Compact Manifold Regulator Series ARM5

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

Metal Seal/Rubber Seal Series VQ Body Ported

VVQ1000-3A-3Option Nil: Common exhaust S: Built-in silencer, direct exhaust Electrical entry F: For F kit P: For P kit J: For J kit L: For L kit S: For S kit VQZ VQD Applicable for L kit only The housing assembly and SI unit of F/P/J/S kit are not included. Separately place an order for q, w, and e. The !

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS131FM-M5-23 AS131FM-M5-04 AS131FM-M5-06 AS231FM-01-23 AS231FM-01-04 AS231FM-01-06 AS231FM-01-08 AS231FM-02-04 AS231FM-02-06 AS231FM-02-08 AS231FM-02-10 3.2 19.8 8.4 17.5 28.7 12.7 M5 x 0.8 8 8 4 20.3 33.8 28.8 30.1 25.1 9.3 9.6 9.3 10.8 6 21.4 20.6 31.8 13.5 11.6 3.2 24.4 8.4 17 17.5 30.9 12.7 9.3 13.1 4 24.9 9.3 35.2 30.2 32.1 27.1 12 R 1/8 14.2 18 22.9 36.3 13.5 10.9 6 14 26.9 11.6 21

V

Wiring Specs 16 16 Applicable up to 16 Solenoids 10 Pole (PH) Connector Symbol Station Note 02 2 Single .. .. Wiring Specs 08 08 Applicable up to 8 Solenoids 26 Pole (P) Connector Symbol Station Note 02 2 Single .. ..

AC Servo Motor Driver (Pulse input type/Positioning type ）

Table 5.10 Selectable input devices Setting Input device (Note 1) value P S T 02 SON SON SON 03 RES RES RES 04 PC PC 05 TL TL 06 CR 07 ST1 RS2 08 ST2 RS1 09 TL1 TL1 0A LSP LSP LSP (Note 3) 0B LSN LSN LSN (Note 3) 0D CDP CDP 0E CLD 0F MECR 20 SP1 SP1 21 SP2 SP2 22 SP3 SP3 23 LOP (Note 2) LOP (Note 2) LOP (Note 2) 24 CM1 25 CM2 26 STAB2 STAB2 Note 1.

Table of Contents

F (mm) Weight (g) 65 72 81 91 97 112 Port B Min. port size L2 L3 L4 L5 L6 P Q1 Q2 M L1 KM12-04-02-6 6 17 40 89 110 99 125 108 139 1 4 6 4 10 18 29.5 19.5 29 10.6 16 12 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 61.5 47 1 4 17 7.5 6 10 19.5 31.5 21.5 31 13 17 13.5 73 55 3 8 19 9 8 11.5 22.5 35.5 24 34.5 15.5 18.5 14.7 86 Dimensions: KM13 Applicable tubing

Vacuum Unit

P With manifold common release pressure supply (PD) port Cannot be selected when e is J When J is selected for e, install the release valve or vacuum breaker in the middle of the vacuum piping. u Vacuum (V) port W With exhaust interference prevention valve Exhaust interference prevention valve Symbol Vacuum (V) port 06 6 08 8 07 1/4" 09 5/16" 5 When more than one option is selected, list

NCG/CG1

Applicable bore (mm) 20 25, 32 40 50, 63 80 100 H1 B1 d C D NT-02 NT-03 NT-G04 NT-05 NT-08 NT-10 5 6 8 11 13 16 (15.0) (19.6) (21.9) (31.2) (37.0) (47.3) 12.5 16.5 18 26 31 39 13 17 19 27 32 41 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 l mm Material: Carbon steel Part no.

7.5

Flat ribbon cable (10 pins) Symbol Stations 02 09 Symbol Stations 02 04 2 stations 9 stations 2 stations 4 stations Non-polar type, with plug (24 VDC) SJ3A6-5CU-DP (4 sets) SUP/EXH block (D side mounting) J: Flat ribbon cable (PC wiring) S6B: EX510 serial transmission Symbol Stations 02 08 Symbol Stations 02 08 2 stations 8 stations 2 stations 8 stations 1 3 2 D side U side Stations G: Flat

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

18.5 25.2 18.5 34.5 34.9 34.4 29.4 39.9 34 34 13.2 18.5 (17.5) AS221F-02-10 AS221F-02-09 10 5/16" 18.3 44.5 35.3 18.5 21 27.2 21 36.4 18.2 36 36 15.2 1/4 1/4 AS321F-02-06 AS221F-02-11 6 3/8" 12.8 17 35.3 21 18.8 44.5 27.8 36 60 18.5 39.3 AS321F-02-08 AS321F-02-07 8 1/4" 15.2 18.5 27.8 17 41 29.5 39.3 63 13.2 60 48.3 43.3 42.8 37.8 21.3 23 AS321F-02-10 AS321F-02-09 10 5/16" 23 18.5 21 43.3

Compact and Lightweight

One-touch One-touch One-touch 06 01 08 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH10DA07 07 09 One-touch One-touch One-touch 07 N01 09 One-touch Screw-in One-touch N01 N01 N01 Screw-in Screw-in Screw-in ZH13DA08 10 10 One-touch One-touch One-touch 08 02 10 One-touch Screw-in One-touch 01 02 02 Screw-in Screw-in Screw-in ZH13DA09 11 11 One-touch One-touch

ZP

Material ZQ Series ZPY Without buffer ZPY U N 02 N4 A5 ZF ZP Mounting thread (Refer to Table (2) for applications.) Pad diameter (mm) 02 04 2 4 ZCU Vacuum entry port (Refer to Table (2) for applications.) 06 6 AMJ 08 8 10 10 Misc. 13 13 Table (2) Vacuum Entry/Mounting Thread Diameter 16 16 Thread dia.

LEC-OM07605CN

0.01 0.02 0.02 1 [J] 5.6 22 64 [J] 56 220 640 (5) [] 2.5 1.2 0.9 (3) [] 20 1 [J] 5.6 22 64 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Supplied regenerative resistors or regenerative option is used with the servo amplifier of 11 kW to 22 kW. 01: FR-BU2/FR-RC/FR-CV 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50 (Cooling fan is required) 08: MR-RB31 09: MR-RB51 (Cooling fan is required) 0B: MR-RB3N 0C: MR-RB5N (Cooling fan is required) FA: When the supplied regenerative resistors or the regenerative option is

JXCx-OMT0023

Setting Control modes (Note 1) P S T CP/CL 00 01 For manufacturer setting (Note 2) 02 SON SON SON SON 03 RES RES RES RES 04 PC PC PC 05 (Note4) EM1 EM1 EM1 EM1 06 CR 07 ST1 RS2 ST1 08 ST2 RS1 ST2 09 TL1 TL1 TL1 0A LSP LSP LSP 0B LSN LSN LSN 0C For manufacturer setting (Note 2) 0D SP1 SP1 0E SP2 SP2 0F SP3 SP3 10 LOP LOP LOP 11 CDP CDP CDP 12 to 1F For manufacturer setting (Note 2) 20 MD0

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

AC Servo Motor Driver (Network card type ）

PB _ _ ] 02: [Pr. PC _ _ ] 03: [Pr. PD _ _ ] 04: [Pr. PE _ _ ] 05: [Pr. PF _ _ ] 06: Parameter for manufacturer setting 07: Parameter for manufacturer setting 08: Parameter for manufacturer setting 09: Parameter for manufacturer setting 0A: Parameter for manufacturer setting 0B: [Pr. PL _ _ ] 0C: [Pr. PT _ _ ] 0E: [Pr.

5

Applicable mounting bracket T2 V M W Type A mounting bracket Type B mounting bracket Joint 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 T1 80 YU-08 YA-08 YB-08 2 x O counterbore 2 x D through B J 100 YU-10 YA-10 YB-10 E K (Width across flats ) H (With locking) Material: Stainless steel (mm) Part no.