Rotary Actuator/Vane Type

[mm] Size A B C D E (g7) F (h9) G K L M N P Q R T W W1 Y 10 29 15 29 14 40.004 0.016 9 0 0.036 3 9 0.5 9.5 9.5 24 M3 x 0.5 depth 6 M3 x 0.5 3.6 19.8 35 18.5 15 34 20 29 18 50.004 0.016 12 0 0.043 4 10 0.5 14 10 29 M3 x 0.5 depth 5 M3 x 0.5 7.6 21 35 18.5 20 42 29 30 20 60.004 0.016 14 0 0.043 4.5 10 0.5 20 13 36 M4 x 0.7 depth 7 M5 x 0.8 10.5 22 25 30 50 40 31 22 80.005 0.020 16 0 0.043

Integrated Controller

400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30

MY1

MX 6.0 3.0 2.0 18 7 2.1 16 200 10 5.0 3.0 25 10 3 20 40 50 40 50 MTS 15 8.5 5.0 35 14 4.2 25 MY1C 30 14 10 49 21 6 32 100 30 MY 30 60 23 20 68 30 8.2 40 115 35 35 93 42 11.5 50 20 20 CY 150 50 50 130 60 16 63 50 The above values are the maximum allowable values for moment and load.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

Compact Cylinder with Solenoid Valve/

40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 Surge voltage suppressor Diode (Non-polar: Varistor) 32 1 Indicator light LED Note) The S and Z types of surge voltage suppressor have an internal circuit allowing voltage drop, so use within the following allowable voltage range.

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

e-Rodless Actuator

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Double acting, single rod w/XB13, XC8, XC9, XC10 or XC11; Double acting double rod w/XC10; XB13 capable of low speeds range of 5 to 50 mm/sec; XC8 option has adjustable stroke in the extend direction; XC9 option has adjustable stroke in the retract direction; XC10 is dual stroke with 4 positions (double rod type); XC11 is dual stroke with 3 positions (single rod type); Bore sizes (mm): 20

Double acting, single rod w/XB13, XC8, XC9, XC10 or XC11; Double acting double rod w/XC10; XB13 capable of low speeds range of 5 to 50 mm/sec; XC8 option has adjustable stroke in the extend direction; XC9 option has adjustable stroke in the retract direction; XC10 is dual stroke with 4 positions (double rod type); XC11 is dual stroke with 3 positions (single rod type); Bore sizes (mm): 20

Double acting, single rod w/XB13, XC8, XC9, XC10 or XC11; Double acting double rod w/XC10; XB13 capable of low speeds range of 5 to 50 mm/sec; XC8 option has adjustable stroke in the extend direction; XC9 option has adjustable stroke in the retract direction; XC10 is dual stroke with 4 positions (double rod type); XC11 is dual stroke with 3 positions (single rod type); Bore sizes (mm): 20

Air Slide Table

D Adjustment range E 0.5 Model A B C D E MXQ6(A) 51.5 37 32 35 30 MXQ8(A, C) MXQ6B 51.5 37 31 35 29 MXQ12(A, C) MXQ8B 56.5 38 31 37 30 MXQ16(A) MXQ12B 61.5 40 31 38 30 MXQ20(A) MXQ16B 68.5 42 32 41 31 MXQ25(A) MXQ20B 75.5 44 32 43 31 Max. B A A Shape of the adjustment part varies (hexagonal hole, width across flats, slot) depending on the model of the adjuster.

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

CLS

35 39 39 39 49 Up to 1000 3 5 30 46 M14 x 1.5 M30 x 1.5 161 78 18 110 146 128 16 114 64 110 27 Up to 1000 M16 x 1.5 M36 x 1.5 182 95 23 132 169 144 18.5 130 74 120 30.5 Up to 1200 16 21 35 5 5.5 6 30 34 42 25 31 41 M18 x 1.5 M40 x 1.5 204 106 36 167 195 162 18.5 149 86 135 35 Up to 1200 M12 x 1.75 118 226 124 40.5 187 216 182 18.5 165 97 135 M20 x 1.5 35 M45 x 1.5 Up to 1200 M16

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

38 43.5 50.5 59 69.5 Hs 24.5 27 30.5 35 40.5 47.5 20 25 32 40 50 63 80 100 Note 1) Values in parentheses are for the long stroke type.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

40 45 50 55 60 35 40 45 50 55 60 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L

MHZ

(For D-Y) 4 Finger Position/Narrow Type 9 MHZ2-20N 14 Auto switch mounting groove (For D-F, D-M9(V)) 2.1 +2.2 0 0 0.4 When open 17.2 When closed 7.2 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-35 35 Series MHZ2 Dimensions MHZ2-25 Double acting/Single acting Basic type 36.5 22 2-M6 x 1 thread depth 10 (Mounting thread) 4-M6 x 1 thread

MHZ

(For D-Y) 4 Finger Position/Narrow Type 9 MHZ2-20N 14 Auto switch mounting groove (For D-F, D-M9(V)) 2.1 +2.2 0 0 0.4 When open 17.2 When closed 7.2 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-35 35 Series MHZ2 Dimensions MHZ2-25 Double acting/Single acting Basic type 36.5 22 2-M6 x 1 thread depth 10 (Mounting thread) 4-M6 x 1 thread

Solid State Auto Switches

D-B35 Reed switch Contacts protection resistance () () Current limiting resistance DDLight emitting diode (LED) Diode 1649 Series D-B3 Dimensions (mm) Terminal conduit type D-B3 Terminal conduit type D-B3J 42 42 500 G 1/2 59 38 59 38 6 41.5 41.5 85 69 35 35 42 8 8 59 1 2 85 Recommended minimum bending radius for lead wire RT : 25 mm or more 120C : 50 mm or more Terminal part Dimensions for

Tie-rod Type Hydraulic Cylinder

53 20 26 3/8 30 18 112 43 63 21 55 16 8 27 22.4 30 17 13 M10 x 1.5 M18 x 1.5 28 25 80 17 40 60 22 26 3/8 30 20 116 47 80 26 65 M12 x 1.75 18 8 31 28 32 22 15 M22 x 1.5 32 29 100 20 45 75 26 30 1/2 35 22 127 57 100 34 80 M27 x 2 M12 x 1.75 20 6.5 35 35.5 35 27 16 38 34 118 19 50 90 27 32 1/2 35 24 137 66 125 34 80 M14 x 2 M27 x 2 22 6.5 41 35.5 35 27 16 38 34 140 19 55 112 27 32 1/2 35 26

Auto Switch Guide

(Tightening torque of M2.5 screw should be 0.1 to 0.2 Nm.) 20 Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Data Auto Switch Mounting Bracket Part No.