VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

V

Indicate B in model no.

VQZ1000/2000/3000

(M) B C A 0.90 1.3 (A) 4 Locking type (Tool required) 1 (P) 5 (R) DIN terminal (Y) DIN terminal (YZ) VQZ2000 N.C.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Rubber seal IP65 Option (Y, YZ only) W Standard IP65 rated Manual override B Non-locking push type (Tool type) Slotted locking type (Tool type) Electrical entry Light and surge voltage suppressor Electrical entry Symbol Grommet (DC specification) Without G L LO M MO Y YO YZ YOS L type plug connector with lead wire L type plug terminal without connector Function Standard type (1.0W) High

HRX-OM-X084

Piping thread type : When N is selected, NPT thread adapter set will be added. 19: Not included for options Z is selected. 20Not included for options Z,Z1 is selected. 9.1 Specifications HRR Series 9-2 HRX-OM-X084 Chapter 9 Documents 9.1.2 HRR010-W-10/20Table 9-2 Specifications [HRR010-W-10/20-(DMT1)U(YZ)] Model HRR010-W-10-(DMT1)U(YZ) HRR010-W-20-(DMT1)U(YZ) Cooling method Water-Cooled refrigerated

VP300/500/700

0.31 0.26 0.27/0.33 0.29/0.41 0.35 0.42 0.36/0.34 0.29/0.30 0.29 0.23 0.18/0.23 0.19/0.18 b 0.34 0.27 0.31/0.30 0.31/0.25 0.41 0.43 0.36/0.41 0.41/0.42 0.36 0.25 0.27/0.27 0.26/0.28 b 0.47 0.40 0.38/0.40 0.57/0.21 0.34 0.36 0.30/0.26 0.17/0.14 0.31 0.22 0.25/0.24 0.24/0.23 b 0.38 0.28 0.37/0.37 0.25/0.23 0.42 0.43 0.35/0.32 0.22/0.21 0.36 0.29 0.25/0.24 0.22/0.24 VP342 (Body ported) 1/8 1

Table of Contents

Metal bowl VY1 Optional specifications B B B B B N.C.: Gray N.O.: Black B G B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 PPA Bracket mounting size Accessory specifications (mm) AL Standard specifications With pressure gauge With auto-drain Port size Model B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104

A

MADE IN JAPAN SMC SMC Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93

Soft Start-up Valve AV2000/3000/4000/5000

MADE IN JAPAN Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/

Soft Start-up Valve AV2000/3000/4000/5000 1

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

C A C A B VKF Body type Y: DIN terminal YO: DIN terminal Without connector YS: DIN terminal YZ: DIN terminal YOS: DIN terminal Without connector 5 Base mounted VQZ With surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor VZ VS Function Symbol Specifications DC (3) AC VFN (1.0 W) Nil Standard type Note) Standard lead wire length: 300 mm.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor Symbol Specifications DC (1.0 W) (3) AC VS Nil Standard type High pressure type (Metal seal only) B C A (1.0 W) K (1) C A B VFN (0.5 W) Low wattage type Y YZ: DIN terminal YOS: DIN terminal Without connector YS: DIN terminal Y: DIN terminal YO: DIN terminal Without connector External pilot type

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Center of F.R.L. body A D Silencer Compact resin type High noise reduction type B B A A Dimensions [mm] Model Port size R Dimensions [mm] A B AN302-03 3/8 84 28 AN402-04 1/2 95 34 Model Port size R A B AN30-03 3/8 58.5 20 AN40-04 1/2 68 24 3 Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve VP500/700 Series Dimensions VP517 Surge voltage suppressor (for D YS, D YZ) Manual

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

The "B"port can either be plugged or unplugged. Model Suitable tightening torque VQZ100 0.13 to 0.19Nm VQZ200 0.25 to 0.35Nm SY 5 port valve 3 port valve VQZ300 0.5 to 0.7Nm SYJ When port plug is used on B port, indicate "CM" in manifold part No. and port size, and supecify the port plug location on the manifold specification form.

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control Side

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control Side

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control Side

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control Side