Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

JXCx-OMT0028CN

LEC-CGD LEC-CGD N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 LEC CN4 LEC CN4 No. No.

Shock Absorbers and Rate Controls

SQUARE FLANGE (SD Lock / srot a ffi t I l ] T @ -l f.-.' (.iolog l{0.

Profi-E

P For D PV0 Baud rat e ( N ot e) 9. 6k/19. 2k/45. 45k/93. 75k/187. 5k /500k/1. 5M /3M /6M /12M bps Set by m ast er G SD Fi l e SM C_1412.

AC Servo Motor Driver (SSCNET /H Type)

8E.1 USB communication receive error SD 8E.2 USB communication checksum error SD 8E.3 USB communication character error SD 8E USB communication error 8E.4 USB communication command error SD 8E.5 USB communication data number error SD 888 Watchdog 88._ Watchdog DB Note 1.

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

VQ5000

(Noise reduction of 35dB or more) Note ) If a large amount of drainage is generated at the air supply, note that drainage will be discharged together with the exhaust air. 71.2 68.2 58.8 107.8 SMC 122 2 B SMC 1 P 69 SD type 12 3 X 5 R1 R2 PE 4 A Note) The drawing shows a VV5Q51--SD SU type 36 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Optional Manifold Parts Manifold mounted

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(Noise reduction of 35dB or more) Note ) If a large amount of drainage is generated at the air supply, note that drainage will be discharged together with the exhaust air. 71.2 68.2 58.8 107.8 SMC 122 2 B SMC 1 P 69 SD type 12 3 X 5 R1 R2 PE 4 A Note) The drawing shows a VV5Q51--SD SU type 36 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Optional Manifold Parts Manifold mounted

Thermo-chiller/Rack Mount Type

+ SD SG 1 SD+ 9 SD 5 SG 1 SD+ 9 SD 5 SG Circuit diagram Terminal resistance 120 Master This product This product (1st slave) (31st slave) Be sure to wire to the correct pin numbers according to the diagram.

Table of Contents

ZSE1-01-15CN1 pc.

Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 1 (Meter-in), Thread: Rc (Metric M3, M5; Unified 10-32UNF), Port Size: 01 (1/8)

Type: Speed Controller, Body Material: Zinc Alloy, Control Method: Meter-In, Format: [Elbows] Cylinder direct-connected flat elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + female thread, Connection Dia.: 1/8, Option: None, Types of

Mechanical Valves Series NVM, NVFM, NVZNI

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

IIIIIII

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

DOC1003626

Terminal resistance Terminal resistance 2 2 2 7 5 7 5 7 5 SDSD+ SDSG SD+ SD+ SD+ SG SDSG SDSG Controller This product (First device) This product This product (31st device) (Second device) Do not connect any wire to other PIN numbers.

HRX-OM-Z015

Terminal resistance 5 5 5 6 7 6 7 6 7 SDSD+ SDSG SD+ SD+ SD+ SG SDSG SDSG Terminal resistance 120 This product This product Controller This product 32st device first device second device Do not connect any wire to other terminal. Fig.3-1 RS-485 connection [Tips] 1 controller : 1 product, or 1 controller: N products. In the latter case, up to 32 products can be connected.

AC Servo Motor Driver (Pulse input type/Positioning type)

COM3 15 LA Encoder A-phase pulse (differential line driver) Y004 CR 5 16 LAR (Note 15) COM2 17 LB Encoder B-phase pulse (differential line driver) 18 LBR X INP 10 19 LZ Encoder Z -phase pulse (differential line driver) 20 LZR X X RD 11 21 14 LG SD Control common OP LG Plate 14 SD Plate (Note 7) (Note 3, 5) Forced stop CN1 EM1 8 Servo-on SON 4 Reset (Note 10, 11) RES 3 Forward rotation stroke

0.4

VP4 MODEL SB RD SD VQ 1/2 VQ 1/2 VQ 4/5 EX124: 4 x G1/2 Electrical entry Use a drip proof plug assembly (AXT100-B04A) on the unused conduit port (G1/2).

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.