Model: Flow Valve, Size: 3/8 Standard, Port Size: 1/4, Applicable Tubing O.D.: ø6mm, Option: Fixed set pressure type (0.2 MPa), Lock Nut: -

BP1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

BP1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

PF2M7.eng

PF2M7-B.eng:PF2M7-B.eng.qxd 21/04/09 14:02 1 Before Use Digital Flow Switch PF2M7## Wiring Wiring of connector Connections should only be made with the power supply turned off. Use separate routes for the product wiring and any power or high voltage wiring. Otherwise, malfunction may result due to noise.

Model: ASR (Pressure Valve), Size: 4 (1/4 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 10 (ø10mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASQ (Flow Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 08 (ø8mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASQ (Flow Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 10 (ø10mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASQ (Flow Valve), Size: 4 (1/4 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 08 (ø8mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASQ (Flow Valve), Size: 4 (1/4 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 10 (ø10mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASQ (Flow Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 12 (ø12mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASR (Pressure Valve), Size: 4 (1/4 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 08 (ø8mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Body Size: 4 (1/4 Standard), Port Size: 02 (R1/4), Applicable Tubing O.D.: 06S (ø6mm)

Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male

Model: ASR (Pressure Valve), Size: 5 (3/8 Standard), Port Size: 03 (3/8), Applicable Tubing O.D.: 06 (ø6mm)

Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male

Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male

Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male

.: 08 (ø8mm), Option: F20 (Fixed set pressure type (0.2 MPa))