High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

(LEJS63) 120 Model Selection LEJ Series AC Servo Motor Clean Room Specication SpeedWork Load Graph/Required Conditions for Regeneration Option(Guide) LEJS40/Ball Screw Drive LEJS63/Ball Screw Drive Horizontal Horizontal 0 10 20 30 40 50 60 70 80 90 60 Lead 8: LEJS40B Lead 10: LEJS63B LEF A 50 Area where the regeneration option is required.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L = 100 mm L = 100 mm L = 100 mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

34 63.5 53 52 47 40 32 25 20 10 12 11 14 40 45 55 65 50 63 80 100 70.5 82.5 101 121 5 5 6 6 55 (67) 55 (67) 60 (74) 60 (74) 75.5 75.5 95 95 157.5 (169.5) 157.5 (169.5) 188.5 (202.5) 192 (206) 4.5 4.5 4.5 6 66 82 100 120 5 5 5 7 17.5 17.5 20 20 22 22 28.5 30 11 13 14 16 86 106 125 150 Other dimensions are the same as basic type.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

Solid State Auto Switches

D-M5NT D-M5PT Auto switch model 3 m (L) 60 Lead wire length 5 m (Z) 95 Ex.) Cylinder speed 1000 mm/sec. PLC response time 0.1 sec. Detecting point dispersion Within 100 mm (= 1000 mm/sec. x 0.1 sec.) Take PLC response time into consideration when using.

Environment

The load factor for each direction can be obtained as follows. x = 0/400 = 0 y = 50/250 = 0.2 z = 200/1500 = 0.13 5. x + y + z = 0.33 1 2000 1000 2000 800 1500 1500 Lz 600 L1 [mm] L3 [mm] L2 [mm] 1000 1000 400 Ly 500 500 200 Lx 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 44 Model Selection LEF Series Step Motor (Servo/24

JIS Standard Hydraulic Cylinder

x 1.5 C B-series M6 x 1.0 M8 x 1.25 40 145 115 75 60 E 31.5 30 20 24 M30 x 1.5 dH10 L L M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 M39 x 1.5 M8 x 1.25 M10 x 1.5 50 185 145 95 80 40 40 25 26 M48 x 1.5 H +0.4 +0.1 D M5 x 0.8 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M16 x 1.5 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 20 16 20 M20 x 1.5 B J M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 C-series

Tie-rod Type Hydraulic Cylinder

M8 x 1.25 M14 x 1.5 18 20 60 18 44 22 44 77 1/4 25 14 30 9 16 10 50 19 50 25 9 73 115 17 13 M10 x 1.5 M16 x 1.5 20 22 73 20 53 26 53 95 3/8 28 17 30 11 22 10 63 21 55 28 8 80 122 17 13 M10 x 1.5 M18 x 1.5 22 25 80 22.4 60 26 60 102 3/8 30 17 30 11 20 12 80 26 65 M12 x 1.75 32 8 100 155 20 15 M22 x 1.5 26 29 100 28 75 30 75 130 1/2 32 22 35 13 26 12 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118

Rotary Actuator

Applicable shaft type: K X = X = X = Y = W2 = L2 = L4 = Y = [mm] [mm] [mm] Size Y W2 L2max L4max 30 8.5 to 25 1 to 2 Y-2 L2-2 50 10 to 36 1 to 5.5 Y L2-2 63 11 to 41 1 to 6.5 Y L2-2 80 13.5 to 50 1 to 8 Y L2-3 100 17 to 60 1.5 to 10.5 Y L2-4 Size X 30 3 to 25 50 3.5 to 36 63 3.5 to 41 80 4 to 50 100 5 to 60 Size Y 30 3 to 25 50 1 to 36 63 1 to 41 80 1 to 50 100 1 to 60 Symbol: A53 Note) Except

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

32 74 40 56.5 32 5 20 6.5 45 16 16 9 8.5 75 70 40 94 50 72 36 5 20 10 45 16 16 11 11 95 90 50 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Max.157 70 110 50 7 30 10 60 25 26 13.5 10 Max.157 130 70 Clevis pivot bracket (E) l3 l1 K2 (Max.) l3 (Max.)

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

S + Stroke Relief port M5 x 0.8 1.5 (20, 25) FZ Z N N F H 20 to 32 Standard port ZZ + Stroke 4 x FD F Y 45 Relief port (32, 40) 40 (mm) K I HC H FY D B2 A 66 52 40 40 34 B 22 17 17 13 B1 10.5 7.5 7.5 7.5 DL Bore size FT F FD FX AL FZ G H1 H2 E C2 MM 0 41 32 32 26 20-0.033 7 7 7 4 4 4 60 60 60 16 13 13 13 40 32 25 20 24 22 22 18 21 19.5 19.5 15.5 5 24 46.5 37.5 33.5 28 47.3 37 37 30 36 50

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Because 2.5 N < 48 N, it is applicable. 18 N -X 10 0 80 70 60 50 40 30 20Point of application L (mm) Data Therefore select MIW (MIS) 12.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Because 2.5 N < 48 N, it is applicable. 18 N -X 10 0 80 70 60 50 40 30 20Point of application L (mm) Data Therefore select MIW (MIS) 12.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

XM, XY

(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

CJ2X/CUX/CQSX/CQ2X/CM2X

Low Speed Cylinder Double Acting, Single Rod Series CJ2X 10, 16 How to Order Bore size 10 16 10 mm 16 mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate stroke other than above is manufactured upon receipt of order.

CJ2X/CUX/CQSX/CQ2X/CM2X

Low Speed Cylinder Double Acting, Single Rod Series CJ2X 10, 16 How to Order Bore size 10 16 10 mm 16 mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate stroke other than above is manufactured upon receipt of order.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

During cylinder operation, be careful not to get your hand or fingers caught between the plate and housing. 88 Dual rod cylinder/Compact type 6, 10 Series CXSJ 11-/1221-/22How to Order Clean series 11 12 Vacuum suction type Relief type(with specially treated sliding parts) CXS 6 50 J 11 L M9B S 21 6 50 M9B S CXS L J Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers Nil S 2 pcs. 1 pc. 22 Vacuum suction type Nominal size 10 15 20 30 Auto switch Without auto switch (without magnet) Nil Connecting

Auto Switch Guide

C76 Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL C85 C95 CP95 Auto Switch Mounting Bracket Part No.