Profile Design ISO/VDMA Air Cylinder Series CP95

e Order No. b d f l1 c a 32 M10x1.25 GKM10-20 10 40 10 52 20 20 40 M12x1.25 GKM12-24 12 48 12 62 24 24 50/63 M16x1.5 GKM16-32 16 64 16 83 32 32 80/100 M20x1.5 GKM20-40 20 80 20 105 40 40 Rod end nut (standard equipment) 30 d D C H B Bore size (mm) Order No.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

XL

(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

Ejector Valve Unit Series ZYY/ZYX 1

ZX B B' A B ZR A B P1 A A' ZM !0 o r t ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e ZL ZY ZQ ZF ZP !1 ZCU Section A-A' (Ejector) AMJ !

Ejector Valve Unit, Series ZYY/ZYX

A A A B A B P1 B B Section A-A (ejector) Section B-B (solenoid valve) Replacement parts list Parts list No. 1 2 3 4 5 6 7 8 Description Material No. Description Part No.

SMC Electronic Switch Series Variations

E: Emitter C: Collector B: Base B: Base Load Electrical appliance connected to the output, e.g. relay, solenoid, etc. E: Emitter C: Collector Fig.2 NPN type Fig.3 PNP type Operating humidity range Humidity range for proper operation of equipment. Load current Current flow through the electrical appliance once the output is energized.

Booster Regulator/Air Tank

END 1014 Booster Regulator VBA Series Working Principle The IN air passes through the check valve to booster chambers A and B. Meanwhile, air is supplied to drive chamber B via the governor and the switching valve. Then, the air pressure from drive chamber B and booster chamber A are applied to the piston, boosting the air in booster chamber B.

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

AC

How To Order Filter Regulator Series AW20 to 40 AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating Stainless Fasteners Body Size Symbol 20 30 40 Name Plate in imperial Units (psi, F) Size 1/8 3/8 1/2 Bowl NPT Threads Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Applicable Body Size 20 30, 40 Accessories Port Size Applicable Body Size 20 30 40 Symbol Nil B

Series AC Epoxy Coated F.R.L.

How To Order Filter Regulator Series AW20 to 40 AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating Stainless Fasteners Body Size Symbol 20 30 40 Name Plate in imperial Units (psi, F) Size 1/8 3/8 1/2 Bowl NPT Threads Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Applicable Body Size 20 30, 40 Accessories Port Size Applicable Body Size 20 30 40 Symbol Nil B

When replacing an old AW series filter regulator with the following conditions (A to E), select a filter regulator from the AW20-B to AW60-B series. (A) The set pressure is 0.7 to 0.85 MPa. (B) A square embedded type pressure gauge or digital pressure gauge are required. (C) The same dimensions for panel mounting are required.

[Please Refer to the Following Pages of the Catalog]· P. 258 Filter Regulator AW10-A to AW40-A· P. 259 Filter Regulator AW20-B to AW60-B· P. 259 Filter Regulator With Backflow Function AW20K-B to AW60K-B· P. 260 Mist Separator Regulator AWM20 to AWM40· P. 260 Micro Mist Separator Regulator AWD20 to AWD40· P. 262 Filter Regulator With Built-in Pressure Gauge AWG20/30/40· P. 263 Filter Regulator

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

Model Product series AC20/AC25/AC30/AC50/AC55/AC60 AC20A/AC30A/AC40A/AC50A/AC60A AC20B/AC25B/AC30B/AC50B/AC55B/ AC60B AC20C/AC25C/AC30C/AC40C AC20D/AC30D/AC40D AR20 (K) /AR25 (K) /AR30 (K) /AR40 (K) / AR50 (K) /AR55 (K) /AR60 (K) AW20 (K) /AW30 (K) /AW40 (K) /AW60 (K) F.R.L. combination Option/Part No.

(K)-B, AW30(K)-B and equivalent models, Drain guide: -, Type: Pressure Gauge, Square Recessed Type, Case material: -, Case seal material: -, Valve assembly material: -, Set nut: N/A, Drain guide: N/A, Barbed fitting: N/A, Case guard: N/A

(K)-B, AW30(K)-B and equivalent models, Drain guide: -, Type: -, Type: Pressure Gauge, Square Recessed Type, Case material: -, Valve assembly material: -, Set nut: N/A, Drain guide: N/A, Barbed fitting: N/A, Case guard: N/A

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CRB2 CRBU2 CRB1 MSU CRJ CRA1 CRQ2 MSQ Body (B) Thread 3 x Q1 For unit mounting MSZ Body (B) CRQ2X MSQX A port B port Through hole Body (A) MRQ Body (A) Hexagon socket head set screw M5 (Hexagon socket head set screws are not availableif Body (B) has no machined threads.)

V

L E T U B E OD 6 A P P L I C A B L E T U B E OD 6 Courtesy of Steven Engineering, Inc. !