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NOTES: r Split ranging allows position control using 3 to I psi or 9 to 15 psi as signal pressure Within 0.5% for each 7.5 osi Within 1% for each 1.5 psi Within 0.5% for each 1.5 psi Within 0.5% for each 1.5 psi Within 0.3% for each 1.5 psi " For 1/2 split range add 1.5% to these values Use clean, dry, oil free air Recommended for air preparation: NAC 2030-N02 or NAC 2040-N02 filter, coalescer

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

() CE 0~50 -8No.PF-OMJ0005CN-I * 3 (20 ) LED * OUT * 23% -9No.PF-OMJ0005CN-I 7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/4, Option: With Seal, Types

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/4, Option: With Seal, Types of Screw: NPT, Applicable Tube O.D.

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/4, Option: With Seal, Types of Screw: NPT, Applicable Tube O.D. mm

Size: 1/8, 1/4 Basis, Style: Elbow, Control Method: Meter-in, Thread: NPT, Port Size: 1/4, Tube Size: 5/32", Option: Sealant, Lock Nut: J (Round)

E l e c t r i c a l c a b l e m u s t n o t b e s u b j e c t e d t o excessive force. 2 When connecting the switch, use a spanner on the h e x a g o n f i t t i n g . N E V E R u s e t o o l s o n t h e s w i t c h body. 3 Do not use switch near corrosive materials. 4 The switch is not liquid sealed.

-J 1000 2000 3000 * P ease v sil our SMC homepage illpj,\i/rvw.smcwo d.com lor lhe atesl dela ls on our CE compl anl products.

. : j 1w301 Minimum supply pressure Set pressure + 0.1MPa Maximum supply pressure 0.2MPa 1.0MPa Regulating pressure rang 0 005 to 0.1 MPa 0.005 to 0.5MPa | 0.005 to 0.9MPa Voltage 24YDC !

M D1 D2 L1 L2 Nylon Urethane KQ2K04-M5 KQ2K04-M6 KQ2K04-01S KQ2K04-02S KQ2K06-M5 KQ2K06-M6 KQ2K06-01S KQ2K06-02S KQ2K06-03S KQ2K08-01S KQ2K08-02S KQ2K08-03S KQ2K10-01S KQ2K10-02S KQ2K10-03S KQ2K10-04S KQ2K12-02S KQ2K12-03S KQ2K12-04S KQ2K16-03S KQ2K16-04S M5 X 0.8 M6 X 1.0 14.5 4 5 10 19 6 5 12 10 33 13 21 35 25 26 36 63 28 38 65 52 58 8 8 26 15 20.5 24.5 14.5 15 20.5 24.5 26.5 4 10.4 3.4

(mm) Connection thread R Model L1 L2 D1 Applicable tubing KRW06-02S KRW06-01S 1 8 26 41 67 30 47 74 66 76 145 10 42.5 40 46 48 43.5 49.5 51.5 56.5 58.5 65 57.5 59.5 66 10 20 48 46.5 1 4 17 4.0 14 17 12 14 17 12.8 6 8.6 KRW06-03S 47 14.2 3 8 1 8 KRW08-01S KRW08-02S KRW08-03S KRW10-02S KRW10-03S KRW10-04S KRW12-02S KRW12-03S 1 4 3 8 1 4 3 8 1 2 1 4 3 8 51 52.5 59.5 61 66 62 63.5 15.2 12 23

D L M Weight (g) A Nylon Urethane M5 0.8 12.7 3.4 2.9 KQ2H23-M5 KQ2H23-01S KQ2H23-02S KQ2H04-M5 KQ2H04-M6 KQ2H04-01S KQ2H04-02S KQ2H06-M5 KQ2H06-M6 KQ2H06-01S KQ2H06-02S KQ2H06-03S KQ2H08-01S KQ2H08-02S KQ2H08-03S KQ2H10-01S KQ2H10-02S KQ2H10-03S KQ2H10-04S KQ2H12-02S KQ2H12-03S KQ2H12-04S KQ2H16-03S KQ2H16-04S 2 9 16 2.4 2.5 9 16 3.3 3.4 16 14 27 21 19 26 19 30 30 53 42 34 51 61 47 Reference

KQ2U09-01S KQ2U09-02S KQ2U09-03S KQ2U11-02S 1 4 13.2 13.2 17 3 8 45 48.5 49.5 50 54 17 1 8 1 4 3 8 5 16 15.2 15.2 6 18.5 17 1 4 3 8 KQ2U11-03S 17.9 17.9 54.5 19 43 56 31 3 8 21 7 1 2 1 4 KQ2U11-04S KQ2U13-02S 56.5 58.5 22 Connection thread (With seal) 1 2 9.5 22 3 8 KQ2U13-03S 21.7 21.7 59 41 68 22 1 2 KQ2U13-04S 60.5 Reference dimensions after R thread installation.

L A D KRH06-02S KRH06-01S 1 8 10.8 15.8 27.8 21.9 19.9 26.9 20.3 12 20.5 24.5 1 4 18.5 19 19 5.7 6 14 17 15.5 25 3 8 1 8 KRH06-03S 26 18.0 KRH08-01S KRH08-02S KRH08-03S KRH10-01S KRH10-02S KRH10-03S 30 28.5 25.5 32 35.5 31 29 36.5 35 32 Reference dimensions after R(PT) thread installation. 14 1 4 3 8 1 8 1 4 3 8 22.5 19 28 29.5 24.5 17 8 20.5 17 17 20.8 31.3 29.5 10 23 1 2 KRH10-04S 21 54.3

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 303, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/8, Option: With Seal, Types

AS: AS, Body Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: N (NPT), Port Size: 01 (1/8), Applicable Tube OD: 03 (5/32"), Option: S (Sealant)

(mm) Model KQGL04-00 KQGL06-00 KQGL08-00 KQGL10-00 KQGL12-00 4 6 8 10 12 KQGH04-M5 KQGH04-01S KQGH06-M5 KQGH06-01S KQGH06-02S KQGH08-01S KQGH08-02S KQGH08-03S KQGH10-02S KQGH10-03S KQGH12-03S KQGH12-04S M5 4 R1/8 M5 6 R1/8 R1/4 Male Branch Tee Male Branch Tee R1/8 8 R1/4 Applicable tubing O.D.

M D2 L A D1 M5 X 0.8 M6 X 1.0 36.5 KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S 9 12 37 33 8 16 10.4 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 12 8 6 17 14 12.8 1 8 1 4

M D2 L A D1 NPT, R(PT) Nylon Urethane M5 0.8 M6 1.0 KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S 36.5 9 12 37 33 8 16 10.4 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 1 8 M5 0.8 M6 1.0 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 12 2.5 3 4.0 4.0 5.6 5.6 12 8 6