MXS Series Air Slide Table

M8 X 1 MXS-AS12-X11 15 30 D F MXS-AS12-X12 25 40 MXS-AS16 5 24.5 MXS16 Mounted to table 16.5 M5 X 18 19 M5 X 18 12 5 21 14 37 11 MXS-AS16-X11 15 34.5 M10 X 1 MXS-AS16-X12 25 44.5 Q MXS-AS20 5 27.5 MXS20 M12 X 1.25 21 M6 X 20 24 M6 X 20 13 6 25 17 13 45.5 MXS-AS20-X11 15 37.5 I MXS-AS20-X12 25 47.5 J H MXS-AS25 5 32.5 MXS25 MXS-AS25-X11 15 42.5 25.5 M8 X 25 M8 X 25 17 6 31 19 26.5 M14 X 1.5

MXS

MXS16 Mounted to table 16.5 M5 X 18 19 M5 X 18 14 5 21 37 12 11 MXS-AS16-X11 15 34.5 M10 X 1 MXS-AS16-X12 25 44.5 Q MXS-AS20 5 27.5 MXS20 M12 X 1.25 21 M6 X 20 24 M6 X 20 17 6 25 13 13 45.5 MXS-AS20-X11 15 37.5 I MXS-AS20-X12 25 47.5 J H MXS-AS25 5 32.5 MXS25 MXS-AS25-X11 15 42.5 25.5 M8 X 25 M8 X 25 19 6 26.5 M14 X 1.5 31 17 16 53.5 MXS-AS25-X12 25 52.5 * Size of hexagon socket head cap

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

CJ2X/CUX/CQSX/CQ2X/CM2X

, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

CJ2X/CUX/CQSX/CQ2X/CM2X

, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

Rotary Actuator

Applicable shaft types: S, W CRB1 Y2 = X = X = Y = X = MSU CRJ CRA1 CRA1 CRQ2 Y = Y1 = Y1 = Y2 = [mm] [mm] MSQ [mm] Size Y1 Y2 W Y 30 3 to 8 15 to 25 50 1 to 20 18.5 to 36 63 1 to 22 21 to 41 80 1 to 25 25 to 50 100 1 to 30 32.5 to 60 Size X Y1 Y2 W Y W Y 30 15 to 25 3 to 8 15 to 25 50 18.5 to 36 1 to 20 18.5 to 36 63 21 to 41 1 to 22 21 to 41 80 25 to 50 1 to 25 25 to 50 100 32.5 to 60 1

CXT

Q+Stroke (NA) Cylinder form 12 16 (mm) d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 X 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 X 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 X 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54

Free-Mounting Cylinder with Air Cushion Series CU

32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth 11.5 53 51.5 56 72 74.5 83 30 38 48 5 6 7 5 6 8 M6 x 1.0 M8

Rotary Table

Load voltage Internal voltage drop (illuminated load current load when ON) range AC DC 24V or less 50mA Relay D-A90 AC DC 48V or less 40mA Not provided PLC D-A90V IC circuit AC DC 100V or less 20mA D-A93 2.4V or less (up to 20mA) 3V or less DC24V 5 to 40mA D-A93 Provided Relay (up to 40mA) D-A93V PLC D-A93V 2.7V or less AC100V 5 to 20mA 2.7V or less D-A96 D-A96V DC4 to 8V 20mA 0.8V or less

CRQ2

Indicator light Special function Electrical entry Wiring (output) Electrical entry direction 0.5 (Nil) 3 (L) 5 (Z) Applicable loads Type DC AC Perpendicular In-line A96 A96V 3 wire (NPN equiv.) 5V IC circuit A96L A96VL Reed switch Solid state switch Yes A93 A93V 100V Grommet A93L A93VL Relay, PLC 2 wire 24V A90 A90V 5V, 12V No 100V or less IC circuit A90L A90VL F9N F9NV

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Power Cylinder Series MGZR 20, 25, 32, 40, 50, 63, 80 Non-rotating Double Power Cylinder Series MGZ 20, 25, 32, 40, 50, 63, 80 Double extension output power (without non-rotating mechanism) 20 are 20 are and 25 sizes newly added. and 25 sizes newly added.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Rod Return/Extend Single Rod Accessories . 5 Long stroke 12 16 20 Double Acting Single Acting Double Acting 35, 40, 45, 50, 75, 100 75, 100, 125, 150 175, 200 75, 100, 125, 150 175, 200, 250, 300 Construction . 6 25 Dimensions . 7 & 8 Reed switch D-A90, A90V D-A93, A93V D-A96, A96V Series CQSW Basic Non-rotating Rod 12 16 5, 10, 15, 20 25, 30 How to Order . 1 Construction . 9 20 25 5, 10

MXQ

25 mm) is not available in Series MXQ6.

Table of Contents

Auto switches are shipped together but not assembled. 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Action D Double acting Port thread type Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50, 60 5, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100 Nil TN TF Applicable Auto Switches/Refer

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

16 25 40 Operating range Bore size 16 25 40 Operating range 58 102 3.0 58 102 3.5 58 102 3.5 58 152 8.0 58 152 9.0 58 152 11.0 89 241 6.5 89 241 7.0 89 241 7.5 (mm) (mm) (mm) C C C D D D Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 31 129 3.4 31 129 3.5 31 129 4.0 3.5 3.5 61 149 61 149 61 149 4.0 5.0 3.0 94.2 235.8 94.2 235.8 94.2

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

CY1F10 to 25-AAL CY1F10 to 25-AAR L EA approx.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

CY1F10 to 25-AAL CY1F10 to 25-AAR L EA approx.

CLQ

Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 Applicable bore size (mm) Snap ring l Part no.

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

RHC MK(2) Minimum Operating Pressure RS Q G Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 RS H A 0.02 0.01 RZQ Standard Stroke Replacement Parts: Seal Kit MI W S Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit no. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 CEP1 20 25 32 40 50