Body Size: 50, Backflow: w/Backflow Function, Thread: NPT, Port Size: 3/4, Options: w/o Mounting Option, Set Pressure: 0.02 to 0.2 MPa Setting, Exhaust Mechanism: Non-relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale, Made to Order: -

Body Size: 50, Backflow: w/Backflow Function, Thread: NPT, Port Size: 3/4, Options: w/o Mounting Option, Set Pressure: 0.02 to 0.2 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale, Made to Order: -

Body Size: 50, Backflow: w/Backflow Function, Thread: NPT, Port Size: 3/4, Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Non-relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale, Made to Order: -

Body Size: 50, Backflow: w/Backflow Function, Thread: NPT, Port Size: 3/4, Options: w/o Mounting Option, Set Pressure: 0.02 to 0.2 MPa Setting, Exhaust Mechanism: Non-relieving Type, Flow Direction: Right to Left, Knob: Upward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale, Made to Order: -

Body Size: 50, Backflow: w/Backflow Function, Thread: NPT, Port Size: 3/4, Options: w/o Mounting Option, Set Pressure: 0.02 to 0.2 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Right to Left, Knob: Downward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale, Made to Order: -

Body Size: 50, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 06 (3/4), Options: w/o Mounting Option, Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: Relieving Type, Flow Direction: R (Right to Left), Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 50, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 06 (3/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 50, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 06 (3/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 50, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 06 (3/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: R (Right to Left), Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Table of Contents

25 25 X (PE) port 1/8 A, B port 2-/4, 3/8 9 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 Y(PE) port 2 position double : VQ7-6-FG-D double (Reverse pressure): VQ7-6-YZ-D 3 position closed center : VQ7-6-FHG-D exhaust center : VQ7-6-FJG-D pressure center: VQ7-6-FIG-D 155 145 68.5 86.5 76.5 68.5 50 50 50 50 13 (A port) 13 (B port) 13 (A port) 13 (B port) Manual override Manual override A B A B B B

VFS

VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

V100

Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

VQ7-6/7-8

) 2 position/Double : VQ7-6-FG-D-SC Double (reverse pressure): VQ7-6-YZ-D-SC 3 position/Closed center : VQ7-6-FHG-D-SC Exhaust center : VQ7-6-FJG-D-SC Pressure center : VQ7-6-FIG-D-SC 145 86.5 155 68.5 76.5 50 50 68.5 50 50 Manual override 13 (port A) 13 (port B) Manual override 13 (port A) 13 (port B) B A B A 62 38 50 38 50 62 A B A B Prewired connector (M12) (L approx. 500) R1 R2 P Prewired

Model: AR50, AR50K, AR60, AR60K

VQ7-6/7-8

25 25 X (PE) port 1/8 A, B port 2-/4, 3/8 9 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 Y(PE) port 2 position double : VQ7-6-FG-D double (Reverse pressure): VQ7-6-YZ-D 3 position closed center : VQ7-6-FHG-D exhaust center : VQ7-6-FJG-D pressure center: VQ7-6-FIG-D 155 145 68.5 86.5 76.5 68.5 50 50 50 50 13 (A port) 13 (B port) 13 (A port) 13 (B port) Manual override Manual override A B A B B B

VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

Special Applications: Clean Series, Body Size: 50, Reverse Flow: Reverse Flow Mechanism, Thread: NPT, Port Size: 06 [3/4 (Size 40, 50)], Accessory, Not Attached: G [Round Pressure Gauge w/o Limit Indicator (Size 20 to 60)], Option: Y+Z

Special Applications: 10-AR (Clean Series), Body Size: 50, Reverse Flow: K (Reverse Flow Mechanism), Thread: N (NPT), Port Size: 06 [3/4 (Size 40, 50)], Accessory, Not Attached: G [Round Pressure Gauge w/o Limit Indicator (Size 20 to 60)], Option: YZ (Y+Z)

VQZ1000/2000/3000

(M) B C A 0.90 1.3 (A) 4 Locking type (Tool required) 1 (P) 5 (R) DIN terminal (Y) DIN terminal (YZ) VQZ2000 N.C.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Rubber seal IP65 Option (Y, YZ only) W Standard IP65 rated Manual override B Non-locking push type (Tool type) Slotted locking type (Tool type) Electrical entry Light and surge voltage suppressor Electrical entry Symbol Grommet (DC specification) Without G L LO M MO Y YO YZ YOS L type plug connector with lead wire L type plug terminal without connector Function Standard type (1.0W) High