1

X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket MY2H X168 Bore size Stroke Auto switch Suffix X417 1 1 1 1 2 1 1 L, H, LS, HS Nil W Z L H LZ HZ Nil W L H With X416 (1 pc.) on only one side With X416 (2 pcs.) (With each 1pc. for both sides) With X416 on one side, X417 on the other side (1 pc.)

Table of Contents

30.5 18 12 29 5 50 70.5 30.5 18 12 29 5 50 86.5 39 23 14 35 7 61 86.5 39 23 14 35 7 61 B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS

CA2

) n = 2, 4, 6, 8 Same side 15 90 100 110 35 75 80 90 100 1 Different sides With 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side

Table of Contents

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

CL

13 13 16 16 17 20 30 25 l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 40 50 63 80 100 125 140 160 207 3.2 3.2 3.2 4.5 6.0 8 9 9 70 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 244 36 45 45 60 60 75 75 75 252 42 50 59 76 92 100 112 118 27 30 31 37 40 35 35 39 16.5 16.0 16.0 18.0

MNB

, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com LX ZZ + 2 strokes LZ Bore size (mm) Stroke range (mm) Effective thread length (mm) Width across flats 32 40 50 63 80 100 A 22 30 35 35 40 40 B 54 63 75 90 102 116 B1 17 22 27 27 32 41 H1 6 8 11 11 13 16 B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4 C 32.5 38

MNB

(mm) Effective thread length (mm) Width across flats 32 40 50 63 80 100 A 22 30 35 35 40 40 B 54 63 75 90 102 116 B1 17 22 27 27 32 41 H1 6 8 11 11 13 16 B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4 C 32.5 38 46.5 56.5 72 89 D 12 16 20 20 25 30 F 13 13 14 14 20 20 GA GC 45.5 52.5 58.5 68 81 96 Ee11 30 35 40 45 45 55 GB 13 14 15.5 16.5 19 19 GF 18.3 19.5 22.4 20.7 26 26 GL1 12 12 15

Modular F.R.L. Unit

278 278 Z 6 7 7 7 Y 14 19 21 21 W 28.5 38.5 42.5 42.5 V 30 31 35.5 37 U 2.3 2.3 2.3 2.3 T 55 53 70 70 S 15.4 8 10.5 10.5 Q 5.4 6.5 8.5 8.5 P 44 46 54 56 N 34 40 54 54 M 30 41 50 50 K 5 3.5 1.5 1.2 J 27 30.5 38.5 38.5 H 63 70 76 76 E 40 57 73 73 D 52 59 75 75 C 73 86 92 93 B 160 201 239 242 A 40 53 70 75 G 80 80 105 105 1/8, 1/4 1/4, 3/8 AW20K AW30K AW40K AW40K-06 1/4, 3/8, 1/2 3/4 Optional

Cylinder with Lock

4, 6, 8)1 110 + 100 (n 2) (n = 2, 4, 6, 8)1 1 60 65 75 80 85 2 (Different surfaces) 70 75 80 85 2 (Same surface) n (Different surfaces) 70 + 30 (n 2) (n = 2, 4, 6, 8)1 75 + 30 (n 2) (n = 2, 4, 6, 8)1 80 + 30 (n 2) (n = 2, 4, 6, 8)1 85 + 30 (n 2) (n = 2, 4, 6, 8)1 D-A44 n (Same surface) 70 + 50 (n 2) (n = 2, 4, 6, 8)1 75 + 50 (n 2) (n = 2, 4, 6, 8)1 80 + 50 (n 2) (n = 2, 4, 6, 8)1

Battery-less

E LEYG16M E 1 LEYG16M E 1 LEYG16M E LEYG16M E 0.1 0.1 10 100 1000 70 75 10 100 1000 70 75 Stroke [mm] Stroke [mm] Set the speed to less than or equal to the values shown below.

CQS

10, 15, 20 25, 30 5, 10, 15, 20 25, 30, 35, 40 45, 50 Long stroke 12 16 20 Single Rod Double Rod Return/Extend Single Rod Single Rod 1* 2* 2.2-2 Double Acting Single Acting Double Acting Double Acting 35, 40, 45, 50, 75 100 75, 100, 125, 150 175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Reed switch D-A90, A90V D-A93, A93V D-A96, A96V Series CQSW Basic Non-rotating Rod Anti-lateral Load

JIS Standard Hydraulic Cylinder

15 (n 4) 2 D-M9 D-M9W Note 1) (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 85 + 40 15 + 40 100 + 40 90 + 40 110 + 40 n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 2 (Different surfaces and same surface), 1 60 75 65 85 15 D-M9V D-M9WV Note 1) (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 60 + 30 15 + 30 75

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

needle Note) 2-Rc 1/8 thread depth 6.5 (Piping port) ZZ S SS 16 14 30 Z 8 38 M10 x 1.5 x 8l (Hexagon socket head set screw) (Steel ball) 36 1 (5) 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 75 0.2 75 0.2 102 96 44 76 5 6.3 M8 x 1.25 x 16l (Hexagon socket

MXS Series Air Slide Table

Allowable moment Wmax: Table 2 1=W/Wa Calculate static moment Wa(N) Wa=1 x 1 x 40=40 K=1 =1 Wmax=40 1=10/40=0.25 Calculate load rate 1 of static moment. 3-2 Load rate of static moment Rolling Yawing Calculate static moment M(Nm).

15

1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions

MGG

depth 9 94 12 26 65 16 114 35.5 82 62 37 3 162 228 14 170 95 134 50 75 105 12 31 M8 x 1.25 depth 13 84 20 138 35.5 82 62 37 3 165 228 14 173 95 134 50 75 106 12 38 M8 x 1.25 depth 13 84 20 138 40 93 75 44 4 183 274 15 192 115 152 56 90 116 12 47 M10 x 1.5 depth 16 94 25 164 46 Series MGG Dimensions Rc 1/8 front cylinder port Rc 1/8 rear cylinder port Front mounting flange 20 to 40 Rc 1/8

CHKD/CHKG

Rod end male threads (mm) (mm) Bore size (mm) Bore size (mm) a b c e f g h LW M P Q R X1 Y1 Z ZZ SS 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 44.5 43 1/8 16.5 6 10.5 15 7.5 58 73 12.5 15 M10 x 1.25 6 10 33 91 50.5 49 1/8 17 8 10.5 15 7.5 60 75 15.5 18 M12 x 1.25 6 12 36 96 64.5 63 1/4 19.5 10 11 16 8 67 83 22 25 M16 x 1.5 7 14 44 111 71 1/4 20.5 10 20 10 75 95 72.5 13 27 30 M20 x

7ND9071en

Stroke volume of actuator < 1 dm3. G 1/4 (ND91 series), 1/4 NPT (ND92,ND93 and ND94 series). 03 Medium capacity. Stroke volume of actuator 13 dm3. G 1/4 (ND91 series), 1/4 NPT (ND92,ND93 and ND94 series). Ex nA IIC T4/T5/T6 Gc Temperature range: T4: -40 to +85 C; T5: < +75 C; T6: < +60 C.

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

CL

13 13 16 16 17 20 30 25 l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 40 50 63 80 100 125 140 160 244 36 45 45 60 60 75 75 75 252 207 3.2 3.2 3.2 4.5 6.0 8 9 9 70 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 16.5 16.0 16.0 18.0 18.0 40 40 40 42 50 59 76 92 100 112 118 27 30 31 37