VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

AC

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal Regulator ARM2500-A-02 ARM2500-A-02 ARM3000-A-02 ARM3000-A-02 Regulator 1 o !0 !1 !2 Replacement Parts End plate R 1 Description Material Part No. End plate L 1 No.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

02 VFN Y: 120.5 D: 121 3-Rc 1/4, 1/8 (P , A, B port) Manual override (Non-locking) 3-Rc 1/4, 1/8 (P , A, B port) Manual override (Non-locking) (Mounting hole for manifold) (Mounting hole for manifold) Applicable cable O.D. 6 to 8 Applicable cable O.D.

VM

4 Rubber y POM Piston A !5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

4 3 position exhaust center 10-SY7000 02 02 03 1 4 S 5 VDC 5 3 position pressure center Note 1) : Enter a symbol for cable length.

VM

4 Rubber y POM Piston A !5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !

Table of Contents

B C D J K Y A J K B Y C D Misc.

VM

Push Button (Mushroom)/VM220-02-30R, B, G, Y/VM230-02-30R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 52N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T. 3.5-22 VM200 Series VM200 Push Button (Extended)/VM220-02-32R, B, G, Y/VM230-02-32R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 52N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T.

ZP3

w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

VFR

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

Proposals for Energy Saving

06 VM230-02-06S Polyacetal roller Hard steel roller Cross roller plunger VM230-02-07 VM230-02-07S Toggle lever VM230-02-08 VM-30AR Red VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM-30AG Green VM-30AY Yellow VM-32AR Red VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y Push button (Extended) VM-32AB Black VM-32AG Green VM-32AY Yellow A set of

ZP

Flat Type Model A B C Y q Pad dia.

KJ

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

Speed Controller with Indicator

Dimensions: Elbow Type Seal method: Gasket seal For M5, 10-32UNF Indicator window direction: 0 Indicator window direction: 180 Y W2 X D3 W1 Applicable tubing O.D. d L3 A L4 D1 T L2 L1 M H (Width across flats) Metric Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS12l1FSGl-M5-02 2 5.8 15.8 20.3 11.9 AS12l1FSGl-U10/32-02 AS12l1FSGl-M5

Vacuum Pad

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

SY

C4: A, B ports 4 One-touch fitting C6: A, B ports 6 One-touch fitting C8: A, B ports 8 One-touch fitting (Gasket y is included.)

CG5-S

Yellow (Y) Yellow (Y) T1613 is on a reel.

VQZ1000/2000/3000

(R2), 4(A), 5(R1) port M5 x 0.8 external pilot port (Only external pilot type (R)) 2.1 28 3 4 5 3 4 5 DIN terminal (Y): VQZ2 50 1(R)-Y-01 02 L plug connector (L): VQZ2 50 1(R)-L-01 02 Indicator light 300 149.5 (Lead wire length) 68 Pg.7 Applicable cable O.D. 3.5 to 7 51.5 <56.5> 155.5 Max. 10 71.5 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 82.5 75 0 1 3 4 5 01 02 M

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44