Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

3/5 E 3/5 2 B 2 B 2 B 2 B 1 P 1 P 78 68.2 63 E 3 P 1 E 3 P 1 Individual EXH spacer 48 7.5 Individual SUP spacer 19.7 Block separation lever L Dimension n: Stations L n 2 135.5 125 106.5 14.5 3 148 137.5 117 15.5 4 160.5 150 127.5 16.5 5 173 162.5 138 17.5 6 173 162.5 148.5 12.5 7 185.5 175 159 13.5 8 198 187.5 169.5 14.5 9 210.5 200 180 15.5 10 223 212.5 190.5 16.5 11 235.5 225 201 17.5 12

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

IDU/IDF

dryer Applicable dryer Port size Rc E D D C A B Part No.

New

B B DIN terminal Conduit terminal F Q Cable 0.24 to 0.47 D S G1/2 1.34 Qp0.08 F (1.73) 1.24 0.99 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp0.08 B B1 B Conduit Faston type Q F D Q F 0.44 z11 G1/2 0.90 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part Faston connector (inch) 250 Series Electrical entry Size Port size Grommet (with surge P A B B1 C D E

Integrated Controller

Weight [g] JX-CDS-E-1-S 68 JX-CDS-E-3-S 125 JX-CDS-E-5-S 200 JX-CDS-E-10-S 387 JX-CDA-E-1-S 68 JX-CDA-E-3-S 125 JX-CDA-E-5-S 200 JX-CDA-E-10-S 387 Connector type: Right angled (35) L 35 5 B end A end Connector type: the right angled type cannot be used for the parallel mounting type. (15) PIN 2 PIN 3 45 PIN 4 PIN 1 62 Slider Type Rod Type EQFSH/EQYH Series Battery-less Absolute Encoder

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

E E D C Center of F.R.L. body Center of F.R.L. body B C B EE (Except Y300T-D) Part no.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

C in the case of 15.

Proposals for Energy Saving

MB MC KA MA N K N C S + Stroke H B ZZ + Stroke Allowable angle displacement of E to B is 1.5.

C76

: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting

C76

: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type

Thermo-chiller

200 VAC *3 q Facility water temperature: 25C, w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow, r Power supply: 200 VAC *4 q Facility water temperature: 25C, w Circulating fluid: Tap water, e Circulating fluid temperature: CH1 20C/CH2 25C, r Circulating fluid flow rate: Rated flow, t Power supply: 200 VAC, y Piping length: Shortest, u Load: Same as the cooling capacity

REA/REB

8 Hard anodized Aluminum alloy Port cover C J G5-S Stainless steel Shaft e !

REA/REB

8 Hard anodized Aluminum alloy Port cover C J G5-S Stainless steel Shaft e !

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure

CL

D C B H d Tube I.D.

VFR

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

Table of Contents

Open knobs C and E gradually until the required speed is achieved. Make sure that knobs C and E are opened by the same number of rotations. Note 1) If the piston rod jerks, close knob E until the smooth operation is achieved. 3. Speed adjustment for return stroke The speed is adjusted with the flow valve. Open knob D gradually until the required speed is achieved. 4.

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

0.4

/Voltage (Solid state: 12 to 24 VDC) VQC 1/2 14 15 16 17 18 19 Nil L C CL CN 1 setting, Without analog output, 3 revolution adjustment 1 setting, Without analog output, 200 adjustment 2 setting, Without analog output, 3 revolution adjustment 2 setting, Without analog output, 200 adjustment 1 setting, With analog output, 3 revolution adjustment 1 setting, With analog output, 200 adjustment

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !