Table of Contents

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01-07 23.9 31 21 21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 NAN110-N01 NAN110-N01 NAN200-N02 NAN200-N02 NAN110-N01 24 Q Q Q Technical Reference 35 19.4 Q Q Series VQZ100200300 Q 5 5

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

Dual Speed Controller with One-touch Fitting Series ASD 1

(Hexagon width across flats) H (Hexagon width across flats) D3 D3 L5 A1 A2 L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M Max.

ASD

AS Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 1/8" ASN ASD230F-U10/32-01 8.4 12 10-32 UNF 12.9 8 25.5 28.6 22.2 25.8 29.4 9.6 10 11.7 7.8 28.3 17.5 25 5/32" ASD230F-U10/32-03 9.3 13 3/16" AQ ASD330F-N01-05S 16.5 11.6 34.6 39.5 14 39.6 23.9 30 1/4" NPT1/8 ASD330F-N01-07S 17 13.2 42.2 25.6 12.7 36.1 27 31.1 14.2 11.8 10.6 32 33.9 38.9 15.8 31 5/16" ASV ASD330F-N01-09S 18.5 15.2 44.8 28.2 1/4"

ZP

How to Order ZP40 H N Pad unit Pad diameter Pad material Symbol Pad diameter 40 50 63 80 100 125 Symbol Material NBR Silicone rubber Urethane rubber FKM EPR 40 50 63 80 100 125 N S U F E Pad type Symbol Type Heavy-duty (Flat with rib) Heavy-duty (Bellows) H HB Dimensions: Pad Unit ZP H 40 50 ZP H ZP H 63 80 100 125 C C C 4.5 4.5 6 5.5 3.5 3.5 21 D 6 10 8 Y 11.5 3 7.5 A A A B B B 4 x 6 4 x

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Description Note Material AS3000 AS2000 Valve NBR/Brass o Valve NBR 14283 Spring Stainless steel 143022 i !0 Spring Stainless steel 14282 O-ring NBR 143023 o !1 Stainless steel M4 x 0.7 x 8 Cross-recessed head cap screw Cross-recessed head cap screw Steel wire M4 x 0.7 x 8 M3 x 0.5 x 6 !0 !2 NBR 14284 O-ring 143021 !1 15-9-41 3 Dimensions AS2000E/3000E 2-port size L7 Max. Min.

ZSE30A(F)/ISE30A

(Refer to Copy function on page 41.) 36 2-Color Display High-Precision Digital Pressure Switch ZSE30A(F)/ISE30A Series Dimensions Z/ISE30A(F) Piping specifications ZSE20 ISE20 ZSE30 ISE30 ZSE30 ISE30 01 N01 / ZSE40 ISE40 25 8 9.5 1.5 30 200.1 2 x M3 x 0.5 thread depth 4 Lead wire with connector ZSE10 ISE10 ISE70 M5 x 0.8 10 ZSE80 ISE80 200.1 30 01: R1/8 N01: NPT1/8 PS ISA3 Width across flats

Vacuum Pad: Ball Joint Type

(mm) Model A B C D F Y H I J K K Q: 4 Q: 6 ZPT10F10-0-A10 12 12.5 27 10 10 38.5 74.5 88.5 89.5 1.5 ZPT13F10-0-A10 39 23 Hexagon width across flats 13 15 13 1/8 (Rc, NPT, NPTF) 10.5 13 27.5 75 89 90 2 ZPT16F10-0-A10 18 16 M14 x 1 Additional Dimensions by Stroke (mm) Hexagon width across flats 19 H I J K Stroke 20 +38 +10 5 5 D C +28 30 +48 +20 I 40 +84 +30 +54 50 +94 +40 J H F Width across

Size: 1/8, 1/4 Basis, Thread: G, Port Size: 1/4, Option: H [High Temperature (-5 to 80°C)], Lock Nut: -

Size: 1/8, 1/4 Basis, Thread: NPT, Port Size: 1/4, Option: H [High Temperature (-5 to 80°C)], Lock Nut: -

Size: 1/8, 1/4 Basis, Thread: Rc (Metric thread, M3, M5), Port Size: 1/4, Option: H [High Temperature (-5 to 80°C)], Lock Nut: -

Size: 1/8, 1/4 Basis, Thread: Rc (Metric thread, M3, M5), Port Size: 1/8, Option: H [High Temperature (-5 to 80°C)], Lock Nut: -

Size: 2 (1/8, 1/4 Basis), Thread: F (G), Port Size: 02 (1/4), Option: H [High Temperature (-5 to 80°C)]

Size: 2 (1/8, 1/4 Basis), Thread: N (NPT), Port Size: 02 (1/4), Option: H [High Temperature (-5 to 80°C)]

Size: 2 (1/8, 1/4 Basis), Thread: Rc (Metric thread, M3, M5), Port Size: 02 (1/4), Option: H [High Temperature (-5 to 80°C)]

Size: 2 (1/8, 1/4 Basis), Thread: Rc (Metric thread, M3, M5), Port Size: 01 (1/8), Option: H [High Temperature (-5 to 80°C)]

100

Model GZ33-K1K-01-X56 GZ33-P1C-N01-X55 Pressure unit kPa inHg/psi dual scale Pressure range 100 to 100 kPa 30 inHg to 14 psi Connection thread R1/8 NPT1/8 Accuracy Vacuum 3% F.S., Positive pressure 5% F.S.