BP1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

PF2M7.eng

PF2M7-B.eng:PF2M7-B.eng.qxd 21/04/09 14:02 1 Before Use Digital Flow Switch PF2M7## Wiring Wiring of connector Connections should only be made with the power supply turned off. Use separate routes for the product wiring and any power or high voltage wiring. Otherwise, malfunction may result due to noise.

Model: ASR (Pressure Valve), Size: 4 (1/4 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 10 (ø10mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASQ (Flow Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 08 (ø8mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASR (Pressure Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 10 (ø10mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASR (Pressure Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 08 (ø8mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASQ (Flow Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 10 (ø10mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASR (Pressure Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 12 (ø12mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASQ (Flow Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 12 (ø12mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASR (Pressure Valve), Size: 4 (1/4 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 08 (ø8mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Body Size: 4 (1/4 Standard), Port Size: 02 (R1/4), Applicable Tubing O.D.: 06S (ø6mm)

Model: Flow Valve, Size: 1/4 Standard, Port Size: 1/4, Applicable Tubing O.D.: 1/4", Option: Fixed set pressure type (0.2 MPa), Thread: NPT

PFxx-OMS0001CN

d. == 1 / ,/ ([F20](47 )) e. ( (53 )) f. -46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.

PF-OMM0004_C

[F 2] OUT2 c()F( oF)() -40No.PF-OMM0004-D -41No.PF-OMM0004-D [F 3] [F 3] [RES] [F3] 7 s -42No.PF-OMM0004-D [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] [F10] -43No.PF-OMM0004-D -44No.PF-OMM0004-D 9L 3 1.5s6 3s 9L [9] [F30] 1S =0 =0 [F20]45 9L 3 1.5s6 3s 9L 6 0 [0] [F30] 1S = = [F20]45 -45No.PF-OMM0004-D == 1 / ,/ ([F20](47 )) (53 )[F82] c () -46No.PF-OMM0004-D [F20

PFxx-OMP0001CN

][] [F20] GND 30 msec.

PF-OMN0011_C

[F 2] OUT2 c()F( oF)() -38No.PF-OMN0011CN-C H_t Ht Ht H_t Ht Ht -39No.PF-OMN0011CN-C [F 3] [F 3] [RES] [F3] 7 s -40No.PF-OMN0011CN-C [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] OUT1 OUT1 OFF [F10] -41No.PF-OMN0011CN-C -42No.PF-OMN0011CN-C -43No.PF-OMN0011CN-C == 1 / ,/ ([F20](45 )) [F82](51 ) c () -44No.PF-OMN0011CN-C [F20] =00 = ON EEPROM 100 +100 OFF 30 msec.GND 1 [ooo] 1

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Bore size (mm) 125 140 160 180 200 Foot style CS1-L12 CS1-L14 CS1-L16 CS1-L18 CS1-L20 Flange style CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20 Single clevis style CS1-C12 CS1-C14 CS1-C16 CS1-C18 CS1-C20 Double clevis style CS1-D12 CS1-D14 CS1-D16 CS1-D18 CS1-D20 Order two foot brackets per cylinder.

LFE-OMY0008

No.LFE*-OMY0008 / / / / / / / / LFE# SMC SMC SMC SMC 2 11 13 14 16 18 19 21 24 26 26 F1 OUT1 28 F2 OUT2 36 F3 40 F10 41 F20 45 F22 46 F30 47 F32 48 F33 50 F34 51 F80 52 F81 53 F82 54 F90 55 F98 56 F99 57 58 60 61 64 66 67 70 71 1 No.LFE*-OMY0008 (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.