Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS131FM-M5-23 AS131FM-M5-04 AS131FM-M5-06 AS231FM-01-23 AS231FM-01-04 AS231FM-01-06 AS231FM-01-08 AS231FM-02-04 AS231FM-02-06 AS231FM-02-08 AS231FM-02-10 3.2 19.8 8.4 17.5 28.7 12.7 M5 x 0.8 8 8 4 20.3 33.8 28.8 30.1 25.1 9.3 9.6 9.3 10.8 6 21.4 20.6 31.8 13.5 11.6 3.2 24.4 8.4 17 17.5 30.9 12.7 9.3 13.1 4 24.9 9.3 35.2 30.2 32.1 27.1 12 R 1/8 14.2 18 22.9 36.3 13.5 10.9 6 14 26.9 11.6 21

REA/REB

Bore size (mm) Model Elbow type Straight type In-line type 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214

modular-press-e

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

VM

02 VM123-M5-02S VM133-M5-02 VM133-M5-02S Polyacetal roller One way roller lever Hard steel roller Straight plunger VM120-01-05 VM130-01-05 VM122-M5-05 VM132-M5-05 VM-08B VM-07BS VM-07B VM-06BS VM-06B VM-05B Polyacetal roller Hard steel roller VM120-01-06 VM120-01-06S VM130-01-06 VM130-01-06S VM122-M5-06 VM122-M5-06S VM132-M5-06 VM132-M5-06S Roller plunger Polyacetal roller Hard steel roller

Table of Contents

The lead wire entry is on D side (LD) in this case. 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Note) 3 position types need two stations.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

BH2-080 BH2-100 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BDS-04M BDS-05M BDS-06M BDS-08M BDS-10M BD1-04M BD1-05M BD1-06M BH1-080 BH1-100 40 25 to 800 1800 (1401 or more with tie-rod reinforcing ring) Note 2) 50 25 to 800 1800 (1401 or more with tie-rod reinforcing ring) Note 2) CH2E

Modular Type Lubricators Series AL

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 950

JIS Standard Hydraulic Cylinder

K d Part no. +0.07 0 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 CHQ +0.07 0 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 CHK B-series +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30

CV/MVGQ

1 CEP1 Basic Style (B) CE1 CVJ5 CE2 ML2B M5 x 0.8 M5 x 0.8 C J G5-S CV MVGQ M5 x 0.8 CC 53.5 [54.5] Manual override 28 [34.5] RB J Width across flats B1 D-X Rod End Nut 20Bore size (mm) B l H l S + Stroke Z + Stroke 10 7 3.2 Data 16 8 4 [ ]: Denotes the values of AC.

CV/MVGQ

1 CEP1 Basic Style (B) CE1 CVJ5 CE2 ML2B M5 x 0.8 M5 x 0.8 C J G5-S CV MVGQ M5 x 0.8 CC 53.5 [54.5] Manual override 28 [34.5] RB J Width across flats B1 D-X Rod End Nut 20Bore size (mm) B l H l S + Stroke Z + Stroke 10 7 3.2 Data 16 8 4 [ ]: Denotes the values of AC.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Data Bore size (mm) Standard stroke range (mm) Long stroke range (mm) A K AL C I KA B1 D E J F GA H H1 13 17 17 19 27 27 32 41 5 6 6 8 11 11 13 16 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 18 22 22 30 35 35 40 40 15.5 19.5 19.5 27 32 32 37 37 14 16.5 20 26 32 38 50 60 8 10 12 16 20 20 25 30 26 31 38 47 58

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Vacuum System Peripherals:

M5 x 0.8 x 5 M5 x 0.8 x 5 How to install cover assembly Remove machine screw M48 x 2 M48 x 2 ( ): Port size is R , , 13-14-12 12 Related Products: Air Line Equipment Air Filter, Regulator, Filter Regulator, Mist Separator Modular, Air filter Series AF Flow rate (l/min (ANR)) Bowl capacity (cm3) Filtration degree ( m) Port size Rc Model AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 150 1100 2600

5

(mm) Bore size (mm) Stroke range (mm) A AL B1 C D E F H H1 I J K KA MM NA 20 18 15.5 13 14 8 12 2 35 5 26 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 25 22 19.5 17 16.5 10 14 2 40 6 31 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 32 22 19.5 17 20 12 18 2 40 6 38 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 40 30 27 19 26 16 25 2 50 8 47 M6 x 1 depth 12 6 14 M14 x 1.5 44 Up to 1500 50 35 32 27 32 20 30 2 58 11

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

/Female Thread) ZPT 20/25/32 F J/K 10-B01-A14 (With Buffer/Female Thread) Rc(PT)1/8 Width across flats 13 Width across flats 8 M5 x 0.8 5 M10 x 1 M14 x 1 6.2 Width across flats 14 3 3 Width across flats 19 I 5 5 D C J H F I M5 x 0.8 Width across flats 8 J H F Width across flats 10 Width across flats 2 Width across flats 12 M8 x 1.25 Y D C Width across flats12 Width across flats 3 2 A B 3

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (One-touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Mounting Vacuum entry port Connection M5 x 0.8 19 18 Female thread One-touch fitting 10 to 16 M5 x 0.8 22 23 4 tube 10 to 16 20 to 32 M5 x 0.8 M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 6 tube 40, 50 M5 x 0.8 Pad dia.

Auto Switch Guide

switch mounting bracket RS H A Set screw (M4) RZQ Mounting bracket (b) Tie-rod MI W S Auto switch mounting screw (With hexagon socket head) M5 x 0.8 CEP1 CE1 Auto switch CE2 Bracket set screw M5 x 0.8 x 12 l ML2B Mounting bracket (A) C J G5-S 1.

Vacuum Pad: Ball Joint Type

Q Hexagon width across flats 13 1/8 (Rc, NPT, NPTF) Hexagon width across flats 8 M5 x 0.8 M14 x 1 Hexagon width across flats 19 M10 x 1 5 5 D C Hexagon width across flats 14 3 I I K 3 D C J J H F Hexagon width across flats 8 M5 x 0.8 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 10 H F Hexagon width across flats 2 Y 2 Y A B 2.5 A B Stroke: 10 mm Dimensions: 10 mm Stroke