Table of Contents

VFN Pilot type Nil R External pilot Internal pilot Plug-in VFR5000 P 06 Non plug-in VFS5000 S 06 Thread type Nil Rc Plug-in VFR5000 P B 06 G F N NPT Non plug-in VFS5000 S B 06 NPTF T Note) Bottom ported is not available for external pilot.

Speed Controller with Indicator

(32.8) AS221FS-02-08 (S) 8 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-10 (S) 10 15.9 26.9 36.2 (36.3) 15.6 25 (26) AS321FS-02-06 (S) 6 1/4 17 (17.5) 13 13.3 10.4 21.8 32.1 36.4 63.1 61.7 57.9 56.5 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-08 (S) 8 13.2 22.7 33 14.2 AS321FS-02-10 (S) 10 15.9 26.7 37 35.7 15.6 38 (39) AS321FS-02-12 (S) 12 18.5 29.7 40 34.5 17 50 (51) AS321FS-03-06 (S) 6 1/4

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

AC

AW4000 AL4000, AFM4000, AFD4000 3/8 33 35 42.2 1/2 50 35 42.2 3/4 AC400-06 AF4000-06, AR4000-06, AW4000-06 AL4000-06, AFM4000-06, AFD4000-06 3/4 E50-06 36 44 46.2 To order piping adapter with bracket, the parts number as shown below.

Table of Contents

Series VXF How to Order VXF 2150 06 1 G Solenoid type Normally closed VXFA 2150 06 Air operated type Option Nil S Standard With silencer Refer to the table (2) below for availability.

ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM 02 10.8 7 2 1.4 KQ2H02-M5N C2 04 14.7 8 4 2.5 KQ2H04-M5N ZP3 Y B3 02 10.8 7 2 1.4 KQ2H02-M5N 04 14.7 8 4 2.5 KQ2H04-M5N 06 10 6 KQ2H06-M5N Vacuum inlet: One-touch fitting 10 13 16 Applicable tubing O.D.

Built-in One-touch Fitting: One-touch Fitting, Thread: R, RC, Accessory: Pressure Gauge, Tube Size: Ø6 One-touch Fitting, Option: 0.2MPa Setting

Built-in One-touch Fitting: One-touch Fitting, Thread: R, RC, Accessory: Bracket, Tube Size: Ø6 One-touch Fitting, Option: 0.2MPa Setting + Sealant

Built-in One-touch Fitting: F (One-touch Fitting), Thread: R, RC, Accessory: B (Bracket), Tube Size: 06 (Ø6 One-touch Fitting), Option: 1 (0.2MPa Setting)

Built-in One-touch Fitting: F (One-touch Fitting), Thread: R, RC, Accessory: G (Pressure Gauge), Tube Size: 06 (Ø6 One-touch Fitting), Option: 1 (0.2MPa Setting)

Built-in One-touch Fitting: F (One-touch Fitting), Thread: R, RC, Accessory: G (Pressure Gauge), Tube Size: 06 (Ø6 One-touch Fitting), Option: 1S (0.2MPa Setting + Sealant)

Built-in One-touch Fitting: F (One-touch Fitting), Thread: R, RC, Accessory: None, Tube Size: 06 (Ø6 One-touch Fitting), Option: 1S (0.2MPa Setting + Sealant)

Built-in One-touch Fitting: F (One-touch Fitting), Thread: R, RC, Accessory: B (Bracket), Tube Size: 06 (Ø6 One-touch Fitting), Option: 1S (0.2MPa Setting + Sealant)

Built-in One-touch Fitting: F (One-touch Fitting), Thread: R, RC, Accessory: None, Tube Size: 06 (Ø6 One-touch Fitting), Option: 1 (0.2MPa Setting)

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: One-Touch Coupling Type, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: [R] R, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: One-Touch Coupling Type, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: [R] R, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: One-Touch Coupling Type, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: [R] R, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: One-Touch Coupling Type, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: [R] R, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type

smcmaintenancepartslist

6 Single acting, spring return Piston seal Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Gasket Left no. !4. Seal kit includes !4. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5