MXQ

x 16 M5 x 16 M5 x 12 4.4 4.4 4.4 M6 x 20 M6 x 18 M5 x 14 7.0 7.0 4.4 M8 x 20 M8 x 18 M6 x 18 18.0 18.0 7.0 Metal Stopper Caution 1.

Micro Mechanical Valve Series VM1000

Panel mounting hole T.T. 23 16.5 1.5 1.5 3 18.5 Max. 6 M5 x 0.8 (Pilot exhaust port) PE EXH.1 SUP.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

12.7 11 3 28.1 [35.1] P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors L plug connector (L): 10-SYJ5 23-L-M5 3 4 5 M plug connector (M): 10-SYJ5 23-M-M5 3 4 5 DIN terminal (D, Y): 10-SYJ5 23-M5 M8 connector (WO): 10-SYJ5 23-WO-M5 3 4 5 3 4 5 D Y Approx. 300 (Lead wire length) Applicable

Speed Controller with Indicator

: Universal Type Seal method: Gasket seal For M5, 10-32UNF AS-FS AS-FSG Uni-AS-FS Applicable tubing O.D. d Y W1 D3 D1 M L3 L4 L5 A D2 L2 L1 T H (Width across flats) Metric Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-23 3.2 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10-32/23 AS131FSG1-M5-04 4 8.2 11.5 19.8

A

x 0.8 M5 x 0.8 M5 x 0.8 Rc (PT) 18 Rc (PT) 18 Fluid Air Action Double Acting Op.

CJ2

(Refer to page 6-3-23.)

ZP

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

1

165 115 23 62.2 23 165 140 26 72.7 Specifications other than above are the same as standard type.

Tamper Proof and Flat Head Screw

Specifications Proof pressure 1.5MPa (218psi) Maximum operating pressure 1MPa (145psi) Minimum operating pressure 0.1MPa (14.5psi) JIS symbol 5 to 60C (23 to 140F) [with no freezing] Ambient and fluid temperature 10 rotations (8 rotations Note 1)) Number of needle rotations Applicable tubing material Note 2) Nylon, Soft nylon, Polyurethane Note 1) For types AS121F-M5, AS121F-U10/32, AS131F-M5

CQ2

Refer to p.2.3-23 for part No. of auto switch mounting brackets. 2.3-22 Compact Cylinder/Standard: Double Acting Double Rod Series CQ2W Style 12 16 20 25 32 40 50 63 80 100 Bore size (mm) Through hole (Standard) Mounting Both ends tapped Built-in magnet Pneumatic Air-hydro (1) M5 X 0.8 M5 X 0.8 M5 X 0.8 M5 X 0.8 M5 X 0.8 Rc(PT) 1/8 Rc(PT) 1/4 Rc(PT) 1/4 Rc(PT) 3/8 Rc(PT) 3/8 Screw-in style

AC

10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%F.S. 0.5%F.S. 16 0.9 25 1.4

C85

x 0.8 M4 x 0.7 74 16 4 17 16 23 14 58 4 12 12 19 5 3.5, 6.5 depth of counterbore 4 23.5 10 15 9.5 7 8 M5 x 0.8 M4 x 0.7 74 16 4 17 16 23 14 58 4 12 12 19 5 3.5, 6.5 depth of counterbore 4 23.5 12 18.3 10.5 10 10 M5 x 0.8 M6 x 1 88 20 6 20 21 5 26 16 67 5 16 16 25 6 4.5, 8 depth of counterbore 5 29.5 16 18.3 10.5 10 10 M5 x 0.8 M6 x 1 88 20 6 20 21 5 26 16 67 5 16 16 25 6 4.5, 8 depth of

Table of Contents

23 SE1-01-16/-17 I Z I Z SE1-01-16C/-17C Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port M5 x 0.8 depth

MY1

x 0.8 M5 x 0.8 Rc 1/16 Rc 1/16 Rc 1/8 G 14 12.5 16 19 23 NC 14 17.5 20 25 30.5 VV 10 12.5 16 19 23 PP 7.5 11.5 12 17 18.5 WW 7.5 10.5 12.5 16 19.5 QQ 9 11 16 16 24 XX 22 24 28 32 36 TT 9 10.5 14.5 16 20 RR 11 14.5 16 23 27 UU 10.5 12 15 16 22 SS 3 5 6 4 10.5 Model MY1B16G MY1B20G MY1B25G MY1B32G MY1B40G "P" indicates cylinder supply ports.

Hydraulic

Example: M5 x 50l 4pcs.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l 6.5 6.5 5 5 7.5 7.5 9.5 9.5 9 9 7.5 7.5 12.5 12.5 7-6-45 46 Series CQ2 Construction Spring extend Spring return Port size For M5 x 0.8 With boss in head side Rod end male thread Built-in One-touch fittings Courtesy

0.4

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97 130 152 31 42 86 108 119 141 100 87.5 75 125 150 175 50 62.5 125 112.5 137.5 162.5 98

Table of Contents

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

V

24 85.2 77.7 83.2 75.7 52.8 45.3 36.7 30.4 21 23 63 ASV510F-02-10S 10 R(PT)1/4 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 39.8 33.8 21 23 69 T H R E A D S E A L ASV510F-02-12S 12 R(PT)1/4 17 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 39.8 33.8 22 24 74 ASV510F-03-10S 10 R(PT)3/8 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 41.8 35.5 21 23 73 M3, M5 S 18 12 ASV510F-03-12S 12 R(PT)3/8

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

7.5 M5 x 0.8 (P, R port) 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector (WO): 10-SYJ34M-WO-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 646 for dimensions