Size: L (High Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 1 (Stop Valve/Skip Valve), Voltage: 1 (100VAC), Electrical Entry: G (Grommet), Suffix: U2 (Convertor Unit/forCC100,CC160 (To be Integrated in CCT100,160))

Size: L (High Flow Style), Control Valve: 0 (None), Combination Valve: 2 (Stop Valve), Voltage: 5 (24VDC), Electrical Entry: C (Conduit), Suffix: U2 (Convertor Unit/forCC100,CC160 (To be Integrated in CCT100,160))

Size: L (High Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 2 (Stop Valve), Voltage: 1 (100VAC), Electrical Entry: D (DIN Terminal), Suffix: U2 (Convertor Unit/forCC100,CC160 (To be Integrated in CCT100,160))

Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 2 (Stop Valve), Voltage: 2 (200VAC), Electrical Entry: G (Grommet), Suffix: U2 (Convertor Unit/forCC100,CC160 (To be Integrated in CCT100,160))

Size: S (Small Flow Style), Control Valve: 3 (Speed Controller For Minimal Flow (CCVS Only)), Combination Valve: 1 (Stop Valve/Skip Valve), Voltage: 1 (100VAC), Electrical Entry: G (Grommet), Suffix: U2 (Convertor Unit/forCC100,CC160 (To be Integrated in CCT100,160))

Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 3 (Skip Valve), Voltage: 0 (Air Operated Style), Electrical Entry: Air Operated Style, Suffix: U2 (Convertor Unit/forCC100,CC160 (To be Integrated in CCT100,160))

Size: L (High Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 1 (Stop Valve/Skip Valve), Voltage: 5 (24VDC), Electrical Entry: C (Conduit), Suffix: U2 (Convertor Unit/forCC100,CC160 (To be Integrated in CCT100,160))

Size: L (High Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 0 (None), Voltage: w/o Combination Valve, Electrical Entry: Air Operated Style, Suffix: U2 (Convertor Unit/forCC100,CC160 (To be Integrated in CCT100,160))

Size: L (High Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 1 (Stop Valve/Skip Valve), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Suffix: U2 (Convertor Unit/forCC100,CC160 (To be Integrated in CCT100,160))

V100

VZ22 20 Rc 1/8 VZ22 30 Rc 1/8 (Example) VV3Z2-20-081 (8 stations) VV3Z2-50081-C6 (8 stations) VZ212-1G-M5 5 pcs. VZ215-5M5 pcs. VZ212-1G-M5 2 pcs. VZ215-5M3 pcs. VVZ200-32A-1 1 pc.

High Vacuum Angle Valve

CYV Chemraz VMQ FKM for Plasma ULTIC ARMOR Example) XLCV-16-M9NA-1G-XAN1A UA4640 Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

3 Port Solenoid Valve Metal Seal Series VZ200 1

VZ22 20 Rc 1/8 VZ22 30 Rc 1/8 (Example) VV3Z2-20-081 (8 stations) VV3Z2-50081-C6 (8 stations) VZ212-1G-M5 5 pcs. VZ215-5M5 pcs. VZ212-1G-M5 2 pcs. VZ215-5M3 pcs. VVZ200-32A-1 1 pc.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Aluminum High Vacuum Angle Valve

CYV Chemraz Example) XLCV-16-M9NA-1G-XAN1A VMQ FKM for Plasma ULTIC ARMOR Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Series KP/KPQ/KPG

No. 1 2 3 4 5 6 7 8 9 10 11 Polypropylene resin Polypropylene resin SUS304 stainless steel SUS304 stainless steel Polypropylene resin (color: light green) Polypropylene resin SUS304 stainless steel EPDM EPDM EPDM SUS304 stainless steel Body Stud Chuck Guide Release button Collet Stopper Seal Bumper O-ring Drive bushing 5 Series KP Clean One-Touch Fittings Dimensions (mm) 1in = 25.4mm, 1g

Series KP/KPQ/KPG

No. 1 2 3 4 5 6 7 8 9 10 11 Polypropylene resin Polypropylene resin SUS304 stainless steel SUS304 stainless steel Polypropylene resin (color: light green) Polypropylene resin SUS304 stainless steel EPDM EPDM EPDM SUS304 stainless steel Body Stud Chuck Guide Release button Collet Stopper Seal Bumper O-ring Drive bushing 5 Series KP Clean One-Touch Fittings Dimensions (mm) 1in = 25.4mm, 1g

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Manifold base) VF5120-1G-032 pcs. (Valve) VF5220-1G-032 pcs. (Valve) DXT156-19-1A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

CV/MVGQ

Calculation: (Example) CVM3L32-100-1G (32, 100 stroke, Spring return) Basic weight0.73 (kg) CV Weight of brackets0.16 (kg) 0.73 + 0.16 = 0.89 kg MVGQ Minimum Stroke for Auto Switch Mounting (mm) CC No. of auto switches mounted RB Auto switch model 2 n 1 Same side Same side Different sides Different sides 3. Do not touch the cylinder during operation.

CV/MVGQ

Calculation: (Example) CVM3L32-100-1G (32, 100 stroke, Spring return) Basic weight0.73 (kg) CV Weight of brackets0.16 (kg) 0.73 + 0.16 = 0.89 kg MVGQ Minimum Stroke for Auto Switch Mounting (mm) CC No. of auto switches mounted RB Auto switch model 2 n 1 Same side Same side Different sides Different sides 3. Do not touch the cylinder during operation.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

(Blow port: Bottom) Port size OUT (blow) port 2 x Port size IN port JSXM 1G-F(Blow port: Front) Port size OUT (blow) port JSXM 1G(Blow port: Bottom) CS: Conduit GS: Grommet with PCB D 500 K F D 300 K F NPT1/2 C E C E J G J G B B [mm] Size Port size A B C D E F G 20 1/8, 1/4 42 40 77.6 36 17.5 18 15.5 30 1/4, 3/8 53 53 94.5 42 21.5 21 18 40 1/4, 3/8, 1/2 71 70 102.5 42 25.5 21 22.5 Size