Magnet: D (Built-in Magnet), Mounting: G (Head Flange), Tube Material: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 350mm, Bellows/Cushion: Cushion Both Sides

Magnet: D (Built-in Magnet), Mounting: G (Head Flange), Tube Material: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 700mm, Bellows/Cushion: Cushion Both Sides

Magnet: D (Built-in Magnet), Mounting: G (Head Flange), Tube Material: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 250mm, Bellows/Cushion: J (Nylon Tarpaulin+Cushion Both Sides)

Magnet: D (Built-in Magnet), Mounting: G (Head Flange), Tube Material: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 75mm, Bellows/Cushion: J (Nylon Tarpaulin+Cushion Both Sides)

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35 + 25 (n 2) (n = 2, 3, 4, 5) CJ2 D-A9lV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) CM2 Band mounting CG1 D-H7l/H7lW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) MB D-C7l D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) CA2 D-H7C D-C73C D-C80C 10 15 65 15 + 50(n 2)

High Vacuum Angle Valve

120C heater D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 5 to 150C Solid state auto switch Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not applicable for H4, H5, Size 25 not for H4. y Number of auto switches/Mounting position Without auto switch (with built-in magnet

Table of Contents

10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB MSQ MHZ2 MHZJ2 MHL2 MDHR MHS 12-25 MHK MHS MHC2 MHT2 MHW2 10-25 MHY MRHQ MHL Grommet D-A72/A73/A80 12-13-7 D-A72H/A73H D-A76H/A80H 12-13-8 MHR Rail Connector D-A73C/A80C 12-13-9 D-A53/A54/A56 D-A64/A67 MHK Grommet Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

Aluminum High Vacuum Angle Valve

Without auto switch (without built-in magnet) D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not applicable for H4, H5, Size 25 not for H4. y Number of auto switches/Mounting

Table of Contents

(mm) Bore size D-A9, D-A9V D-M9, D-M9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum Stroke for Auto Switch Mounting (2 pcs.)

ISO Cylinder

D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV 16 18 33.5 49 13.5 [7.5] 16 16.5 32 47.5 12 [6] 16 12.5 28 43.5 8 [2] 20 10.5 (35.5) 60.5 85.5 9.5 D-A9l D-A9lV D-A79W 20 5 (30) 55 80 4 25 10.5 (35.5) 60.5 85.5 11 25 5 (30) 55 80 5.5 16 14 29.5 45 9.5 [3.5] D-F7l/J79 D-F7lW D-J79W D-F7lV D-F7lWV D-F79F/J79C D-F7BA D-F7BAV D-A72 D-A7lH/A80H D-A73C/A80C 8 16

Table of Contents

(mm) Hw 23 Ht 15 Hv 10.5 Auto switch model D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C Note 2) For 25 stroke, 2 magnets for auto switches are installed in the housing. Note 1) The dimensions show D-E7A and D-E80A.

Free Mount Cylinder

, 32 5, 10, 15, 20, 25, 30, 40, 50, 60 5, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100 Minimum Stroke for Auto Switch Mounting (mm) Applicable auto switch JIS Symbol Non-rotating rod No. of auto switches mounted D-A9, D-A9V D-M9, D-M9V D-F9W, D-F9WV 1 pc. 5 5 5 2 pcs. 10 5 10 Weight/( ): Denotes the values with D-A93.

Table of Contents

Standard Stroke Bore size (mm) Standard stroke (mm) Range of manufacturable stroke Auto switch model 40 CV Bore size (mm) 50 63 80 100 Without rod boot With rod boot Without rod boot With rod boot D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL 40 25 to 850 25 to 700 Up to 1200 Up to 950 MVGQ 50 25 to 800 25

Smooth Cylinder/Low Speed Cylinder

Auto Switch Mounting Height (mm) D-M9 D-M9W D-M9A D-A9 D-C7 D-C80 D-H7 D-H7W D-H7NF Auto switch model D-B5 D-B64 D-B59W D-G5NT D-H7C D-A9V D-M9V D-M9WV D-M9AV D-A3A D-G39A D-K39A D-C73C D-C80C D-A44A Bore size (mm) 20 25 32 40 Hs Hs Hs Hs Hs Hs 23.5 25.5 22.5 25 60 69.5 26 28 25 27.5 62.5 72 29.5 31.5 28.5 31 66 75.5 33.5 35.5 32.5 35 70 79.5 1200 Auto Switch Mounting Series CM2Y Minimum

High Vacuum Angle Valve

switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Air Cylinder

106.5 40 13.5 36.5 61.5 86.5 111.5 136.5 D-H7l D-H7C D-H7lW D-H7BA D-H7NF D-A9l(V) 20 6.5 30 55 80 25 5.5 30.5 55.5 80.5 32 7 31 56 81 106 40 13 36 61 86 111 136 20 3 26.5 51.5 76.5 25 2 27 52 77 32 3.5 27.5 52.5 77.5 102.5 40 9.5 32.5 57.5 81.5 107.5 132.5 D-G5NT 20 1.5 25 50 75 25 0.5 25.5 50.5 75.5 32 2 26 51 76 101 40 8 31 56 81 106 131 D-C7l D-C80 D-C73C D-C80C D-B5l

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Unit: g Model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Auto Switch Dimensions Auto Switch Internal Circuit D-M9 M2.5 x 4l mounting hole Slotted set screw Indicator light D-M9B, N, P D-M9N DC(+) Brown 2.6 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC(-) Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC(+) Brown 22

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MQ (mm) Auto Switch Mounting Height D-M9m D-M9mW D-M9mA D-A9m D-C7m D-C80 D-H7m D-H7mW D-H7NF Auto switch model D-B5m D-B64 D-B59W D-G5NT D-H7C RHC D-M9mV D-M9mWV D-M9mAV D-A9mV D-A3mA D-G39A D-K39A D-A44A D-C73C D-C80C RZQ Bore size Hs Hs Hs Hs Hs Hs 20 23.5 25.5 22.5 25 60 69.5 25 26 28 25 27.5 62.5 72 32 29.5 31.5 28.5 31 66 75.5 40 33.5 35.5 32.5 35 70 79.5 D-X 169 CM2Y Series Minimum

Electric Actuator/Slider Type

Auto Switch Specications Grommet PLC: Programmable Logic Controller D-M9 , D-M9 V (With indicator light) 2-wire load current is reduced (2.5 to 40 mA). Auto switch model D-M9N D-M9NV D-M9P D-M9PV D-M9B D-M9BV Electrical entry In-line Perpendicular In-line Perpendicular In-line Perpendicular Flexibility is 1.5 times greater than the conventional model (SMC comparison).

Made to Order

D-H7BA D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C80 D-H7 D-H7W D-H7NF D-H7BA D-M9(V) D-M9W(V) D-M9A(V) D-A9(V) D-C7 D-C80 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B64 D-B59W D-A9(V) Bore size (mm) Bore size (mm) B 24 (32) 24 (32) 25 (33) 27 (36) 32 (36) B 20 (28) 20 (28) 21 (29) 23 (32) 28 (40) A A 21.5 (29.5) B 20.5 (28.5) A B 15.5 (22.5) A B 17.5 (25.5) A B 19.5 (27.5