IR1000/2000/3000

min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 1.2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 0.9 l/min (ANR) or less (at maximum set pressure) Bleed hole: 9.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or

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W~igh L2 L..3, ~L ~ "A1 '" , 'A2 oM II'. I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M ..

Pulse Valve

M (F) (E) (B) J K (C) Port size: Size 14 A ( 52) (20) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) H Exhaust port 3/8 2 x P Port size (F) L M (G) (E) (B) J K 20 (C) Dimension in ( ) shows the dimension after tightening.

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N03 (Screw-in NPT 3/8), VAC: N03 (Screw-in NPT 3/8), EXH: N03 (Screw-in NPT 3/8)

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N03 (Screw-in NPT 3/8), VAC: N03 (Screw-in NPT 3/8), EXH: N03 (Screw-in NPT 3/8), Accessories: N (w/o Bracket, w/o Silencer)

NARM Series

Description No. 2 Common IN Individual IN Common IN Individual IN Bonnet Polyacetal Regulator NARM2500-A-N02 NARM2500-B-N02 NARM3000-A-N03 NARM3000-B-N03 9 Regulator 1 Component Parts 10 End plate R 1 No.

Size: 3/8 Basis, Thread: NPT, Port Size: 3/8, Option: H [High Temperature (-5 to 80°C)], Lock Nut: -

Size: 3 (3/8 Basis), Thread: N (NPT), Port Size: 03 (3/8), Option: H [High Temperature (-5 to 80°C)]

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa), SUP: N03 (Screw-in NPT 3/8), VAC: N03 (Screw-in NPT 3/8)

Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N02 (Screw-in NPT 1/4), VAC: N03 (Screw-in NPT 3/8), EXH: N03 (Screw-in NPT 3/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N02 (Screw-in NPT 1/4), VAC: N03 (Screw-in NPT 3/8), EXH: N03 (Screw-in NPT 3/8)

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

70pvpump

Since the marked point is below the curve for 50 l/min (ANR), the maximum rate will be about 50 l/min (ANR).

q"s

*r-r-r --r| | | a High-speed | | | response time I I I specifications t t l | | t---{ Pressure display unit | | t--fMfi--l | | f--fkof/cm, l I I [s-f b "t| | I-+-fEr_--] | | tsT kp " ] t l t l I I Cable connector type I S I Straiqht tvpe 3 m I I L I Riqht anqle tvpe 3 m I I j N lWithout cable connector I l L-Bracket Model 7 . l00O tvoe v : 2000 tvoe Pressure [rPa 2 kqf/cm, 3 bar 4 PSI kPa

Precision Regulator

min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 11.5 L/min (ANR) or less Rc 1/4, 3/8, 1/2 Rc 1/8 (2 locations) Rc 1/4, 3/8, 1/2 Port size Pressure gauge port Rc 1/4 Rc 1/4 Rc 1/8 SRP Ambient and fluid temperature Weight (kg) 5 to 60C (No freezing) 0.64 0.71 0.35 0.30 0.14 SRF Note 1) With the condition of no flow on the output side.

IR1000/2000/3000

0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 300 0 100 200 1.0 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa 5 Series IR1000/2000/3000 Series IR2000 Flow rate characteristics Relief characteristics Pressure characteristics Testing methods conform to JIS B8372.

ITV

Flat bracket Dimensions L-bracket Description Part no.

ITV

min (ANR)) Flow rate (l/min (ANR)) Supply pressure (MPa) Series ITV305m Hysteresis Repeatability Linearity 1.0 1.0 0.9 1.0 0.8 Output deviation factor (%F.S.)

Process Pump <Fluororesin Type> Series PA3000

0.2 0.2 0.3MPa 0.3MPa 0.1 0.1 0.1 0.2MPa 0.2MPa 0.2MPa 00 5 10 00 5 10 00 5 10 15 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) PAP3313-T11: Flow rate characteristics (10Hz)* PAP3310-T11: Air consumption PAP3313-T11: Air consumption 0.4 15 200 Air consumption (l/min [ANR]) Discharge flow rate (l/min) Discharge pressure (MPa) SUP = 0.5MPa SUP = 0.5MPa 0.4MPa 0.3 150 0.4MPa 10 0.4MPa