70 52 20 40 17 17 M 8 x 1.25 7 11 M 18 x 1.5 30 3/8 90 0 63 ~ 1000 20 ~ 1000 32 35 85 64 20 40 17 17 M 10 x 1.25 7 14 M 18 x 1.5 31 3/8 98 0 80 ~ 1000 20 ~ 1000 37 40 102 78 25 52 21 21 M 12 x 1.75 11 17 M 22 x 1.5 37 1/2 116 0 100 ~ 1000 20 ~ 1000 37 40 116 92 30 52 21 21 M 12 x 1.75 11 17 M 26 x 1.5 40 1/2 126 0 Without gaiter With gaiter Bore Size (mm) FV

CATALOG

84 8 50 ~ 1000 20 ~ 1000 32 35 70 52 20 40 17 17 M 8 x 1.25 7 11 M 18 x 1.5 30 3/8 90 0 63 ~ 1000 20 ~ 1000 32 35 85 64 20 40 17 17 M 10 x 1.25 7 14 M 18 x 1.5 31 3/8 98 0 80 ~ 1000 20 ~ 1000 37 40 102 78 25 52 21 21 M 12 x 1.75 11 17 M 22 x 1.5 37 1/2 116 0 100 ~ 1000 20 ~ 1000 37 40 116 92 30 52 21 21 M 12 x 1.75 11 17 M 26 x 1.5 40 1/2 126 0 Without gaiter With gaiter Bore Size (mm) FV

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

JIS Standard Hydraulic Cylinder

. +0.07 0 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 CHQ +0.07 0 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 CHK B-series +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 CHN H 0.1

Round Type Hydraulic Cylinder

Size Tolerance +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 +0.3 +0.1 +0.058 0 +0.058 0 +0.070 0 +0.070 0 With CDP-3 0.013 0.035 0.013 0.035 0.016 0.043 0.016 0.043 AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 Y-020B Y-032B Y-04D Y-04B 9 9 16 16 9 9 12 12 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 10 10 12 12 3.2 3.2 4 4 16 18 22 22 36 38 55 55 20 25 32 40 5 5 13 13 20 20 24 24 14 14 25 25 18 18 38 38 M8 x 1.25

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Example (10-SV1000) Double solenoid 10-SV1200-5FU (2 sets) Single solenoid 10-SV1100-5FU (2 sets) Manifold 10-SS5V1-W10S1NAND-04B-C6 (1 set) U side D side 10-SS5V1-W10S1NAND-04B-C61 set (Manifold part no.) 10-SV1100-5FU2 sets (Single solenoid part no.) 10-SV1200-5FU2 sets (Double solenoid part no.)

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

box 2(B), 4(A) port size Air release valve None With silencer box Nil 3/8 (Right side) 1/2 (Right side) 3/8 (Left side) 1/2 (Left side) 3/8 (Bottom) 1/2 (Bottom) Mixed 03R None With air release valve Nil SB 04R E 03L Thread type 04L 03Y Rc G NPTF Nil 04Y F 1(P), 3(R2), 5(R1) port size T 1/2 (Down side) 1/2 (Up side) 1/2 (Both sides) 3/4 (Down side) 3/4 (Up side) 3/4 (Both sides) 04D 04U 04B

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

115 325 60 57 45 15 41 100 310 M39 x 1.5 17 Series CH2E/CH2F/CH2G/CH2H JIS Standard Hydraulic Cylinder Double Acting: Single Rod Accessories (Optional) Single knuckle joint Material: Cast iron Rod series Bore size (mm) Part no. d H A B C D E F J K + 0.07 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1 0 + 0.1 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1 0 + 0.1 0 32 40 50 63 80 100 40 50 63 80 100 IH2-03B IH2-04B

Round Type Low Pressure Hydraulic Cylinder Series CH
M

shaft 3 x 18l 3 x 18l Size Tolerance -0.013 -0.035 -0.013 -0.035 -0.016 -0.043 -0.016 -0.043 AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 3.2 3.2 4 4 10 10 12 12 +0.058 0 +0.2 +0.1 Y-02 14 5 20 18 M8 x 1.25 36 16 9 3.2 x 16l 20 CDP-1 9 +0.058 0 +0.2 +0.1 Y-03 14 5 20 18 M10 x 1.25 38 18 9 25 CDP-1 9 4 x 20l +0.3 +0.1 +0.3 +0.1 +0.070 0 +0.070 0 Y-04A Y-04B

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R L 4 5 8 10 ZZM Stations 06 6 8 10 10 ZZM Stations 06B R L 4 5 8 10 ZZM Stations 04 6 8 10 10 ZZM Stations 04B Effective area of external silencer is 160 mm2.

VQ7-6/7-8

Rc1/2 (bottom) Rc1/2 (top) Rc1/2 (both sides) Rc3/4 (bottom) Rc3/4 (top) Rc3/4 (both sides) 04D 04U 04B 06D 06U 06B Air release valve Without With air release valve Nil E Manifold specifications Piping specifications Applicable solenoid valves Manifold block size Weight kg Stations 2 (B), 4 (A) port size 1 (P), 3 (R2) 5 (R1) port size ISO size 2 VQ7-8 ISO size 2 series Max. 10 stations 0.96n

CLA

;troke RT RY B M FT FX FV FZ faore size rS;'; rang~ f, (mm) w:''';'' I With 40 -::sao lOa 50 _100( rm::lOOi IGA J IK LZ M MM ,n9l" ot A B lOB BN BP BO loc 00 oE GA GB GC GO GL .63 :-;aoo , ..1iinr I -th;~ 27 I 3( 71 160 196 y. y, f44 16 32 IsS 15 26 54 1( X> 35 81 70 loa y, v, ' 52 2( 40 I 95 17 I 27 59 13 10 I M8X .25 6 71 I M41 Xt. 5 12 I M8Xl .25 7 I ao I MlaXt.5 15 IM10XHl I 99 ' 14 I

CV/MVGQ

Long stroke 10-15-56 57 Valve Mounted Cylinder Double Acting, Single Rod Series CV3 Rod Side Flange Style: CV3F Lube type (CV3F), Non-lube type (CV3FN) With rod boot Throttle valve Width across flats KA RE A B Manual button REC l l + ZZ + l + Stroke CX S + Stroke ZZ + Stroke CY MQQ M Stroke range (mm) A Bore size (mm) AL B B B1 C E D FD FT FV FX FY H1 I J K FZ Up to 500 501 to 800

CV/MVGQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AL B B B1 C E D FD FT FV FX FY H1 I J K FZ Up to 500 501 to 800 Up to 600 601 to 1000 Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 RHC 40 50 63 80 100 30 35 35 40 40 22 27 27 32 41 60 70 85 102 116 71 81 101 119 133 27 32 32

RZQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Front flange style: RZQF MK(2) RS Q G Flange Style (mm) FV M Bore size (mm) RS H A AR AH B FD FT FV FX 32 100.5 108.5 56 82.5 5.5 8 50 RZQ 40 110 118 62 92 5.5 8 56 L B + Full stroke FX FZ AR + Full stroke MI W S 50 76 118.5 127.5 96.5 6.6 9 67 63

MU

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RQ MU D-X 20Data ZZ + Stroke (mm) ZZ 99 106 114 139 145 FZ 24 28 32 39 50 FY 66 82 102 126 148 FX 14 16 18 22 30 FV 76 94 118 144 168 FT 8 8 9 12 14 FD 5.5 7 9 11 13 Model MUF25, MUG25 MUF32, MUG32 MUF40, MUG40 MUF50, MUG50 MUF63, MUG63 Single clevis

MLU

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-FD CNA CNS CLS FY FV CLQ (mm) MLGP FV FT ZZ MLUF25, MLUG25 MLUF32, MLUG32 MLUF40, MLUG40 MLUF50, MLUG50 FX 76 94 118 144 FY 14 16 18 22 FZ 66 82 102 126 FD Model FT 8 8 9 12 24 28 32 39 5.5 7 9 11 134 148 158 189.5 FZ FX RLQ 2-FD MLU Rear flange style

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEJ LL LEL LEM FV M M FV LEY Included parts Flange Body mounting bolt FZ FX 4 x FD FT FT FZ FX 4 x FD LES LEPY LEPS Rod/Head Flange [mm] Size FD FT FV FX FZ LL M LER 25 5.5 8 48 56 65 6.5 34 32 5.5 8 54 62 72 10.5 40 63 9 9 80 92 108 28.4 60 LEH LEY -X5 Material: Carbon steel (Nickel plating) * The LL measurement is when the unit is in the Z-phase first detecting position.