Table of Contents

m Dd9 L (Drill through) 3 x 18 l 4 x 25 l 4 x 35 l 4 x 36 l 0.040 0.076 CD-M03 CD-M05 CD-M08 CDP-7A 10 14 22 25 20, 25 32, 40 50, 63 80 3 4 4 4 4 4.5 5 5 36 51 72 78 44 60 82 88 0.050 0.093 0.065 0.117 0.065 0.117 l m L Note) When using cotter pins, flat washers are used together.

High Vacuum Angle Valve

Symbol Model Remarks Nil Without auto switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

XM, XY

range D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) H0 5 to 60C 5 to 150C Nil M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch y Number of auto switches/Detecting position Detecting position Valve open/closed Valve open Valve closed Symbol Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Smooth Cylinder/Low Speed Cylinder

CDQSXB20-30D CDQSXB12-5D 60 CQ-M5 x 60 L 30 CQ-M3 x 30 L 35D 10D 65 x 65 L 35 x 35 L 40D 15D 70 x 70 L 40 x 40 L 6.5 Example) CQ-M3x30 L 4 pcs. 6.5 45D 20D 75 x 75 L 45 x 45 L REA 50D 25D 80 x 80 L 50 x 50 L CDQSXB25-5D 30D Mounting bolt 40 55 x 55 L CQ-M5 x 40 L REB 10D CDQSXB16-5D 45 30 x 45 L CQ-M3 x 30 L 15D 10D 50 35 x 50 L x 35 L REC 20D 15D 55 40 x 55 L x 40 L 6.5 CY 25D 20D 60 45

Air Cylinder

ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 CBM2U Bore size Stroke A Rod trunnion: * -H -R -W N L CBM2T Bore

MHZ

) 3-wire (PNP) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) Y59AZ Auto switches marked with a symbol are produced upon receipt of order.

MHZ

) 3-wire (PNP) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) Y59AZ Auto switches marked with a symbol are produced upon receipt of order.

Electric Actuator/Slider Type

Weight (g) Auto switch model D-M9N(V) D-M9P(V) D-M9B(V) 0.5 m (Nil) 8 7 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 5 m (Z) 68 63 Dimensions (mm) D-M9 D-M9 V M2.5 x 4 L M2.5 x 4 L Indicator light Slotted set screw Slotted set screw 8 Indicator light 2 3.2 4.6 2.6 4 2.7 2.8 2.7 20 2.8 4 22 3.2 2.6 9.5 Most sensitive position 6 4 6 Most sensitive position 62 2-Color Indication Solid State

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Bore size (mm) Dd9 L l m d Part no.

Auto Switch Guide

L D-A73 (Example) RS H A Lead wire length RZQ 5 m None Nil L 0.5 m 3 m Z N MI W S Applicable for the connector type (D-C) only.

Auto Switch Guide

M5 x 0.8 x 16 l 1.

Auto Switch Guide

screw M5 x 0.8 x 16 l 1.

Auto Switch Guide

M5 x 0.8 x 16 l 1.

Auto Switch Guide

switch mounting screw M5 x 0.8 x 16 l 1.

Auto Switch Guide

M5 x 0.8 x 16 l 1.

Air Cylinder

159 + l 150 172 + l 136 158 + l 149 171 + l 32 141 163 + l 156 178 + l 141 163 + l 156 178 + l 40 164 184 + l 182 202 + l 159 (168) 179 (188) + l 177 (186) 197 (206) + l 50 190 210 + l 210 230 + l 185 (197) 205 (217) + l 205 (217) 225 (237) + l 63 195 215 + l 217 237 + l 190 (202) 210 (222) + l 212 (224) 232 (244) + l 80 236 245 + l 254 263 + l 230 (244) 239 (253) + l 248 (262) 257 (277)

Made to Order

Cylinders Mechanically Jointed Rodless Cylinder Stroke adjusting unit Bore size Type Model 10 16 20 25 32 40 L H L H L H L H L H L H L H L H L L L H L H L H L H L H L H L H L H 50 RJ1412H RJ1007H RJ1412H RB1007 RB1412 -XB22 MY1B-Z MY1H-Z RB1412 RB2015 Standard RJ0806H RJ1007H RB0806 RB1007 -XB22 RJ0805 MY1B Standard RB0805 RJ0806H RJ1007H RJ1412H RB1007 RB1412 RJ1412H -XB22 MY1M MY1C RJ1007H

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Cable length (L) [m] 3 3 5 5 A 10 C 20 LE-CYM-llA-l: Motor cable L 50 7 U V W G M4 Crimped terminal LE-CYB-llA-l: Motor cable for lock option L 50 7 3-M4 Crimped terminal LE-CYE-llA: Encoder cable L (60) (100) 12 (7) (32) D 19 5 3 1 6 4 2 25 Battery case Depth dimension: 25 mm Product no.

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Weight (g) D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 5 m (Z) 68 63 Dimensions (mm) D-M9 D-M9V Mounting screw M2.5 x 4 L Slotted set screw (flat point) 500 (1000) (3000) (5000) Indicator light 2.6 3.95 Mounting screw M2.5 x 4 L Indicator light 2.8 Slotted set screw 2 7.5 0.3 22.8 2.6 15.9 4.6 2.8 2.6 19.5 2.6 6 Most sensitive