Cost effective and clean looking, series AR regulators offer various pressure range settings to accommodate most applications. The locking adjustment knob prevents accidental setting changes. The modular design of the AR series connects with other SMC air preparation equipment.Modular type regulator, Optional embedded pressure gauge , Available with built-in backflow mechanism , Knob is

VFR

Y YZ DIN terminal (DIN43650B type) 3-5-54 55 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR4000 Use as a guide for selection. Please confirm the actual conditions with SMC Sizing Program.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Rubber seal IP65 Option (Y, YZ only) W Standard IP65 rated Manual override B Non-locking push type (Tool type) Slotted locking type (Tool type) Electrical entry Light and surge voltage suppressor Electrical entry Symbol Grommet (DC specification) Without G L LO M MO Y YO YZ YOS L type plug connector with lead wire L type plug terminal without connector Function Standard type (1.0W) High

V

A N U A L O V E R R I D E Non Locking Push Type (Tool Type) B Slotted Locking Type (Tool Type) 5 Base Mounted B O D Y T Y P E E L E C T R I C A L E N T R Y L L Type Plug Connector with Lead Wire LO L Type Plug Terminal without Connector M M Type Plug Connector with Lead Wire MO M Type Plug Terminal without Connector Y DIN Connector (VQZ200/300) YO Terminal without Connector (VQZ200/300) YZ

VQZ1000/2000/3000

Y: DIN terminal (1) YO: DIN terminal (1) without connector YZ: DIN terminal (1) YOS: DIN terminal (1) without connector YS: DIN terminal (1) Body 5 Base mounted With surge voltage suppressor With surge voltage suppressor With light/ surge voltage suppressor Seal 0 1 Metal seal Rubber seal Note 1) Applicable to VQZ2000 and 3000.

HRX-OM-X084

Piping thread type : When N is selected, NPT thread adapter set will be added. 19: Not included for options Z is selected. 20Not included for options Z,Z1 is selected. 9.1 Specifications HRR Series 9-2 HRX-OM-X084 Chapter 9 Documents 9.1.2 HRR010-W-10/20Table 9-2 Specifications [HRR010-W-10/20-(DMT1)U(YZ)] Model HRR010-W-10-(DMT1)U(YZ) HRR010-W-20-(DMT1)U(YZ) Cooling method Water-Cooled refrigerated

VP300/500/700

DC EZ, TZ, DZ, YZ (100 VDC or more) EZ, TZ, DZ, YZ (100 VDC or more) Z EZ, TZ, DZ, YZ (24 VDC or less) Note) W/ surge voltage suppressor is available only for grommet type. 4-8-3 4 Series VP300/500/700 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2. Caution Change of Actuation Caution How to Use DIN Terminal 1.

A

AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125

Soft Start-up Valve AV2000/3000/4000/5000

AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125

Soft Start-up Valve AV2000/3000/4000/5000 1

AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 VY1 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 PPA 22 29 0 38

Table of Contents

AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 VY1 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 PPA 22 29 0 38

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Surge voltage suppressor (for D YS, D YZ) 2 locations 70 52 Light (for D YZ) 24.5 18 25.5 Bracket (Option) Pg7 18 83 Breathing hole (6.2) 48.6 42.2 90.4 41.9 Max.10 39.6 Manual override part 19.9 IN OUT OUT 2 1 IN EXH 3 EXH 40 2 x M5 x 0.8 thread depth 9 (for bracket mounting) Applicable cable O.D. 3.5 to 7 (24.5) 64.3 56.8 Details of manual override part (for manual operation) 38.5 7 Type

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VZ (Except VQZ100) VQZ300 DIN terminal (Y) DIN terminal (YZ) Locking type (Tool required) VS VFN Except VQZ100 ) ( 3.2 4.1 Except VQZ100 ) ( 4-14-21 Base Mounted 22 Series VQZ100/200/300 Precautions Be sure to read before handling. For Safety Instructions and Slenoid Valve Precautions, refer to page 4-18-2.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Locking type (Tool required) VQZ DIN terminal (YZ) (Except VQZ100) VQZ300 DIN terminal (Y) VZ Except VQZ100 ) ( VS 2.4 3.0 VFN Except VQZ100 ) ( 4-14-1 Body Ported 2 Series VQZ100/200/300 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2.

ED  
     

/ -. 2V 2@ NLTU + LPQR * # ) NO KLM ) % # ) (' => % < * * 1 234 / aZ[ aZ[ aZ[ aZ[ \] \] \] \] YZ[ YZ[ YZ[ YZ[ % &

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Position exhaust center L plug connector (L) (A) 4 (B) 2 VQZ3000 (standard) 12V DC 24V DC 5 (R1) 1 (P) 3 (R2) Base Mounted Non-locking push style (Flush) 3 Position pressure center 0.9 1.2 (A) 4 (B) 2 L plug connector (L) (Option) 100V AC 200V AC 110V AC 220V AC 5 (R1) M plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

suppressor VZ 3 Position exhaust center L plug connector (L) (A) 4 (B) 2 VF Non-locking push style (Flush) VQZ3000 5 (R1) 1 (P) 3 (R2) VFR (Standard) 12V DC 24V DC 3 Position pressure center 0.7 0.9 Body Ported L plug connector (L) (A) 4 (B) 2 VP7 1 (P) 3 (R2) 5 (R1) M plug connector (M) M plug connector (M) (Option) 100V AC 200V AC 110V AC 220V AC VP4 VQZ1000 0.15 0.3 (A) 4 VQ DIN connector (YZ

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VP 4 1 (P) 3 (R) VQ VQZ Y: DIN terminal YO: DIN terminal without connector YZ: DIN terminal YOS: DIN terminal without connector Body style VZ With surge voltage suppressor 5 Base mounted VS Function Note) Standard lead wire length: 300mm.

PSxx-OMT0005CN

( ) () CE -1060 * 2030 10 1% * -7No.PS-OMT0005CN-A 7 02 PSE57 / M12(3m) 5 (02MPa) L M12(3m) 6 (05MPa) N 7 (010MPa) (1~5V) 02 R1/4(M5) 28 (4~20mA) M12 3m ZS-37-A 1 M12 3m ZS-37-B 1 Rc1/4 ZS-31-X175 1 -8No.PS-OMT0005CN-A M12 C3604+AI203(96)FKM (Nm) R1/4 812 -9No.PS-OMT0005CN-A PSE570ZS-37-AZS-37-B ZS-37-A ZS-37-B 1 DC(+) 2 N.C. 3 DC(-) 4 -10No.PS-OMT0005CN-A DC(+) PSE57-02 15V

PFxx-OMK0003CN

PF-OMK0003CN-E FG DC(+) OUT() DC(-) 15V 1k -17No. PF-OMK0003CN-E DC(+)DC(+) (OUT1) IN (20 ) -18No.