JIS Standard Hydraulic Cylinder

(mm) With rod boot Stroke range (mm) Bore size (mm) e CD J l B BB C F GA GB M NA NB P R S LH LT LW LX X Y Z SS f Q B-rod C-rod B-rod C-rod 32 34.5 15 M10 x 1.25 58 109 38 14 21 15 11 37 31 3/8 39 130 11 35 13 13 88 29 14 98 57 52 25 to 1400 40 23 15 M10 x 1.25 65 118 45 10 21 15 11 36 30 3/8 42 130 11 37.5 14 13 95 29 14 98 57 52 52 25 to 1400 1/3.5 stroke 50 28 15 M10 x 1.25 76 145 52

ZP3

L N S U F GN GS 02 13 5.5 2 KQ2H02-M3G Width across flats K ZP3 T 015 02 035 U J K 3 6 1.2 04 14.5 8 4 KQ2H04-M3G J Dimensions Per Vacuum Inlet: Barb Fitting Model J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Table of Contents

A B C D E F G H J Bracket dimensions Bracket part no.

Table of Contents

4-13 P [200 VAC specification] Power cord outlet (17) [100 VAC specification] Power cord (mm) A B C D E F G H J K L M N P Q Port size Model IDU3E IDU4E IDU6E 3/8 455 498 283 275 15 270 1/2 31 42 80 230 32 15 240 80 284 483 13 568 355 300 3/4 485 15 7 9 Series IDF/IDU E Option Specifications 1 Refer to pages 2 and 5 for How to Order of options.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 L2 max Y 2 Y Y Y Y D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Applicable Auto Switch Model

Refer to the p.5.3-6 for the details of contact protection box. 13 13 13 13 13 13 13 13 13 13 13 13 14 14 14 14 14 14 14 14 14 14 14 16 15 17 17 17 17 14 16 16 13 13 13 13 Note) Average value at normal temperature including hysteresis.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

/G/S kit for 2 to 12 stations/Double wiring P/J/G/S kit for 13 to 24 stations/Double wiring P/J/G/S kit for 2 to 24 stations/Single wiring L0 kit : Stations (1 to 8) L1 kit : Stations (1 to 8) L2 kit : Stations (1 to 8) T kit for 2 to 20 stations/Double wiring T kit for 2 to 20 stations/Single wiring M kit for 2 to 12 stations/Double wiring M kit for 13 to 24 stations/Double wiring M kit

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

/G/S kit for 2 to 12 stations/Double wiring P/J/G/S kit for 13 to 24 stations/Double wiring P/J/G/S kit for 2 to 24 stations/Single wiring L0 kit : Stations (1 to 8) L1 kit : Stations (1 to 8) L2 kit : Stations (1 to 8) T kit for 2 to 20 stations/Double wiring T kit for 2 to 20 stations/Single wiring M kit for 2 to 12 stations/Double wiring M kit for 13 to 24 stations/Double wiring M kit

MXQ

15 14 Average speed Va (mm/s) Collision speed V (mm/s) 13 13 13 13 18 31 31 31 31 36 23 41 42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

Battery-less

With motor cover: LEYG16DmE -mC A B C H Dimensions (Size 16) U 35 Motor cover direction H D1 42.3 D2 42.3 D3 55.1 D4 47 A + Stroke Y X2 Cable length 250 With lock/motor cover: LEYG16DmE -mW A B C Motor Cover Direction Cable length 350 D1 D2 J J J J J J J J 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 30.3 22.2 J 30.3 22.2 J 30.3 22.2 J 22.2 30.3 J 22.2

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

7 Series ZPT With Buffer ZPT 40/50 F J/K 10-B01-A14 (With Buffer/Female Thread) ZPT 10/13/16 F J/K 10-0-A10 (With Buffer/One-Touch Fitting) Applicable tube O.D.

LX

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

Tie-rod Type Hydraulic Cylinder

CHAG V T 2 x Rc P 4 x J 4 x FD CHQ Width across flats G GA 4 x J Air release GB Cushion adjustment screw CHK MM R (max.)

Vacuum Pad: Ball Joint Type

(mm) Model A B C D F Y H I J K K Q: 4 Q: 6 ZPT10F10-0-A10 12 12.5 27 10 10 38.5 74.5 88.5 89.5 1.5 ZPT13F10-0-A10 39 23 Hexagon width across flats 13 15 13 1/8 (Rc, NPT, NPTF) 10.5 13 27.5 75 89 90 2 ZPT16F10-0-A10 18 16 M14 x 1 Additional Dimensions by Stroke (mm) Hexagon width across flats 19 H I J K Stroke 20 +38 +10 5 5 D C +28 30 +48 +20 I 40 +84 +30 +54 50 +94 +40 J H F Width across

SMC

63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA 82.5 132.5 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 139 MXS Air slide table 1322Dimensions: MXS12 1322Basic style 2-M4 x 0.7 thread depth 5 Operating

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 ZZ 109 109 119 129 145 177 220 245 13-/22-MXQ16L10 13-/22-MXQ16L20 13-/22-MXQ16L30 13-/22-MXQ16L40 13-/22-MXQ16L50 13-/22-MXQ16L75 13-/22-MXQ16L-100 13-/22-MXQ16L-125 Note) Note) Note) Refer

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For Safety Instructions and Actuator Precautions, refer to pages 7-13-3 to 7-13-6.

MY1

absorber stroke) T S F FC FB For MY1M50, 63 SMC EY EC FH W 58 58 70 88 104 128 152 TT 5.4 (max. 11) 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 6 6 7 12 12 15 15 S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 FW 66 80 91 FH 13 16 17.5 FC 14 14 13 17 17 26 31 FB 54 67 78 F 4 4 6 6 6 6 6 EY 39.5 45.5 53.5 67 83 106 129 EC 5.8

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA 82.5 132.5 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 785 MXS 1322Air Slide Table Dimensions: MXS12 1322Basic 2 x M4 x 0.7 thread