REA/REB

15 Auto switch model Bore size (mm) D-A9 A dimension D-M9 B dimension C dimension D dimension D-A9 D-M9 D-A9 D-M9 D-A9 D-M9 21.5 76.5 72.5 56.5 60.5 17.5 15 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8

CY1

Stopper (mm) Adjustment bolt Model Stroke adjustment range L L CY1H10, CY1H15, 0 to 15 CY1H20 CY1H25, CY1HT25, 0 to 30 CY1HT32 57 58 Series CY1 Auto Switch Specifications Auto switch application table Auto switch part number Cylinder model CY1R CDY1S CY1L CY1H D-A72, D-A73, D-A80 Reed switches Solid state switches D-A72H, D-A73H, D-A76H, D-A80H D-A73C, D-A80C Note 1) D-A90, D-A93, D-A96

Table of Contents

D-M9 D-F9W 22 (24.5) ( ): Denotes the values of D-A93.

CJ2X/CUX/CQSX/CQ2X/CM2X

, D-F9WV D-A9V D-M9, D-F9W D-M9V No. of auto switches mounted 2 pcs. 15 Note) 10 10 5 MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.

CJ2X/CUX/CQSX/CQ2X/CM2X

, D-F9WV D-A9V D-M9, D-F9W D-M9V No. of auto switches mounted 2 pcs. 15 Note) 10 10 5 MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.

Compact Type

47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

MXS Series Air Slide Table

, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model Operating range A 10 40 10 75 20 50 75 100 20 40 100 30 150 30 50 125 125 150 MXS6 MXS8 MXS12 MXS16 MXS20 MXS25 5.9 4.5 5.6 17.6 3.6 5.6 23.6 3.6 15.6 5.6 3.6 21.6 7.6 5 10.9 14.9 47.9 8.9 45.9 5.9 22.9 3.9 12.9 6.9 4.9 20.9 A E 11.6 6 28.4 10.4 41.4 70.4 26.4 39.4 68.4 18.4 20.4 16.4 8.4 8.4 6.4 18.4 16.3 7 28.7 8.7 38.7 61.7

MXS

, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model Operating range A 10 20 30 40 75 100 125 150 10 20 30 125 75 100 40 50 150 50 3.6 (1.1) 3.6 (1.1) 3.6 (1.1) 15.6 (13.1) 21.6 (19.1) MXS6 5.6 5.6 5.6 17.6 23.6 4.5 5.9 45.9 (43.4) 8.9 (6.4) 3.9 (1.4) 4.9 (2.4) 12.9 (10.4) 20.9 (18.4) MXS8 47.9 10.9 5.9 6.9 14.9 22.9 5 7.6 A E CL 39.4 (36.9) 68.4 (65.9) 26.4 (23.9) 16.4 (13.9) 6.4

Compact Type Dual-Rod Cylinder Series CXSJ

47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

Compact Cylinder

( ) is for D-A93.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Free Mount Cylinder

D-M9 D-F9W 22 (24.5) ( ): Denotes the values of D-A93.

Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

Turntable Cylinder Series MGT

1) D-Z8 type D-A9 type D-F9 type D-Y6 type Ball bushing D-Y7 type Note 1) Vertical outlet types cannot be mounted.

Sine Cylinder Series REC

CY D-A93 Less than 50 strokes CX D-M9 D-M9W Less than 55 strokes Less than 20 strokes MQ RHC RZQ D-X Individual -X 1037 Series REC Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height Reed auto switch Solid state auto switch D-M9 D-M9W D-A9 Hs Hs Auto switch Auto switch 8.5 8.5 A 22 A B B 16.5 16.5 22 (24.5) ( ): For D-A93 type D-C7, C80 D-G5NTL 8.5 12

Sine Cylinder Series REC

CY D-A93 Less than 50 strokes CX D-M9 D-M9W Less than 55 strokes Less than 20 strokes MQ RHC RZQ D-X Individual -X 1037 Series REC Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height Reed auto switch Solid state auto switch D-M9 D-M9W D-A9 Hs Hs Auto switch Auto switch 8.5 8.5 A 22 A B B 16.5 16.5 22 (24.5) ( ): For D-A93 type D-C7, C80 D-G5NTL 8.5 12

CXS

44.5 A 19.5 29.5 35.5 43 44 53 D 7.5 5 2 5 7 7.5 MY 6 10 15 20 25 32 CY MG CX Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

CXS

44.5 A 19.5 29.5 35.5 43 44 53 D 7.5 5 2 5 7 7.5 MY 6 10 15 20 25 32 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

CLS

97.5 96 97.5 144 154 10 8 15 13 3.5 1.5 5.5 200 200 10 107.0 108.0 107.5 108.0 154 164 12.5 10.5 17.5 15.5 6 4 8 D-Y7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Operating Range Auto switch model Bore size (mm) 125 140 160 180 200 D-Z7/Z80 14.5 14 13 14 14.5 Hs D-A3/A44 D-A5/A6 A 10 10 10 10 10 D-A59W Ht 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 8 7.5 7 12 13 D-Y7BAL

Stroke Reading Cylinder and Counter

-X 663 CE1 Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height D-A9V D-M9V D-M9WV D-M9AV D-A9 D-M9 D-M9W D-M9A 12 to 20 25 U B A 32 to 63 D-A9 D-M9 D-M9W D-M9A D-A9V D-M9V D-M9WV D-M9AV U D-A7 D-A80 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NT D-F7BA D-A73C D-A80C D-J79C D-A79W D-F7WV D-J7V D-F7BAV 12 to 20 U B A 32 to 63