ISO Cylinder

C85LlA 20 40 95 Foot (2 pcs. with 1 mounting nut) C85LlB 55 105 210 Mounting bracket Calculation example: C85WE20-50MV O Basic weight205 g (20) O Additional weight12.0 g (at 10 mm stroke) O Cylinder stroke50 mm O Mounting bracket: Double foot210 g O Accessory: Rod end45 g Flange C85Fl 12 25 90 Trunnion C85Tl 20 50 75 Rod end KJlD 17 25 45 70 Double knuckle joint GKMl-l 10 20 50 100 Accessory

Table of Contents

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Coil rated voltage 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz Electrical entry 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz G Grommet (Lead wire length: 300 mm) H Grommet (Lead wire length: 600 mm) E Grommet terminal 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz T Conduit terminal 9 Other D DIN terminal DO Without connector With connector Option How to Order Pilot Valve Assembly SF4 50 DZ 1

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) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up valve Note) The

Modular Design with Uniform Body Style

AC30-D Y400-D 5.2 51 19.2 71 AC40-D Y500-D 5.2 54 21.2 71 AC40-06-D Model A B C D E EE F G H J K Applicable size Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 AC20-D Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 AC30-D Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 AC40-D Y500T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 AC40-06-D Y600T-D 6.2 140 60 115 50 70 20 11 31.2 8 70 AC50-D AC60-D Y600-D 6.2

ZP

5 10 102.5 52.5 16.5 20 112.5 62.5 (Rotating angle) 40 19.5 13.5 50 40, 50 50 12 30 122.5 72.5 50 167.5 92.5 75 Vacuum inlet: One-touch fitting Applicable tubing O.D.

Air Cylinder

1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 30 36 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 48 61 73 86 111 136 161 25 32 36 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 32

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76 g 81 g Weight Without lead wire with connector 40 g 38 g 43 g 16-2-5 6 Series ZSE30/ISE30 Setting Pressure setting Press the button.

Rotary Actuator

Size: 30/50/63/80/100 Single shaft with four chamfers: ClRA1BX Double shaft with key: ClRA1BY Double shaft with four chamfers: ClRA1BZ L 0 0.2 L 0 0.2 0 0.1 0 0.1 G G N N H H H U U UU UU M N H L K 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size G H N U L 30 6 13 8 53 7.8 50 11 27 15 89 14 63 13 29 17 105 16 80 15 38 20 130 19 100 19 44 25 156 24 Size H K UU L 30 25 3 90 14 50 36 5 134 25 63 41 5 158

Air Slide Table

50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10

MY1

X Z Y m3 x g x X x m2 x g Vertical mounting Mounting orientation Ceiling mounting m2 Horizontal mounting m1 Wall mounting m3 Vertical mounting m4 Note) M3 Static load (m) M1 m4 x g x Z m1 x g x X m2 x g x X M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

Battery-less

D-G

Proposals for Energy Saving

50/60Hz 220VAC, 50/60Hz 24VDC 12VDC 240VAC, 50/60Hz Other (32A) 1 1/4 (40A) 1 1/2 2 (50A) 2 4 5 6 5 7 9 Optional How to Order Pilot Valve Assemblies 00 VT3113 G 1 Electrical entry Rated coil voltage 1 100VAC, 50/60Hz 200VAC, 50/60Hz 110VAC, 50/60Hz 220VAC, 50/60Hz 24VDC 12VDC 240VAC, 50/60Hz Other 1 2 3 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light

VFS

Body (Pilot exhaust) 20: Individual EXH Electrical entry T: Conduit terminal D-Y: DIN terminal G: Grommet E: Grommet terminal 30: Common EXH Coil rated voltage 3 2 1 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) Manifold only 4 220 VAC (50/60 Hz) Pilot type 6 5 24 VDC 12 VDC Internal pilot Nil External pilot R 7 240 VAC (50/60 Hz) 9 Other Option.

ZP

Model Weight (g) Pad dia.

Made to Order

M8 x 1.25 28.5 7 41 9 25 6 17 75,100 40.5 88.5 B + Stroke MH + Stroke A + 2 x (Stroke) 5 to 50 40 (50) 88 (98) 40 M10 x 1.25 27 46 7 41 10 25 6 19 32 to 100 75,100 50 98 10 to 50 100.5 (110.5) 40.5 (50.5) MI MM 50 M14 x 1.5 31 57 8 52 13 35 8 24 75,100 110.5 50.5 10 to 50 102 (112) 42 (52) 63 M14 x 1.5 31 68 8 52 13 35 10 24 G 75,100 112 52 10 to 50 125 (135) 51 (61) 80 MA ML MK M20 x 1.5

Modular F.R.L. Unit

60 20 25 30 40 50 60 Body size Body size X430 X440 Low temperature High temperature Thread type Thread type Nil Rc Nil Rc N NPT N NPT F G F G Port size Port size Body size Symbol Port size Body size Symbol Port size 25 30 40 50 60 20 25 30 40 50 60 02 1/4 01 1/8 03 3/8 02 1/4 04 1/2 03 3/8 06 3/4 04 1/2 10 1 06 3/4 Option Note 1) 10 1 Symbol Nil B G Note 2) Applicable model AR25 to 60 AR25

High Vacuum Angle Valve

How to Order [Option] XLGV M9N 16 A 1 G L Flange size 16, 25, 40 1 q e u r t XLGV M9N 50 A 1 G L Flange size 50, 63, 80 i w y o !0 !

Best Pneumatics Vol. 14

60 20 25 30 40 50 60 X430 X440 Low temperature High temperature Thread type Thread type Rc NPT G Rc NPT G Nil N F Nil N F Port size Port size Body size Port size Body size Symbol Port size Symbol 25 30 40 50 60 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10 1/8 3/8 1/4 1/2 3/8 3/4 1/2 1 3/4 Option (1) 1 Symbol Nil B G (2) Applicable model AR25 to 60 AR25 to 60 AR25 to 40 Option

SY

(Connector, socket x 2pcs. only) 2 200VAC 50/60Hz Lead wire length Note 2) "R" and U" specifications are only available for DC. 110VAC 50/60Hz [115VAC 50/60Hz] 3 300mm Nil Electrical entry 4 220VAC 50/60Hz [230VAC 50/60Hz] 6 600mm G Grommet (lead wire length: 300mm) H Grommet (lead wire length: 600mm) 1000mm 10 15 20 25 30 50 1500mm 2000mm 2500mm 3000mm 5000mm L With lead wire L type plug